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<9. Inspection and Maintenance>
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IM 11Y01D01-01EN
(2) Purging with check gas
When validation starts, the stream is automatically switched, and the validation cell is
purged with check gas. The purge time is the time specified by “Onval1 gas purg time.”
Tapping ABORT cancels validation.
(3) Discharging the check gas (process purge)
The stream is automatically switched, and the validation cell is purged with normal process
purge gas to discharge the check gas. The purge time is the time specified by “Onval1 nml
purg time.” Tapping ABORT cancels validation.
(4) Checking the validation result
The validation result is displayed as “PASSED” or “FAILED,” and validation ends. If
validation is unsuccessful, a warning will occur (see section 9.2.3). Tap OK to return to the
menu.
3rd Edition: Jun. 10, 2016-00
Summary of Contents for TDLS8000
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