Vigilantplant TDLS8000, User Manual

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<3. Installation, Wiring, Optical Axis Adjustment, and Piping>
3-35
IM 11Y01D01-01EN
(2) Explosionproof/Flameproof type with validation function
If TDLS8000 is installed in the process is in situ and the validation function is used, connect the
piping as shown in Figure 3.29. For SCU Ex area and LU Ex area, feed nitrogen gas through
purge port A at 150 mL/min and for SCU area and SCU and LU area, feed nitrogen gas through
purge port B in Figure 3.29. The piping for these two areas in a unit should be separated because
flow rate is different. For flow rate of SCU and LU are, refer to 3.4 (2). For process window purge,
feed nitrogen gas through the purge ports of the alignment flange. For validation, SCU area and
LU area is used as validation cell and connect the piping with a three-way valve so that the gas
can be switched between nitrogen gas and check gas. For process window purge, feed nitrogen
gas through the purge port of the alignment flange.
Exhaust Exhaust
N
2
gas N
2
gas
N
2
gas
(150 mL/min)
N
2
gas
(150 mL/min)
Measured gas
A A
N
2
gas
Switching valve
Checking gas
B
B
Alignment flange Alignment flange
Process flange
LU side SCU side
Exhaust
Exhaust
Figure 3.29 Piping for Explosion proof/Flame proof type with validation
CAUTION
• Excess flow rate for SCU and LU Ex area may cause Detector or Laser module damage.
• Validation gas line cannot be connected to SCU or LU Ex area.
WARNING
After stoppage of purge gas, explosive gas may be inside of the enclosures. Purge inside of the
each enclosure, SCU Ex area and LU Ex area, using nitrogen for at least 60 minutes at 10 kPa at
the inlet of the enclosure before turning on the power to prevent from pressurizing internal gas by
purge gas. See Appendix 8.
(3) Explosionproof/Flameproof type with Flow cell or Isolation flange
If TDLS8000 is installed with an isolation flange or a flow cell, refer to this clause and 3.4.1 (3),
(4) or 3.4.2. The piping for analyzer internal purge area is the same as 3.4.3 (1) or (2) except the
outlets of SCU and LU area adjacent each alignment flange. Those outlets should be connected
to the inlets of alignment flange. The piping for the flow cell or isolation flange is the same as the
piping described in 3.4.1 (3), (4) or 3.4.2.
CAUTION
• Excess flow rate for SCU and LU Ex area may cause Detector or Laser module damage.
• Validation gas line cannot be connected to SCU or LU Ex area.
3rd Edition: Jun. 10, 2016-00