Vigilantplant TDLS8000, User Manual

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<3. Installation, Wiring, Optical Axis Adjustment, and Piping>
3-1
IM 11Y01D01-01EN
3. Installation, Wiring, Optical Axis
Adjustment, and Piping
This chapter describes installation, wiring, optical axis adjustment, and purge gas piping in the
order they need be performed.
If you are going to use the YH8000, install it after you complete the procedures in this chapter.
3.1 Installation
The TDLS8000 uses a laser beam. After installation, the optical axis needs to be adjusted. Install
it in a location with sufficient working space.
CAUTION
During installation, be careful not to drop the product, damage the display, and so on.
Refer to “1.1 System configuration” and “2.3 Model and Codes” to install the product. Reserve
space for maintenance so that you can adjust the optical axis.
NOTE
Use a process isolation valve with an opening whose diameter is at least 38 mm so that you can
sufficiently adjust the optical axis of the laser beam after installation.
Flange alignment and installation are important. A proper flange installation ensures accurate
optical axis adjustment of the laser beam.
l
Installation conditions
Install the product in a location that meets the conditions indicated in “2.1 TDLS8000 Tunable
Diode Laser Spectrometer Specifications”.
Note the following points.
• If an abnormal temperature occurs inside the case due to the influence of gas temperature,
attach a reducer or the like to separate the laser unit (LU) and sensor control unit (SCU)
from the flue.
• Process window purge protects the TDLS8000 from the heat, dust, and corrosive elements
of the process gas. Be sure to run the process window purge gas during processing. The
process window purge gas flow rate varies depending on the process gas conditions.
Temperature: Set the purge gas flow rate so that the temperature of the process
window area and in the inside of the alignment flange does not exceed 55 °C.
Dust: Set the purge gas flow rate so that the transmission can be maintained. If the
transmission decreases over time, the purge flow rate must be increased.
Corrosion: If the process includes corrosive elements, sufficient purge flow rate is
necessary. If the sealant of the TDLS8000’s process window corrodes,
the inside of the TDLS8000 will also corrode, causing the TDLS8000 to
malfunction. Set the purge gas flow rate appropriately to keep corrosive gas
from entering the process window area or inside the alignment flange.
3rd Edition: Jun. 10, 2016-00