Cleanliness Standards
Cleanliness Standards
LASAIR II Operator’s Manual
LASAIR II Operator’s Manual
Page
Page
8-3
8-3
ISO 14644-1 Standard
ISO 14644-1 Standard
The document, ISO 14644-1 (1999-05-01), was used when designing the ISO
The document, ISO 14644-1 (1999-05-01), was used when designing the ISO
14644-1 module. Only the c
14644-1 module. Only the classes specified in the document’s tables have been
lasses specified in the document’s tables have been
implemented; LASAIR II does not support intermediate class sizes or
implemented; LASAIR II does not support intermediate class sizes or
intermediate particle sizes.
intermediate particle sizes.
Use the following sources for more information about ISO 14644-1:
Use the following sources for more information about ISO 14644-1:
International Standards Organization
International Standards Organization
Web Site: www.iso.ch
Web Site: www.iso.ch
Institute of Environmental Sciences a
Institute of Environmental Sciences and Technology
nd Technology
940 East Northwest Highway
940 East Northwest Highway
Mount Prospect
Mount Prospect
Illinois, 60056
Illinois, 60056
USA
USA
T
Tel: 0101 708 255
el: 0101 708 255 1561
1561
Fax: 0101 708 255 1699
Fax: 0101 708 255 1699
e-mail: [email protected] or [email protected]
e-mail: [email protected] or [email protected]
Web Site: www.iest.org
Web Site: www.iest.org
Table 8-1: ISO 14644-1 Class Standards
Table 8-1: ISO 14644-1 Class Standards
Maximum Particles per M
Maximum Particles per M
3
3
C
Clla
assss
0
0..1
1
µ
µ
0.2
0.2
µ
µ
0.3
0.3
µ
µ
0.5
0.5
µ
µ
1.0
1.0
µ
µ
5.0
5.0
µ
µ
ISO 1
ISO 1
10
10
2
2
ISO 2
ISO 2
1
10
00
0
2
24
4
1
10
0
4
4
ISO 3
ISO 3
1
10
00
00
0
2
23
37
7
1
10
02
2
3
35
5
8
8
ISO 4
ISO 4
1
10
00
00
00
0
2
23
37
70
0
1
10
02
20
0
3
35
52
2
8
83
3
ISO 5
ISO 5
1
10
00
00
00
00
0
2
23
37
70
00
0
1
10
02
20
00
0
3
35
52
20
0
8
83
32
2
2
29
9
ISO 6
ISO 6
1
10
00
00
00
00
00
0
2
23
37
70
00
00
0
1
10
02
20
00
00
0
3
35
52
20
00
0
8
83
32
20
0
2
29
93
3
ISO 7
ISO 7
3
35
52
20
00
00
0
8
83
32
20
00
0
2
29
93
30
0
ISO 8
ISO 8
3
35
52
20
00
00
00
0
8
83
32
20
00
00
0
2
29
93
30
00
0
ISO 9
ISO 9
3
35
52
20
00
00
00
00
0
8
83
32
20
00
00
00
0
2
29
93
30
00
00
0