Keysight Technologies B1505A, Configuration Manual

Page: 264 / 298

7-46 Keysight B1505A Configuration and Connection Guide
Connection and Ordering Examples
Configuration Examples for Vertical Device Measurement with Wafer Prober
Configuration Examples for Vertical Device
Measurement with Wafer Prober
This section introduces typical configuration examples for vertical device measurement
with wafer prober shown in
Table 7-22
Table 7-22 Configuration examples
Device Max V Max I HVMC C-V
Add
MPSMU
Note
Vertical
3terminal
on-wafer
device 3 kV 20 A "3 kV, 20 A Measurement for
On-Wafer Vertical Device" on page
7-47
3 kV 20 A YES "3 kV, 20 A, Capacitance Measurement
for On-Wafer Vertical Device" on page
7-51
3 kV 20 A YES "Add High Resolution Measurement
(10 fA resolution with MPSMU or
HPSMU) Capability to 3 kV, 20 A,
Capacitance Measurement for
On-Wafer Vertical Device" on page
7-54
3 kV 40 A "3 kV, 40 A Measurement for
On-Wafer Vertical Device" on page
7-56
3 kV 500 A "3 kV, 500 A Measurement for
On-Wafer Vertical Device" on page
7-59
3 kV 500 A YES "3 kV, 500 A, Capacitance
Measurement for On-Wafer Vertical
Device" on page 7-60
3 kV 500 A YES "3 kV, 500 A, High Voltage Medium
Current Measurement for On-Wafer
Vertical Device" on page 7-62
10 kV 500 A "10 kV, 500 A Measurement for
On-Wafer Vertical Device" on page
7-64