Vigilantplant TDLS8000, User Manual

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<10. Troubleshooting>
10-7
IM 11Y01D01-01EN
Laser Unit Sensor Control Unit
Figure 10.3 Direct connection of the LU and SCU
(d) Turn the power on, and check the transmission.
If the transmission improved as a result of connecting the LU and SCU directly, slightly
adjust the angle to check whether the signal intensifies. If the transmission is zero even if
you adjust the angle between the LU and SCU, the device is broken. Please consult with
Yokogawa.
10.4 Process Window Replacement
If the stain on the surface of a process window does not come off even if you clean it according to
section 9.1.2 or if the surface has corroded due to corrosive gas such as hydrogen fluoride, you
need to replace the process window. Replace it according to the procedures in sections 10.3.2
and 10.3.3. When you replace a process window, be sure to also replace the O-ring.
10.4.1 Replacement Parts (Process window)
If you need to replace a process window, prepare the relevant parts in Table 10.1.
Table 10.1 Replacement parts
No. Parts no. Parts name Purpose * Quantity
1 K9772RA Process window unit For alignment flanges (for -X1, -X2) 1
or
2
2 K9772RB Process window unit For alignment flanges (for -H1)
3 K9772RC Process window unit For alignment flanges (for -A1)
4 K9772RD Process window unit For alignment flanges (for -H3)
5 K9772RE Process window unit For alignment flanges (for -C3, -C4)
6 K9772TH O-ring For process window attached to alignment flange
7 K9775EA Sapphire window unit For process isolation flanges or flow cells (for -X1, -X2)
8 K9775EB Sapphire window unit For process isolation flanges or flow cells (for -H1)
9 K9775EC Sapphire window unit For process isolation flanges or flow cells (for -A1)
10 K9775ED Sapphire window unit For process isolation flanges or flow cells (for -H3)
11 K9775EE Sapphire window unit For process isolation flanges or flow cells (for -C3, -C4)
12 K9775GE O-ring For process window attached to process isolation flange
or attached to flow cell
For process window attached to flow cell
*:
3rd Edition: Jun. 10, 2016-00