Command Reference
MagnaTran 7.1 User’s Manual
Request Radial Motion Sense
MN-003-1600-00
Brooks Automation
8-98
Revision 2.2
Request Radial Motion Sense
Purpose
Requests the size of the sensing window for Radial Motion sensors.
Format
RQ R_MT SENSE [LIMITS(INNER|OUTER)] [WAFER SIZE]
Response
invalue outervalue size
Arguments
INNER invalue:
Length from the edge of the wafer to the start of the wafer sens-
ing window in microns.
OUTER outervalue:
Length of the wafer sensing window in microns.
WAFER SIZE size:
Wafer size in microns:
200000 for 200mm wafers
300000 for 300mm wafers
Description
Displays the current settings for the Radial Motion detection sensing limits. These
values along with the position where the R_MT type sensor is located in the chamber
determine the sensing window.
Examples
To request the inner and outer limits of the Radial Motion sensor:
RQ R_MT SENSE LIMITS INNER OUTER WAFER SIZE
Response:
In Monitor Mode:
R_MT SENSE:
INNER - - - - - - - 10000 OUTER - - - - - - - -20000
WAFER SIZE - - - - - -300000
