Vigilantplant TDLS8000, User Manual

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<3. Installation, Wiring, Optical Axis Adjustment, and Piping>
3-29
IM 11Y01D01-01EN
(8) Transmission calibration
After the above adjustment is complete, perform transmission calibration by assuming the
maximum transmission value that was obtained to be 100%. (See “9.1.1 Transmission
Calibration” for this procedure).
3.4 Piping
After wiring and optical axis adjustment are complete, connect the pipes for the purge gas.
After piping is complete, to keep the TDLS8000 process window area clean, we recommend that
you let the purge gas flow until the beginning of operation.
CAUTION
To maintain the dust proof and waterproof performance of the TDLS8000, attach pipes or plugs
to all ports.
For the piping thread specifications, check the inscriptions near the ports. See Figure 3.10 for an
example.
n
Piping Parts
Refer to the following table, and check that all the necessary piping parts are available.
Device Piping location Piping parts Remarks
TDLS8000
Purge port Tube joint Rc1/4 or 1/4NPT, off-the-shelf product
Alignment flange purge port Tube joint Rc1/4 or 1/4NPT, off-the-shelf product
LAO purge port Tube joint Rc1/4 or 1/4NPT, off-the-shelf product
YC8000 Piping port Tube 1/4 inch stainless pipe, off-the-shelf product
IF8000 Purge port Tube joint Rc1/4 or 1/4NPT, off-the-shelf product
Calibration cell Piping port Tube joint 1/4NPT, off-the-shelf product
n
Purge Gas
Refer to the information provided in the specifications of chapter 2.
(1) Purge gas type
Normally, nitrogen (N
2
) is used for the purge gas, but depending on the application, instrumental
air may suffice.
Use nitrogen gas or instrumental air that meets the following conditions.
• Is clean. Dust particle diameter is less than 0.5 µm.
• Does not contain oil.
• Nitrogen gas with 99.99% or higher purity when measuring O
2
or ppmH
2
O.
• Nitrogen gas with less than 20 ppm moisture content when measuring ppmH
2
O.
(2) Purge gas flow rates
Feed purge gases with the following purge flow rates.
• Analyzer internal purge, validation purge:
2 to 10 L/min (depending on the application)
150 mL/min for internal purge and 2 to 10 L/min for validation purge (for Div 1, Zone 1 Type)
• Process window purge:
5 to 300 L/min (depending on the application)
Insert a flowmeter with an adjustable needle valve between the supply line and purge inlet when
feeding purge gas.
3rd Edition: Jun. 10, 2016-00