Vigilantplant TDLS8000, User Manual

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<9. Inspection and Maintenance>
9-20
IM 11Y01D01-01EN
(5) Removing wiring
Remove wiring according to the procedure of section 9.3.2 (3) (d).
(6) Removing the TDLS8000 from the calibration cell
Remove the TDLS8000 according to the procedure of section 9.3.2 (3) (e).
(7) Installing the TDLS8000 in the process
Install the TDLS8000 by reversing the procedure for removing it.
(a) Mounting the LU and SCU
Attach the SCU or LU to the alignment flange. While making sure that the O-ring
does not come loose or it is not damaged during the mounting process, insert the
TDLS8000 quick connector into the alignment flange, and rotate the TDLS8000
clockwise.
While holding the LU or SCU perpendicular to the mounting surface, tighten the four
screws, including the upper right screw, evenly.
(b) Wiring
Connect the following cables.
• Cable between the LU and SCU
• Power cable
• Valve drive cable (when necessary)
• AI/AO/DO/DI cable (when necessary)
For details on wiring, see “3.2 Wiring”.
(c) Piping
Refer to “3.4 Piping”, and connect the pipes to restore the TDLS8000 to its original
condition before it was removed.
(8) Feeding purge gas
When wiring and piping are complete, feed the purge gas.
Since the internal pressure from the process window purge gas may become high when
process isolation valve (ball valve) is used, open the valve immediately after starting to feed
the process window purge gas.
(9) Turning the power on
Turn the power on. Check that the TDLS8000 starts normally.
(10) Optical Axis Adjustment
Refer to “3.3 Optical Axis Adjustment”, and adjust the optical axis.
(11) Checking the settings
Refer to the settings that you recorded before removing the TDLS8000, and reset them if
necessary.
a) Process optical path length
b) Process pressure
c) Process temperature
d) Transmission
3rd Edition: Jun. 10, 2016-00