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<3. Installation, Wiring, Optical Axis Adjustment, and Piping>
3-24
IM 11Y01D01-01EN
3.3.1
Optical Axis Adjustment When Not Using an LAO Unit
(Optical path length 6 m or less)
As shown in Figure 3.16, alignment flanges are attached to the LU and SCU. The angle
adjustment nuts of these flanges are used to adjust the optical axis.
Bellows
Quick connector
Alignment flange
Process flange
LU or SCU
Instrument mounting flange
Process flange
Alignment flange
Angle adjustment nut (8)
Figure 3.16
Optical axis adjustment when not using an LAO unit
Use the angle adjustment nuts of the alignment flange shown in Figure 3.16 to adjust the optical
axis. For the optical axis adjustment on the LU and SCU, check the transmission each time you
turn an angle adjustment nut quarter of a turn. Wait until the transmission shown on the display is
updated at least twice. Repeat this process while regularly checking the transmission value.
Follow the procedure below to adjust the optical axis. Adjust one side at a time starting with the
LU side. The proper optical axis adjustment may not be achieved when the optical axis on the LU
and SCU is changed at the same time.
(1) Checking the installation condition (LU and SCU)
Check the initial condition of the alignment flanges to see if the LU and SCU are facing each
other. If it is apparent that they are not, adjust the alignment coarsely before continuing with
the rest of the procedure.
(2) Coarsely adjusting the laser unit (LU)
Loosen the angle adjustment nuts on the LU side.
While viewing the transmission value, move the LU with your hand to perform coarse
adjustment. Repeat the adjustment in the vertical direction first and then the horizontal
direction.
Find the position that yields the maximum transmission value, and tighten the angle
adjustment nuts with your fingers. From this position, begin the fine adjustment.
If the transmission value does not increase when you coarsely adjust the LU, the mounting
position of the SCU may not be correct. If this occurs, loosen the angle adjustment nuts on
the SCU side, adjust it to a position that yields a higher transmission value, and then repeat
step (2).
If the transmission value does not change at all even when you make these adjustments,
check that the positions of the process flange on the LU and SCU sides are correct.
3rd Edition: Jun. 10, 2016-00
Summary of Contents for TDLS8000
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