MagnaTran 7.1 User’s Manual
Command Reference
MN-003-1600-00
Store Radial Motion Sense
Brooks Automation
Revision 2.2
8-163
Store Radial Motion Sense
Purpose
Stores the size of the sensing window for Radial Motion sensors.
Format
STORE R_MT SENSE [LIMITS (INNER|OUTER)] [WAFER SIZE]
Description
Stores the current settings for the Radial Motion detection sensing limits. These val-
ues along with the position where the R_MT type sensor is located in the chamber
determine the sensing window.
Examples
To stores the inner and outer limits of the Radial Motion sensor:
STORE R_MT SENSE LIMITS INNER OUTER
See Also:
See
Set Radial Motion Sense on page 8-138
for instructions on the defin-
ing the Radial Motion Sensor limits and
Set Station Sensor on page 8-147
for instructions on the defining the Radial Motion Sensor location.
