Vigilantplant TDLS8000, User Manual

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<10. Troubleshooting>
10-10
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(9) Pay attention to the orientation of the process window. Install it in the same orientation as
before.
Tighten the screws evenly.
(10) After mounting the process window, install the alignment flange and then the TDLS8000.
Since you removed the alignment flange from the process, readjust the optical axis.
10.4.4 Process Window Replacement Procedure (Flow cell)
The procedure for replacing the process window mounted on a flow cell is provided below.
There are two types of process windows used in a flow cell: a process window mounted on
the alignment flange for the flow cell and a process window mounted on the flow cell itself. The
process window mounted on the flow cell itself can only be replaced by removing the alignment
flange for the flow cell.
NOTE
Before removing the process window, check that the process is completely stopped or that the
TDLS8000 is isolated from the process and no process gas will be discharged. Never remove a
process window while the process is running as it is extremely dangerous.
CAUTION
Be careful in handling the process window as it is made of optical glass.
(1) Turn the power off.
(2) Stop the purge gas.
(3) Remove the purge piping.
(4) Remove the TDLS8000 from the flow cell.
(Be sure to separate the flow cell completely from the process in advance such as by using
a process isolation valve.)
(5) The procedure to replace the process window mounted on the alignment flange is similar to
that explained in 10.4.2.
(6) To remove the process window mounted on the flow cell, remove the alignment flange
mounted on the flow cell.
(7) Check the stained area of the process window of the flow cell, and remove the process
window.
(8) Loosen the six M5 screws with hexagonal holes on the process window holder installed in
the flow cell, and remove the process window.
Make sure not to drop the process window. There is no mechanism from preventing the
screws with hexagonal holes or the washers from falling. Make sure not to drop or lose
them.
For details on how to install and remove the process window, see Figure 10.6.
3rd Edition: Jun. 10, 2016-00