Keysight Technologies B1505A, Configuration Manual

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5-40 Keysight B1505A Configuration and Connection Guide
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect Device Capacitance Selector
To Connect Device Capacitance Selector
Keysight N1272A device capacitance selector is used to switch the measurement resource
connected to the device under test (DUT), for capacitance testing (input/output
capacitance, feedback capacitance, and gate resistance). The measurement resource will be
HVSMU, MPSMU and MFCMU.
The N1272A should be installed near your DUT interface. Connection examples are shown
below. For the color-codes of cables and connectors in the figures, see
Figure 7-1 on page
7-2 .
Figure 5-20 shows the connection example for the ultra high current configuration using
the N1265A.
Figure 5-21 shows the connection example for the high current configuration using the
HCSMU and the N1258A module selector.
Table 5-32 To Connect N1272A Input
B1505A terminals Required cables Input terminals
HVSMU 16493T-001 HVSMU cable, 1.5 m, 1 ea. HVSMU
MPSMU Force 16494A Triaxial cable, 1.5 m, 1 ea. SMU Force
Sense 16494A Triaxial cable, 1.5 m, 1 ea. Sense
MFCMU Hcur N1300A-001 CMU cable, 1.5 m, 1 ea.
It is not needed to connect the ground wire extended from the
CMU cable.
MFCMU Hcur
Hpot Hpot
Lpot Lpot
Lcur Lcur
GNDU
16493L-001 GNDU cable, 1.5 m
GNDU
Interlock
16493J-001 Interlock cable, 1.5 m
Interlock Input
Digital I/O 16493G-001 Digital I/O connection cable, 1.5 m
If the N1272A selector is used with other fixture or selector,
you can also connect the output from it to this input connector.
Digital I/O Input

Power cable, for connecting to power line LINE
Force
Guard
Circuit
Common
HVSMU
To avoid electrical shock and instrument damage,
do not connect/disconnect the cables during operation.
Output Input
±3 k V Max
Lcur Hcur
Lpot Hpot
Force
Sense
±3 k V Max ±3 k Max
±3 k V Max
±100 V Max
±100 V Max
±3 k V Max ±25 V Max ±100 V Max
~ LINE
100-240 V
~
50/60 Hz
70 VA Max
Input Output
Digital I/O
HVSMU
Base/Gate
MFCMU SMU
GNDU
Collector/Drain
AC/DC Guard Emitter/Source
Interlock Interlock
MSIP-REM-ATI-
1H-B1507A
T2 T1
T3 T4
N1272 -61001