Command Reference
MagnaTran 7.1 User’s Manual
Set Station Option
MN-003-1600-00
Brooks Automation
8-142
Revision 2.2
Set Station Option
Purpose
Sets the various optional station-related parameters.
Format
SET STN station [[ARM]arm] OPTION [SAFETY value|PUSH value]
or
SET STN station [[ARM]arm] OPTION [SBIT_SVLV_SEN name|RETRACT_SEN
name|EX_ENABLE name|VLV_SEN name|NONE name]
or
SET STN station [[ARM]arm] OPTION [WAF_SEN (EX name|RE name)]
NOTE:
The preferred method for setting EX and RE wafer sensors is with the single step
command
Set Station Sensor on page 8-147
. The SET STN OPTION command on
this page requires two steps.
Arguments
station:
The number of the station for which parameters are being specified.
Range: 1 - 16.
ARM arm:
The arm (A or B) for which parameters are being set; the default arm is
A. The “ARM” identifier is optional.
SAFETY value :
Specifies the distance in microns the end effector may move within
the zone of a Process Module as shown in
SAFETY # = The distance the end effector will stop short of a sta-
tion’s R position during a “PLACE”.
PUSH value :
Specifies the distance in microns the end effector may move within the
zone of a Process Module as shown in
.
PUSH # = The distance the end effector may push the substrate
past a station’s R position during a “PLACE”. The distance value
is equal to or less than the station value radial distance plus the
push value distance. The push value cannot be negative. A
