Vigilantplant TDLS8000, User Manual

Page: 52 / 320

<3. Installation, Wiring, Optical Axis Adjustment, and Piping>
3-7
IM 11Y01D01-01EN
Process isolation flange Gasket Process flange
Nut
Nut
Mounting hole
(4 or 8 locations)
Alignment flange Gasket
Mounting hole
(4 or 8 locations)
Figure 3.5 Installing a process isolation flange and alignment flange
n
Attaching Insertion Tubes
The shape of the insertion tube used when there is a lot of dust may vary from that in the figure
depending on the measurement conditions.
CAUTION
• The alignment flange must be installed in the proper orientation. Install it so that the arrows
of “↑UP↑” are facing up.
• The process window area is where the laser beam passes through. If there is a process
window area (alignment flange, process isolation flange), be careful not to damage or stain
it during installation.
• If there are welded bolts (process isolation flange, insertion tube), be careful not to crush or
damage the threads during installation.
l
When only an alignment flange is to be used (IF8000 is not used)
(1) Insert a gasket between the process flange and the process side of the insertion tube.
(2) Secure the insertion tube to the process flange with four or eight bolts.
(3) Insert a gasket between the TDLS8000 side of the insertion tube and alignment flange.
(4) Pass the alignment flange through the bolts welded to the insertion tube, and fasten with
nuts. Make sure that the nuts are securely fastened.
Insertion tube
Gasket
Process flange
Nut
Nut
Mounting hole
(4 or 8 locations)
Alignment flange Gasket
Mounting hole
(4 or 8 locations)
Figure 3.6 Installing an insertion tube and alignment flange
3rd Edition: Jun. 10, 2016-00