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<Appendix 6 Maintaining Good Transmission>
App.6-2
IM 11Y01D01-01EN
Process nozzle
(insertion purge tube)
Thermal insulation
45 to 50°C (outer temperature)
65°C (inner temperature)
150°C
40-45°C
ANSI Class 150-3B flange
ANSI Class 150-4 B flange
1610
1000
Unit: mm
valve
Alignment
Flange
LU
SCU
Laser module area
Online
Validation cell
Figure 2 Installation example of insertion tubes with thermal insulation
3rd Edition: Jun. 10, 2016-00
Summary of Contents for TDLS8000
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