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<9. Inspection and Maintenance>
9-10
IM 11Y01D01-01EN
If automatic valve control is enabled, a message stating that the valves will be automatically
controlled will appear as follows. In this case, you do not need to manually control the valves
during validation.
In either screen, check the type of gas to use as check gas, and tap OK.
On the next screen, tap ENTER. If automatic valve control is enabled, the stream will be
switched, and the validation cell will be purged with check gas.
(2) Purging with the check gas
If automatic valve control is disabled, manually control the valves to purge the validation cell
with the check gas. By referring to the “stdev” value, which indicates the standard deviation
of concentration, check that the concentration is stable over a sufficient length of time (5
minutes as a guideline, at least 1 minute) with the validation cell filled with check gas. When
stability is confirmed, tap OK.
If automatic valve control is enabled, the stream will be switched automatically, and check
gas will be discharged from the validation cell.
3rd Edition: Jun. 10, 2016-00
Summary of Contents for TDLS8000
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