Command Reference
MagnaTran 7.1 User’s Manual
Set Interlock
MN-003-1600-00
Brooks Automation
8-128
Revision 2.2
Set Interlock
Purpose
Sets the state of specific interlocking capabilities.
Format
SET [INTER |INTLCK [WAF_SEN (Y|N)] [TZ ON| OFF)]
Arguments
[Y|N]:
Y = Enables Wafer Sensing
N = Disables Wafer Sensing
[ON|OFF]:
ON = The robot will execute all T moves before performing Z moves
OFF = The robot will execute all T and Z moves simultaneously
Description
Wafer Sensing: Three types of wafer sensing is available: EXtend sensor, REtract sen-
sor and R_MT Radial Motion sensor. Each of these sensors is explained in
Safety Feature Operation on page 6-58
. The normal operating mode is wafer sensing
enabled. Disabling the wafer sensor interlocking will allow the robot to ignore any
type of wafer sensors during action commands. This sensing interlock should be dis-
abled for testing purposes only.
NOTE:
This command cannot be stored.
T and Z moving: In normal operation, all T and Z moves are performed simulta-
neously.
See Also:
RQ INTLCK
Example
To ignore the wafer sensors during testing:
SET INTLCK WAF_SEN N
