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Keysight Technologies B1505A, Configuration Manual

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7-54

Keysight B1505A Configuration and Connection Guide

Connection and Ordering Examples
Configuration Examples for Vertical Device Measurement with Wafer Prober

Add High Resolution Measurement (10 fA resolution with 
MPSMU or HPSMU) Capability to 3 kV, 20 A, Capacitance 
Measurement for On-Wafer Vertical Device

•

Device Type: Vertical MOSFET (3 terminals)

•

Key Specification

•

Max voltage/current: 3 kV/20 A

•

Drain leakage current down to 10 fA

•

Module Selector for multi-parameter automated measurement function

Figure 7-28

Connection example 

NOTE

Prober vendor is responsible for cabling inside the shielding box.

HVSMU

HCSMU

GNDU

MCSMU

B1505A

N1258A

G

S

HCSMU  Non-

Kelvin adapter

16493S-011

For Gate

16493G-001 Digital I/O cable (Included in N1258A)

N1254A-104 TRX(J) to BNC(P) adapter

F
S

F
S

High F

High S

Low S

Low F

Digital I/O

HV SMU

HCSMU F

HCSMU S

GNDU

16493J-001 Interlock cable

D

(Chuck)

For Drain

For Drain

16493T (Included in the HVSMU)

16493S (Included in the HCSMU)

16494A (Included in the MCSMU)

16493L (Included in B1505A)

16493U-001

1250-2405

16494A-003

R-Box

1kO

N1262 A-010

MPSMU

For Drain

HPSMU F

HPSMU S

16494A (Included in the MPSMU)

F
S

Summary of Contents for B1505A

Page 1: ...Keysight Technologies B1505A Power Device Analyzer Curve Tracer Configuration and Connection Guide ...

Page 2: ...ental or consequential damages in connection with the furnishing use or performance of this document or of any information contained herein Should Keysight and the user have a separate written agree ment with warranty terms covering the material in this document that conflict with these terms the warranty terms in the separate agreement shall control Technology Licenses The hardware and or softwar...

Page 3: ......

Page 4: ... connect the B1505A the N1265A Test Fixture and a device under test DUT 4 N1272A and N1273A Connection Guide Describes how to connect the B1505A the N1273A Capacitance Test Fixture and a device under test DUT 5 Connection Guide for Wafer Prober and Your Own Test Fixture Describes how to connect the B1505A accessories and a DUT interface such as wafer prober and your own test fixture 6 Accessory Di...

Page 5: ...nd Related Accessories 1 35 Measurement Capability on Thermal Test 1 39 Information of inTEST Thermal Plate and Thermostream 1 39 Pre configured Power Device Analyzer Curve Tracer B1505A with Modules Fixture 1 40 Accessories for Wafer Prober and Your Own Test Fixture 1 48 Other Accessories 1 57 Retrofit Products for B1505A 1 61 Conversion Kit from B1500A to B1505A 1 64 Upgrade Kit for N1259AU Test...

Page 6: ...045 3 25 Prober System Cable N1254A 524 3 25 4 N1272A and N1273A Connection Guide Input Connection 4 3 To Connect Interlock Circuit 4 3 N1272A Device Capacitance Selector 4 3 Output Connection 4 8 To Connect DUT 4 8 3 pin Inline Package Socket Module 4 9 N1273A 011 Universal Socket Module 4 11 N1273A 013 Curve Tracer Test Adapter Socket Module 4 14 Accessories for Connecting a DUT 4 15 5 Connectio...

Page 7: ...ckage Device Measurement Configuration Examples 7 3 3kV 20A Configuration B1505AP H20 equivalent 7 4 3kV 20A with Capacitance Measurement Configuration B1505AP H21 equivalent 7 6 3 kV 500 A or 1500 A Configuration B1505AP H50 or B1505AP H70 equivalent 7 8 3 kV 500 A or 1500 A with Capacitance Measurement Configuration B1505AP H51 or B1505AP H71 equivalent 7 10 10 kV 500 A or 1500 A Configuration B...

Page 8: ...rement for On Wafer Vertical Device 7 51 Add High Resolution Measurement 10 fA resolution with MPSMU or HPSMU Capability to 3 kV 20 A Capacitance Measurement for On Wafer Vertical Device 7 54 3 kV 40 A Measurement for On Wafer Vertical Device 7 56 3 kV 500 A Measurement for On Wafer Vertical Device 7 59 3 kV 500 A Capacitance Measurement for On Wafer Vertical Device 7 60 3 kV 500 A High Voltage Me...

Page 9: ...1 Configuration Guide ...

Page 10: ... Measurement Resources B1505A Mainframe Furnished Accessories B1505A Modules and Mainframe Options N1259A Test Fixture for Power Device N1265A Ultra High Current Expander Fixture N1266A High Voltage Source Monitor Unit Current Expander N1267A High Voltage Source Monitor Unit High Current Source Monitor Unit Fast Switch N1268A Ultra High Voltage Expander N1271A Thermal Test Enclosure and Related Ac...

Page 11: ... can be equipped with the following measurement resources HPSMU High Power SMU HCSMU High Current SMU HVSMU High Voltage SMU MPSMU Medium Power SMU MCSMU Medium Current SMU UHCU Ultra High Current Unit HVMCU High Voltage Medium Current Unit UHVU Ultra High Voltage Unit MFCMU Multi Frequency CMU Figure 1 1 B1505A Measurement Resources ...

Page 12: ...rent SMU B1514A MCSMU 1 A 30 V Pulsed 100 mA 30 V DC Ultra High Current Unit N1265A Ultra High Current Expander Fixture and two units of B1514A MCSMU B1512A HCSMU 1500 A 60 V Pulsed 22 5 kW peak power 500 A 60 V Pulsed 7 5 kW peak power High Voltage Medium Current Unit N1266A HVSMU Current Expander B1513C HVSMU and two units of B1514A MCSMU B1512A HCSMU 1500 V 2 5 A Pulsed 2200 V 1 1 A Pulsed Ultr...

Page 13: ...1 2 Furnished Accessories Description Qty Description Qty 16493J Interlock cable1 1 Cable length 1 5 m or 3 0 m is specified by B1505A cable length option B1505A 015 or 030 1 16493L GNDU cable1 1 16444A 001 USB keyboard 1 16444A 002 USB mouse 1 16444A 003 Stylus pen 1 Description Qty Note Manual CD 1 Electronic files of user manuals literatures and programming examples are stored Software CD 1 Des...

Page 14: ...ries Table 1 3 Measurement Cable Furnished with Modules Description Quantity 16494A Triaxial cable for MPSMU HPSMU and MCSMU 2 ea module 16493T HVSMU cable for HVSMU 1 ea module 16493S HCSMU cable for HCSMU 1 ea module 16493S 010 HCSMU Kelvin adapter for HCSMU 1 ea module N1300A CMU cable for MFCMU 1 ea module ...

Page 15: ...A Module type Description Slots occupied Maximum number of modules installed in B1505A HPSMU 1 1 Total number of installed HPSMU and HCSMU modules cannot exceed 4 High Power Source Monitor Unit module 2 4 MPSMU Medium Power Source Monitor Unit module 1 10 HCSMU 1 2 2 Dual HCSMU DHCSMU configuration is available if two HCSMU modules are installed in one mainframe and connected to the 16493S 020 Dua...

Page 16: ...ule HCSMU 20 A at 20 V B1512A FG Furnished with one pair of high current cables 16493S and Kelvin adapter 16493S 010 Cable length 1 5 m or 3 0 m is specified by 015 or 030 Up to two modules can be installed The total number of installed HPSMU and HCSMU modules cannot exceed 4 High Voltage Source Monitor Unit module HVSMU 3000 V at 4 mA B1513C FG Furnished with one HVSMU cable 16493T Cable length 1...

Page 17: ...HCSMU and one HVSMU the B1505A will be shipped with the MFCMU of the slot 1 the MCSMUs of the slot 2 to 4 the HCSMU of the slot 5 to 6 the HVSMU of the slot 7 to 8 and the blank panels of the slot 9 to 10 Description Model Option Note Specify the power line frequency mandatory 50Hz line frequency 050 60Hz line frequency 060 Select calibration options optional ANSI Z540 compliant calibration A6J Co...

Page 18: ...ed with the module configuration defined by the rule shown in the Table 1 6 If you want to change the module locations consult the service personnel before servicing Slot Number and Location SMU type and port number 10 1 top B1513A B C High Voltage SMU HVSMU B1512A High Current SMU HCSMU B1514A Medium Current SMU MCSMU B1520A Multi Frequency CMU MFCMU B1511A B Medium Power SMU MPSMU B1510A High Po...

Page 19: ...r to Upgrade Kit for N1259AU Test Fixture on page 1 65 Table 1 7 N1259A Test Fixture options and accessories Model Option Description Additional Information N1259A Test Fixture for Power Device N1259A 001 is a mandatory option Please select options that meet your needs N1259A 001 Test Fixture for Power Device Mandatory option The N1259A 001 is furnished with Kelvin socket module for inline package...

Page 20: ...is furnished with a N1259A 010 socket module The N1259A 010 cannot be used with the N1265A Ultra High Current Expander Fixture Max voltage and current are 3 kV and 40 A N1259A 011 Universal socket module for power device Maximum voltage is 3 kV N1259A 012 Blank PTFE board N1259A 013 Curve tracer test adapter socket module The N1259A 013 is the same as the N1265A 013 Curve Tracer Test Adapter Socke...

Page 21: ...A 020 option is furnished with two SHV SHV cables N1254A 512 and two SHV banana adapters N1254A 513 The N1259A 020 is a built in factory installed accessory of the N1259A 001 N1259A 021 1 M R box R box can be replaced with other R box easily by N1259A users N1259A 022 100 k R box N1259A 030 1 k R box N1259A 035 Universal R box N1259A 300 Module Selector Furnished with a 1 5 m digital I O control c...

Page 22: ...High Current Expander Fixture Maximum voltage and current is 3 kV and 40 A The cable length is 250 mm N1254A 509 Connection wire black 1 ea N1254A 510 Dolphin clip adapter black 1 ea and red 1ea N1254A 511 Cable lug adapter black 1 ea and red 1ea N1254A 512 SHV to SHV cable 350 mm 1 ea The N1259A 020 High Voltage Bias tee is furnished with two N1254A 512 cables The N1254A 513 adapter is required t...

Page 23: ...furnished with two N1254A 513 adapters An N1254A 513 adapter is used with an N1254A 512 cable to connect a banana plug 16493G 001 Digital I O control cable 1 5 m The N1259A 300 Module Selector option is furnished with a 16493G 001 cable Cable length 1 5 m or 3 0 m can be specified by option 001 or 002 16493G 002 Digital I O control cable 3 0 m Model Option Description Additional Information ...

Page 24: ... Information 16493S 021 Dual HCSMU combination adapter for 40 A measurement Output connectors are compatible with B1512A HCSMU The 16493S 021 is furnished with one 30cm Triaxial cable and one 30 cm High current coaxial cable for output connection Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals outer conductor of the coaxial connectors Connecting or locating condu...

Page 25: ...d accessories If you add options later please refer to Upgrade Kit for N1265AU Test Fixture on page 1 69 Table 1 8 Options and accessories for N1265A Ultra High Current Expander Fixture Model Option Description Additional Information N1265A Ultra High Current Expander Fixture The N1265A 001 is a mandatory option for the N1265A Please select options that meet your needs The N1265A UHC Expander Fixt...

Page 26: ...ter Source force lines N1265 61751 Test Lead Banana 180mm Red 1ea and N1265 61752 Test Lead Banana 180mm Black 1ea for Collector Drain and Emitter Source sense lines N1254A 508 Banana to Banana cable 250mm Red 1ea N1254A 509 Banana to Banana cable 250mm Black 1ea for Base Gate force sense lines Maximum voltage and current is 3 kV and 500 A N1265A 011 Universal socket module for power device Maximu...

Page 27: ...d short wires N1265 61751 Two black long wires N1265 61752 Two yellow high current banana banana cable N1254A 522 Maximum voltage and current is 3 kV and 500 A N1265A 015 1500 A Current Option 1500 A upgrade can be made later by ordering a B1505AU 015 1500 A upgrade kit N1265A 035 Universal R Box A desired register can be installed by soldering Model Option Description Additional Information Colle...

Page 28: ...CSMU module has to be connected to a passthrough port of the N1265A UHC Expander Fixture not a module selector port N1265A 041 Thermocouple Type K 2ea Include two Type K thermocouples N1265A 045 Container for Protection Adapter and Bias Tee An N1260A High Voltage Bias tee and N1261A Protection Adapters can be placed in this container to avoid messy cabling Calibration options N1265A A6J ANSI Z540 ...

Page 29: ...rent Banana to Banana cable Cable length is 250 mm N1254A 509 Connection wire black 1 ea N1254A 510 Dolphin clip adapter black 1 ea and red 1ea N1254A 511 Cable lug adapter black 1 ea and red 1ea N1254A 520 10 kV Ultra High Voltage Open End Cable 1 m One side 10kV UHV SHV and the other side open end N1254A 522 1500 A Ultra High Current Banana to Banana Cable 2 ea Max voltage and current are 3 kV a...

Page 30: ...can be specified by option 001 or 002 16493G 002 Digital I O control cable 3 0 m For capacitance measurement N1260A High Voltage Bias Tee The N1265A does not have a built in high voltage bias tee option like the N1259A The N1260A is required to make capacitance measurement with the N1265A The N1260A STD is a mandatory option The N1260A High Voltage Bias Tee is not furnished with any cables N1254A ...

Page 31: ...254A 103 Triaxial m to BNC f adapter This adapter is needed when a B1512A HCSMU is connected to a voltage current controller SMU port or Gate port or SMU ports of the N1265A This adapter is used for Force terminal N1254A 517 Adapter Triax Jack to Triaxial Plug This adapter is needed when a B1512A HCSMU is connected to a voltage current controller SMU port or Gate port or SMU ports of the N1265A Th...

Page 32: ... N1259A 011 Universal Socket Module cannot be used with the N1265A Ultra High Current Expander Fixture Model Option Description Additional Information For on wafer measurement N1254A 524 500 A Ultra High Current Prober System Cable The N1254A 524 cable is furnished with one transparent shield with a slit Maximum current range is about 800 A or more Cable length is 1 8 m ...

Page 33: ...he HCSMU The following table lists the accessories available for the N1266A High Voltage Source Monitor Unit Current Expander Select the required accessories Table 1 9 Accessories for N1266A Ultra High Current Expander Fixture Model Option Description Additional Information N1266A High Voltage Source Monitor Unit Current Expander The N1266A is furnished with 1 5 m Digital I O control cable 16493G ...

Page 34: ...ble Cable length 1 5 m or 3 0 m can be specified by option 001 or 002 16493G 002 Digital I O control cable 3 0 m 16493L 001 Ground Unit Cable Triaxial 1 5 m Cable length 1 5 m or 3 0 m can be specified by option 001 or 002 16493L 002 Ground Unit Cable Triaxial 3 0 m 16493T 001 High Voltage Source Monitor Unit Cable 1 5 m The 16493T 001 002 supports up to 3000V Cable length 1 5 m or 3 0 m can be sp...

Page 35: ... to BNC f adapter This adapter is needed when a B1512A HCSMU is used as a voltage current controller of the N1266A instead of MCSMU This adapter is used for Force terminal N1254A 517 Adapter Triax Jack to Triaxial Plug This adapter is needed to use a B1512A HCSMU as a voltage current controller of the N1266A instead of MCSMU This adapter is used for Sense terminal Model Option Description Addition...

Page 36: ...1 28 Keysight B1505A Configuration and Connection Guide Configuration Guide N1266A High Voltage Source Monitor Unit Current Expander Figure 1 2 N1266A Compatibility with Fixture and Module Selector ...

Page 37: ...llapse measurement system using the N1267A Table 1 11 Accessories for the N1267A HVSMU HCSMU Fast Switch Table 1 12 Supported B1505A modules for the N1267A HVSMU HCSMU Fast Switch Model Option Description Additional Information N1267A High Voltage Source Monitor Unit High Current Source Monitor Unit Fast Switch The N1267A is NOT furnished with any cable Supported B1505A modules Drain stress bias S...

Page 38: ...Unit Fast Switch Table 1 13 Supported Environment for the N1267A HVSMU HCSMU Fast Switch NOTE The N1267A does not support the two HCSMU 40A configuration Supported Environment Supported instruments On wafer measurement Package device measurement N1259A Test Fixture N1259A 300 Module Selector option is required for Kelvin connection measurement ...

Page 39: ...le lists the accessories available for the N1268A Ultra High Voltage Expander Select the required accessories Table 1 14 Options and accessories for N1268A Ultra High Voltage Expander Model Option Description Additional Information N1268A Ultra High Voltage Expander The N1268A STD is a mandatory option N1268A STD Ultra High Voltage Expander Mandatory option The N1268A STD is furnished with a 16493...

Page 40: ...s adapter is used to protect a B1514A MCSMU module used as a Gate driver SMU from device breakdown when making ultra high voltage measurement with the N1268A Related accessories for on wafer device testing N1269A Ultra High Voltage Connection Adapter The N1269A adapter is used to protect measurement resources from unexpected surge when connecting the N1268A Ultra High Voltage Expander to a wafer p...

Page 41: ...ck Adapter Feed through adapter set of UHV and SHV connectors Related cables 16493G 001 Digital I O control cable 1 5 m The N1268A is furnished with a 16493G 001 cable Cable length 1 5 m or 3 0 m can be specified by option 001 or 002 16493G 002 Digital I O control cable 3 0 m 16493J 001 Interlock cable 1 5 m The N1268A is furnished with a 16493J 001 cable Cable length 1 5 m or 3 0 m can be specifi...

Page 42: ...urrent Expander Fixture or a prober Cable length 1 5 m or 3 0 m can be specified by option 001 or 002 16493V 002 10 kV Ultra High Voltage Cable 3 m N1254A 520 10 kV Ultra High Voltage Open End Cable 1 m One side 10kV UHV SHV and the other side open end These cables are used to connect between the N1268A UHV output and a device under test DUT placed inside the N1265A Adapters N1254A 103 Triaxial m ...

Page 43: ...tions 001 002 and 005 The N1271A 001 is required for using the inTEST thermal plate and can be used with the N1259A or the N1265A The N1271A 002 or 005 is required for using the inTEST Thermostream and can be used with the N1265A The N1271A 002 supports the IV measurement up to 3 kV The N1271A 005 supports the IV measurement up to 10 kV and the CV measurement up to 3 kV Figure 1 3 Thermal Test The...

Page 44: ...1265A Accessory for the N1259A N1265A test fixture for using the inTEST Thermal Plate to enable temperature dependency measurements up to 250 C Contains the N1254A 557 connection kit Inner dimension is 284 mm W 340 mm H 195 mm D N1271A 002 Thermostream Compatible Enclosure for N1265A 3 kV IV Interface between the N1265A and the inTEST Thermostream The enclosure supports fully automated IV measurem...

Page 45: ... IV measurements up to 10 kV at temperature range from 50 C to 220 C Contains the N1254A 557 connection kit Inner dimension is 275 mm W 150 mm H 195 mm D N1254A Accessories for instruments and fixtures N1254A 550 Test Leads and Connection Kit for Thermal Test 20 cm Connection kit thermal resistance up to 250 C This kit contains the following items 200 mm high current cable 2 ea 200 mm normal cable...

Page 46: ... pin adapter 8 ea Mini alligator clip 6 ea Large clip 2 ea N1254A 554 Thermal resistance thermocouple 75 cm 2 ea Thermocouple 2 ea thermal resistance up to 250 C N1254A 557 Test Leads and Connection Kit for Thermal Test with N1271A Connection kit thermal resistance up to 250 C This kit contains the following items 200 mm high current cable 2 ea 300 mm high current cable 2 ea 200 mm normal cable 6 ...

Page 47: ...nTEST Thermal Plate and Thermostream The B1505A with the N1271A supports the Thermal Plate and the Thermostream of inTEST corporation Supported models are listed below but contact inTEST for more information sales inTESTthermal com Capability Fixture Thermal Plate Solution Thermostream Solution IV test up to 20 A 3 kV N1259A Yes with N1271A 001 No IV test up to 1500 A 3 kV N1265A Yes with N1271A 0...

Page 48: ... 20 A C V Fixture Pack H50 3 kV 500 A 3 kV 500 A Fixture Pack H51 3 kV 500 A Yes 3 kV 500 A C V Fixture Pack H70 3 kV 1500 A 3 kV 1500 A Fixture Pack H71 3 kV 1500 A Yes 3 kV 1500 A C V Fixture Pack U50 10 kV 500 A 10 kV 500 A Fixture Pack U70 10 kV 1500 A 10 kV 1500 A Fixture Pack Description Qty Note B1505A 1 Power Device Analyzer Curve Tracer Mainframe Include 16493J 001 Interlock cable 1 5 m 1...

Page 49: ...001 GNDU cable 1 5 m 16444A 001 Keyboard 16444A 002 Mouse 16444A 003 Stylus pen B1512A FG 1 High Current Source Monitor Unit Module Include 16493S 001 HCSMU cable 1 5 m 1ea and 16493S 010 Kelvin adapter B1513C FG 1 High Voltage Source Monitor Unit Include 16493T 001 HVSMU cable 1 5 m B1514A FG 1 Medium Current Source Monitor Unit Include 16494A 001 Triaxial cable 1 5 m 2ea B1520A FG 1 Multi Freque...

Page 50: ... High Current Expander Fixture Include 16493G 001Control cable 1 5 m and a Blanck silicon plate N1265A 010 1 500 A Ultra High Current 3 pin Inline Package Socket Module Include N1254A 522 1500 A Ultra High Current Banana to Banana Cable yellow 2ea N1254A 508 Banana to Banana Cable 250 mm red 1ea N1254A 509 Banana to Banana Cable 250 mm black 1ea N1265 61751 Test Lead 180mm red 1ea and N1265A 61752...

Page 51: ...a Cable 250 mm black 1ea N1265 61751 Test Lead 180mm red 1ea and N1265A 61752 Test Lead 180mm black 1ea N1254A 1 Accessories for instruments and fixtures N1254A 508 4 Banana to Banana Cable 250 mm red 1ea N1254A 509 4 Banana to Banana Cable 250 mm black 1ea N1254A 510 3 Dolphin Clip 2 ea red and black N1254A 512 2 SHV Cable 250 mm N1254A 513 2 SHV Jack to Banana Adapter N1254A 518 2 SHV Cable 1 5 ...

Page 52: ...zer Curve Tracer Mainframe Include 16493J 001 Interlock cable 1 5 m 16493L 001 GNDU cable 1 5 m 16444A 001 Keyboard 16444A 002 Mouse 16444A 003 Stylus pen B1513C FG 1 High Voltage Source Monitor Unit Include 16493T 001 HVSMU cable 1 5 m B1514A FG 3 Medium Current Source Monitor Unit Include 16494A 001 Triaxial cable 1 5 m 2ea B1520A FG 1 Multi Frequency Capacitance Measurement Unit Module Include ...

Page 53: ...ial cable 1 5 m 2ea N1265A 1 Ultra High Current Expander Fixture N1265A 001 1 Ultra High Current Expander Fixture Include 16493G 001 Control cable 1 5 m and a Blanck silicon plate N1265A 010 1 500 A Ultra High Current 3 pin Inline Package Socket Module Include N1254A 522 1500 A Ultra High Current Banana to Banana Cable yellow 2ea N1254A 508 Banana to Banana Cable 250 mm red 1ea N1254A 509 Banana t...

Page 54: ...late N1265A 010 1 500 A Ultra High Current 3 pin Inline Package Socket Module Include N1254A 522 1500 A Ultra High Current Banana to Banana Cable yellow 2ea N1254A 508 Banana to Banana Cable 250 mm red 1ea N1254A 509 Banana to Banana Cable 250 mm black 1ea N1265 61751 Test Lead 180mm red 1ea and N1265A 61752 Test Lead 180mm black 1ea N1265A 015 1 1500 A Current Option N1265A 040 1 10 kV Ultra High...

Page 55: ...ional modules such as a B1511B MPSMU into the B1505AP package the B1505AU with corresponding module option has to be ordered and users have to send their B1505A mainframe to Keysight Service Center for installing modules So building a B1505A configuration from scratch is recommended NOTE To add additional accessories of the N1259A or N1265A please order them separately using the N1259AU or N1265AU...

Page 56: ...tion between the N1265A Ultra High Current Expander Fixture and Prober with the N1254A 524 Ultra High Current Prober System Condition Gate Drain Source Other bias 500 A N1265A UHC Expander Fixture N1254A 524 Ultra High Current Prober System Cable MCSMU 30A with Module Selector MCSMU R box N1258A Module Selector 40A without Module Selector Direct Direct Condition Gate Drain Source Other bias 10 kV ...

Page 57: ...93G 001 Maximum 65 VA The N1258A has a built in GNDU protection adapter a built in HPSMU protection adapter and a built in HCSMU Kelvin adapter Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals outer conductor of the coaxial connectors Connecting or putting conductor of circuit common chassis ground or any potential on causes the measurement error For High Voltage ...

Page 58: ...tput One Triaxial input for GNDU and two BNC outputs Force Sense N1261A 003 Protection adapter for High Power Source Monitor Unit HV Triaxial output Two Triaxial inputs Force Sense and two High Voltage Triaxial outputs This adapter is used to protect not only B1510A HPSMU but also B1511A B MPSMU N1261A 004 Protection Adapter Ground Unit SHV output One Triaxial input for GNDU and two SHV outputs Fo...

Page 59: ...1 1 kohm R box for gate SHV output One High Voltage Triaxial input and one SHV output N1262A 020 Universal R Box Triaxial One Triaxial input and one Triaxial output N1262A 021 Universal R Box HV Triaxial to SHV One High Voltage Triaxial input and one SHV output N1262A 036 50 Ohm Termination Adapter The N1262A 036 is used to avoid device oscillation by inserting it to the gate cabling Model Option ...

Page 60: ... Force Low Force Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals outer conductor of the coaxial connectors Connecting or putting conductor of circuit common chassis ground or any potential on causes the measurement error 16493S Opt 010 HCSMU Kelvin Adapter Force Sense From HCSMU Output Signal Circuit Com m on High Sense High Force Low Sense Low Force Agilent 㼼40 ...

Page 61: ... selector Output connectors are compatible with N1258A module selector This adapter has a built in GNDU protection adapter and a built in HCSMU Kelvin adapter This adapter cannot be used with N1258A module selector and N1259A test fixture Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals outer conductor of the coaxial connectors Connecting or putting conductor of c...

Page 62: ...onnectors are compatible with B1512A HCSMU The 16493S 021 is furnished with one 30cm Triaxial cable and one 30 cm High current coaxial cable for output connection Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals outer conductor of the coaxial connectors Connecting or putting conductor of circuit common chassis ground or any potential on causes the measurement erro...

Page 63: ... The N1269A adapter is used to protect measurement resources from unexpected surge when connecting the N1268A Ultra High Voltage Expander to a wafer prober Protection adapter for the B1514A MCSMU is included in the N1269A adapter This adapter supports the B1514A MCSMU only N1254A 521 10 kV Ultra High Voltage Jack to Jack Adapter Feed through adapter set of UHV and SHV connectors N1262A 023 Univers...

Page 64: ...tor relays in the N1274A are controlled by the N1258A module selector You can also mount a current control device or load resistor on the N1274 by opening a small panel on the top of this adapter N1275A On Wafer Gate Charge Measurement Adapter for N1265AUltra High Voltage Connection Adapter The N1275A is an adapter to enable on wafer gate charge measurements with the UHCU max 500 A and HVSMU max 3...

Page 65: ...n Keysight EasyEXPERT software B1540A 001 Standard edition Keysight Desktop EasyEXPERT software B1541A 001 Standard edition Accessories for B1500 series 16444A 001 USB keyboard 16444A 002 USB mouse 16444A 003 Stylus pen Cables adapters interlock 16493K 001 Kelvin Triaxial Cable 1 5 m length Cable length 1 5 m or 3 0 m can be specified by option 001 or 002 These cables are NOT supported by the N126...

Page 66: ...0 cm 12 inch 8120 1839 BNC cable 60 cm 24 inch N1254A 500 HV jack connector panel mount for soldering 1 ea N1254A 501 HV jack to HV jack adapter panel mount 1 ea N1254A 502 HV plug connector panel mount for soldering 1 ea N1254A 503 HCSMU Coaxial Cable Assy 1 5 m BNC to Open End 1 ea N1254A 505 HVSMU Triaxial Cable Assy 1 5 m HV Plug to Open End 1 ea N1254A 506 HVSMU Coaxial Cable Assy 1 5 m HV Pl...

Page 67: ...N1254A 522 Connection wire banana to banana maximum 1500 A 2 ea N1254A 523 Banana to no connector wire maximum 1500 A 1 m 2 ea N1254A 524 System cable for prober 1 8 m 1 ea N1254A 525 SHV Cable Assy 1 5m SHV Plug To Open end 1 ea N1254A 526 Ultra High Current Cable 2m No Connectors At Either End 1 ea N1254A 527 PTFE Standoff Jack 4 ea N1254A 528 PTFE Standoff With Banana Plug 4 ea N1254A 554 Therm...

Page 68: ...tion and Connection Guide Configuration Guide Other Accessories 1250 2405 BNC T Plug m BNC f BNC f adapter 1ea 1251 2277 Banana to BNC adapter 1252 1419 Interlock receptacle connector Model Option Description Additional Information ...

Page 69: ...ion B1505A users who have not purchased a B1505A SWS have to update EasyEXPERT software to version 5 5 or later The B1505AU SWS includes 15 licenses which can be used for both EasyEXPERT and Desktop EasyEXPERT Measurement module B1505AU 010 High Power Source Monitor Unit Module B1510A Modules are NOT furnished with any cables Order the required cables and accessories separately B1505AU 011 Medium ...

Page 70: ...triaxial cable B1512A HCSMU cables and adapters 16493S 001 1 5 m length 16493S 002 3 m length 16493S 010 1 HCSMU Kelvin adapter 16493S 011 1 HCSMU non Kelvin adapter 16493S 020 1 Dual HCSMU combination adapter for 40 A measurement when connecting to wafer prober directly without N1258A selector 16493S 021 1 Dual HCSMU combination adapter for 40 A measurement when being used with N1259A test fixtur...

Page 71: ...1505A Configuration and Connection Guide 1 63 Configuration Guide Retrofit Products for B1505A NOTE Under the total power consumption limit there is configuration limitation Please refer to Table 1 4 on page 1 7 ...

Page 72: ...mware and software will be updated to the latest version at the service center So make a back up of data saved in the built in HDD by yourself before sending the instrument to the service center NOTE The 16442A 16442B test fixture supports up to 200 V 1A So use the N1259A or the N1265A which are designed for supporting the B1505A See N1259A Test Fixture for Power Device or N1265A Ultra High Curren...

Page 73: ...upgrading N1259A Model Option Description Note N1259AU Upgrade Kit for N1259A Test Fixture This product is only available for N1259A owners No furnished items in main product Please select the following options N1259AU 010 Inline Package Socket Module 3 pin The N1259AU 010 cannot be used with the N1265A Ultra High Current Expander Max voltage and current are 3 kV and 40A N1259AU 011 Universal Sock...

Page 74: ...1259AU 014 option is furnished with the following wires Four red long wires N1254A 508 Four black long wires N1254A 509 Two red short wires N1265 61751 Two black long wires N1265 61752 Maximum voltage and current is 3 kV and 20 A N1259AU 020 High Voltage Bias Tee The N1259AU 020 High Voltage Bias Tee is furnished with two SHV SHV cables N1254A 512 and two SHV banana adapters N1254A 513 Installatio...

Page 75: ...ervice Center N1254A 508 Connection wire red 1 ea The N1254A 508 509 Connection Wire supports 40A current but does not support 500 A 1500 A current flow on the N1265A Ultra High Current Expander Fixture Max voltage and current are 3 kV and 40 A The cable length is 250 mm N1254A 509 Connection wire black 1 ea N1254A 510 Dolphin clip adapter black 1 ea and red 1ea N1254A 511 Cable lug adapter black ...

Page 76: ...o the N1259AU when making a quotation with Keysight order configuration tool N1254A 513 SHV Jack to Banana Adapter 1ea The N1259AU 020 High Voltage Bias tee is furnished with two N1254A 513 adapters The N1254A 513 adapter is used with the N1254A 512 cable to connect a banana plug 16493G 001 Digital I O control cable 1 5 m The N1259AU 300 is furnished with a 16493G 001 cable Cable length 1 5 m or 3...

Page 77: ...uct Please select the following options N1265AU 002 Blank Silicon Plate N1265AU 010 Inline Package Socket Module 3 pin The N1265A 010 is furnished with total six cable shown below N1252A 522 1500A Ultra High Current Banana to Banana Cables Yellow 2ea for Collector Drain and Emitter Source force lines N1265 61751 Test Lead Banana 180mm Red 1ea and N1265 61752 Test Lead Banana 180mm Black 1ea for Co...

Page 78: ...1265AU 014 is the same as the N1259AU 014 Gate Charge Socket Module The N1265AU 014 option is furnished with Four red long wires N1254A 508 Four black long wires N1254A 509 Two red short wires N1265 61751 Two black long wires N1265 61752 Two yellow high current banana banana cable N1254A 522 Maximum voltage and current is 3 kV and 500 A N1265AU 015 1500 A Current Option 1500 A upgrade must be done...

Page 79: ... for Gate driver from device breakdown when making ultra high voltage measurement with the N1268A UHV Expander The B1514A MCSMU module has to be connected to a passthrough port of the N1265A UHC Expander Fixture not a module selector port N1265AU 041 Thermocouple Type K 2ea Include two Type K thermocouples N1265AU 045 Container for Protection Adapter and Bias Tee N1260A High Voltage Bias tee and N...

Page 80: ...Dolphin clip adapter black 1 ea and red 1ea N1254A 511 Cable lug adapter black 1 ea and red 1ea N1254A 512 SHV Cable 250 mm 1ea The N1259AU 020 High Voltage Bias tee is furnished with two N1254A 512 cables The N1254A 513 adapter is required to connect a banana plug N1254A 513 SHV Jack to Banana Adapter 1ea The N1259AU 020 High Voltage Bias tee is furnished with two N1254A 513 adapters The N1254A 5...

Page 81: ...l N1254A 522 1500 A Ultra High Current Banana to Banana Cable 2 ea Maximum voltage and current is 3 kV and 1500 A The N1265AU 010 500 A Ultra High Current 3 pin Inline Package Socket Module is furnished with N1254A 522 cables N1254A 523 1500 A Ultra High Current Banana to Open End Cable 1 m 2 ea Maximum voltage and current is 3 kV and 1500 A 16493G 001 Digital I O control cable 1 5 m The N1266A is...

Page 82: ...er prober must be designed changed or remade for the B1505A Test fixture 16088A B designed for the 4142B cannot be used for the measurements over 10 A 1000 V The connection path connectors cabling and wiring will not support up to 40 A 3000 V Connector types are different from the 4142B Table 1 32 Considering Connector Types 4142B B1505A High current connector Dual triaxial BNC and triaxial High v...

Page 83: ...2 N1259A Connection Guide ...

Page 84: ... are potentially hazardous voltages of up to 3000 V HVSMU 2200 V HVMCU 200 V HPSMU or 100 V MPSMU at the Force Guard and Sense terminals To prevent electrical shock do not expose these lines WARNING To prevent electrical shock during use connect the Interlock cable see To Connect Interlock Circuit on page 2 4 WARNING The B1505A is heavy and requires a two person lift CAUTION Do not grab the fixtur...

Page 85: ... information on the HVMCU see To Connect HVSMU Current Expander on page 5 34 Figure 2 1 N1259A Rear View WARNING The connector cap must be connected to the unused input connectors NOTE For connecting HP MPSMU use either 16494A or 16493K For connecting MFCMU use either AUX or MFCMU only for N1259A 020 N10149 Interlock HPSMU3 200 V Max HVSMU2 3 kV Max GNDU2 Module Selector Input Force Sense HVSMU1 3...

Page 86: ...n one B1505A and connected to the 16493S 021 Dual HCSMU combination adapter See To Connect Dual HCSMU Adapter on page 5 20 for connection The adapter output connectors are compatible with HCSMU CAUTION If the DHCSMU is used with the built in module selector the maximum current must be 30 A to prevent the module selector from performance degradation and failure NOTE The B1505A needs to automaticall...

Page 87: ...ense Sense MCSMU Force 16494A Triaxial cable 3 m or 1 5 m 1 ea and N1254A 104 Triaxial f BNC m adapter 1 ea HCSMU1 or HCSMU2 Force Sense 16494A Triaxial cable 3 m or 1 5 m 1 ea Sense HPSMU or MPSMU Force 16494A Triaxial cable 3 m or 1 5 m 1 ea for the non Kelvin connection connect it between the Force connectors For the Kelvin connection prepare additional one more cable and connect it between the...

Page 88: ...Force 16494A Triaxial cable 3 m or 1 5 m 1 ea for the non Kelvin connection connect it between the Force connectors For the Kelvin connection prepare additional one more cable and connect it between the Sense connectors Or use 16493K Kelvin triaxial cable instead of 16494A HPSMU3 Force Sense Sense Digital I O 16493G Digital I O connection cable 3 m or 1 5 m 1 ea Digital I O3 3 If the N1266A expand...

Page 89: ...apter for Sense Force 16494A 001 Triaxial cable 1 5 m 1 ea I Control Force Sense 16494A 001 Triaxial cable 1 5 m 1 ea Sense MCSMU2 Force 16494A 001 Triaxial cable 1 5 m 1 ea V Control Force Sense 16494A 001 Triaxial cable 1 5 m 1 ea Sense Digital I O 16493G 001 Digital I O connection cable 1 5 m 1 ea Digital I O Input N1266A terminals Required cables N1259A terminals Output High 16493T 001 HVSMU c...

Page 90: ...versal Socket Module on page 2 20 N1259A 012 Blank PTFE Board on page 2 21 N1259A 013 Curve Tracer Test Adapter Socket Module on page 2 22 Required parts for making the output connections are listed in the following table Table 2 5 Required Parts Model Option Description N1254A 508 Connection wire red N1254A 509 Connection wire black N1254A 512 and N1254A 513 SHV plug SHV plug cable and SHV jack b...

Page 91: ...y extend it as close as possible to a DUT terminal for reducing the leakage current of the extension cable 1 Set the instrument output off 2 Open the fixture cover 3 Set a socket module on the test fixture For using the blank PTFE board see N1259A 012 Blank PTFE Board on page 2 21 4 Connect a wire to an output terminal And repeat this for all terminals connected to the measurement resources to be ...

Page 92: ...N1259A Output Terminals 1 HCSMU 2 HPSMU 3 HVSMU 4 GNDU 5 AUX Signal Signal Force Guard Force Sense Guard Force Guard Sense Force High Low Sense HCSMU1 HCSMU2 GNDU1 HVSMU1 HPSMU2 HPSMU1 Force Sense High Low Force Sense 40 V Max 40 V Max 200 V Max 200 V Max 200 V Max 200 V Max 3 kV Max AUX2 AUX1 1 1 5 5 2 3 4 2 ...

Page 93: ...ction is not available for GNDU and HCSMU If you perform the low resistance measurement or the high current measurement use the Kelvin connection which can reduce the residual resistance effects of the cables and contacts by connecting the Force and Sense lines together as close as possible to the DUT terminal The Kelvin connection can be made on the test fixture as shown in Figure 2 3 Signal Sign...

Page 94: ...030 Series resistor 1 k 200 V max for gate base N1259A 035 Universal R box for installing your desired resistor For reducing damage of DUT or preventing SMU from oscillation 3 N1259A 020 High voltage bias T For capacitance or impedance measurements using DC bias of up to 3000 V 4 Socket module and blank board For mounting DUT See the following sections N1259A 010 Inline Package Socket module on pa...

Page 95: ...se Force 1 MΩ 2 1 100 kΩ High Low 2 1 3 kV Max 40 V Max N1259A Opt 022 3 kV Max Max 6 4 W 3 kV Max Max 9 W N1259A Opt 021 N1259A Opt 010 Force Sense Force Sense Force Sense 1 2 3 1 2 3 3 kV Max Inline Package Socket 3 Pin Kelvin Connection MF CMU DC Bias Input 3 kV Max High Low Force 3 kV Max 25 V Max Guard 4 2 5 1 2 3 4 6 7 8 N1259A Opt 011 3 kV Max Universal Socket Module 1 kΩ 2 1 200 V Max Max ...

Page 96: ... Sense terminal and the high terminal of DUT This connection is effective for all measurement performed by the modules connected to the module selector Input terminals Connection change is not required The module selector switching status is indicated by the Status indicator mounted on the front panel See Figure 2 6 and Table 2 6 on page 2 15 The Guard terminals must be opened You may extend it as...

Page 97: ... GNDU HCSMU HPSMU HVSMU S F S F S F F P A Protection adapter S F GNDU force and sense are connected to Low sense line HVSMU force is connected to High sense line 100 kW Module used for the test Status indicator Input to output connection1 of output terminals 1 In the normal state the module selector makes the path to the output port from the input port specified by the Default field When a measure...

Page 98: ...in connections add the following connection dotted line shown in Figure 2 7 1 Connect a wire between the SMU Sense output terminal and the 1 terminal The Kelvin connection is effective up to the series resistor input So the voltage drop caused by the series resistor must be subtracted from the measurement result as following Vdut Vout Rs Imeas where Vdut Voltage after correction Vout Source output...

Page 99: ...iver T 10 label for noting the resistance value Instruction 1 Remove the cover bottom of the blank box 2 Solder the resistor between the terminals 1 and 2 To prevent discharge and any accident make enough space between the resistor leads and the shield or chassis For example make space of about 6 mm from the leads for maximum 3000 V output 3 Reattach the cover Make enough space between the resisto...

Page 100: ...solid line between the bias T Low terminal and the low terminal of DUT 3 Connect a cable solid line between the bias T High terminal and the high terminal of DUT 4 Connect a wire dotted line between a SMU Force output terminal and the DC Bias Input High terminal Use MPSMU for DC bias of up to 100 V HPSMU for 200 V or HVSMU for 3000 V 5 Connect a wire dotted line between the SMU Guard output termin...

Page 101: ...tween the socket module terminals and the fixture output terminals For making the Kelvin connection Force and Sense must be connected to Force and Sense of the socket module respectively If MCSMU HCSMU or DHCSMU is used High Force and Sense must be connected to Force and Sense used for the high terminal of a device under test DUT respectively Low Force and GNDU Force must be connected to Force use...

Page 102: ...the blank board on the socket module wire adequate length and quantity for making connections hexlobe torx type screwdriver T 10 socket if you use and packaged device under test DUT Instruction 1 Cut the blank board in 104 mm 89 mm square 2 Make four screw holes on the board The holes should be 4 5 mm inside from the edge 3 Fix the board to the blank module 4 Remove the cover bottom of the blank m...

Page 103: ... 3 Connect wires between the adapters and the fixture output terminals For making the Kelvin connection Force and Sense must be connected together at the device terminal If MCSMU HCSMU or DHCSMU is used High Force and Sense must be connected to the high terminal of a device under test DUT Low Force Low Sense GNDU Force and GNDU Sense must be connected to the low terminal of the DUT See Figure 2 3 ...

Page 104: ...d Sense must be connected to Force and Sense used for the high terminal of a device under test DUT respectively Low Force and GNDU Force must be connected to Force used for the low terminal of the DUT and Low Sense and GNDU Sense must be connected to Sense used for the low terminal of the DUT See Figure 2 3 for example 4 Set the DUT on your test adapter 5 Close the fixture cover and perform measur...

Page 105: ... connection examples 3 Set the current control device on the left socket or connect the load resistor between the studs for the resistor The current control device must be an extra 3 pin inline package device which is expected to have the same characteristics as DUT If the device is not available use a load resistor The resistor must satisfy the following specifications Resistance Vr Ir Vr rated v...

Page 106: ...gure 2 16 Connection Example for High Current Gate Charge Measurement NOTE For the high current gate charge measurement connect the Selector Output Sense High terminal on the fixture to the Selector Output Force High terminal on the N1259A 014 adapter Measurement may fail depending on the device characteristics if it is connected to the Selector Output Sense High terminal ...

Page 107: ...3 N1265A Connection Guide ...

Page 108: ...struments off before connecting or disconnecting measurement cable WARNING There are potentially hazardous voltages of up to 10 kV UHVU 3000 V HVSMU 2200 V HVMCU 200 V HPSMU or 100 V MPSMU at the High Force Guard and Sense terminals To prevent electrical shock do not expose these lines WARNING To prevent electrical shock during use connect the Interlock cable see To Connect Interlock Circuit on pa...

Page 109: ...ersal socket module are the do it yourself kit for installing a resistor you want or mounting a socket you want You need to prepare the hexlobe torx type screwdriver T 10 to remove the cover After installing a resistor or mounting a socket reattach the cover Do not use the universal R box and the universal socket module under the condition that the cover is removed ...

Page 110: ...put connector by the type of the connected SMU The connectors 1 3 and 5 are for connecting Force and the connectors 2 4 and 6 are for connecting Sense of the measurement resource connected to the connectors 1 3 and 5 respectively For connecting HP MPSMU the connectors 2 4 and 6 can be also used to connect Force of other SMU for non Kelvin connection NOTE For connecting MFCMU use N1300A 001 CMU cab...

Page 111: ...e with HCSMU NOTE The B1505A needs to automatically detect and register the CMU cable type during boot process Table 3 1 SMU Input Connectors and Signals by SMU Type To Connect Interlock Circuit The B1505A provides the Interlock connector to prevent you from receiving an electrical shock from high voltage more than 42 V If the interlock circuit is open the B1505A cannot apply high voltage more tha...

Page 112: ... MCSMU4 Force 16494A Triaxial cable 3 m or 1 5 m 1 ea Gate Force Sense 16494A Triaxial cable 3 m or 1 5 m 1 ea Sense MCSMU or HPSMU or MPSMU Force To connect MCSMU use two 16494A cables 3 m or 1 5 m To connect HP MPSMU use N1261A 001 protection adapter and four 16494A triaxial cables for Kelvin connection or two 16494A cables for non Kelvin connection Recommended cable length is 1 5 m See To Conne...

Page 113: ...3 adapter for Force and N1254A 517 adapter for Sense B1505A terminals Required cables N1265A terminals B1505A terminals Required cables N1266A terminals1 1 To configure HVMCU the N1266A current expander is required GNDU 16493L 001 GNDU cable 1 5 m 1 ea GNDU HVSMU Force 16493T 001 HVSMU cable 1 5 m 1 ea HVSMU MCSMU2 2 HCSMU is substitutable Then use 16493S HCSMU cable N1254A 103 adapter for Force a...

Page 114: ...ense MCSMU2 2 HCSMU is substitutable Then use 16493S HCSMU cable N1254A 103 adapter for Force and N1254A 517 adapter for Sense Force 16494A 001 Triaxial cable 1 5 m 1 ea V Control Force Sense 16494A 001 Triaxial cable 1 5 m 1 ea Sense N1268A terminals Required cables N1265A terminals Interlock Output 16493J 001 Interlock cable 1 5 m 1 ea Interlock Output High UHV plug UHV plug cable 1 5 m 1 ea par...

Page 115: ...ge 3 22 Required parts for making the output connections are listed in the following table Table 3 5 Required Parts Model Option Description N1254A 508 Connection wire red do not use with UHCU UHVU N1254A 509 Connection wire black do not use with UHCU UHVU N1254A 522 Connection wire 2 ea for using UHCU N1254A 512 and N1254A 513 SHV plug SHV plug cable and SHV jack banana adapter for high voltage c...

Page 116: ...uch as SMU Connecting other measurement resource may damage the connected one NOTE SMU Guard terminals and Selector Output Guard terminal Guard must be opened You may extend it as close as possible to a DUT terminal for reducing the leakage current of the extension cable 1 Set the instrument output off 2 Open the fixture cover 3 Set a socket module on the test fixture For using the blank silicon p...

Page 117: ...nal for connecting GNDU Use a MCSMU for the gate or base terminal of active device measurement using UHVU Then attach the N1265A 040 protection adapter on the SMU terminals used for the MCSMU This adapter is designed for protecting the MCSMU from ultra high voltage Also see Protection Adapter N1265A 040 on page 3 25 NOTE Kelvin connection and non Kelvin connection If you want to simplify the conne...

Page 118: ...igh Force High Sense High Force High Sense High Force High Sense Black letters Low Force Low Sense Low Force Low Sense Low Force Low Sense HCSMU or DHCSMU NA NA High Force High Sense Low Force Low Sense Force Guard Force Guard Force Guard Force Guard Force Guard Force Guard Sense Force Sense Force Sense Force 200 V Max 1 A SM U SM U 200 V Max 2 A dc 40 A Pulse Force High Low High Low High Low High...

Page 119: ...ed together at the low terminal of a DUT Use the banana banana wire N1254A 522 to connect the Low Force terminal for performing the ultra high current measurement using UHCU 2 High Force and High Sense output terminals Force and Sense must be connected together at the high terminal of a DUT Use the banana banana wire N1254A 522 to connect the High Force terminal for performing the ultra high curre...

Page 120: ...us indicator Input to output connection1 of output terminals 1 In the normal state the selector makes the path to the output port from the input port specified by the Default field When a measurement is performed the selector performs automatic switching in every test The selector makes the path to the output port from the measurement resource used for the test Low Sense Low Force High Sense High ...

Page 121: ...age C V measurement High and Low must be connected to the high and low terminals of a DUT respectively Use SHV plug SHV plug cable N1254A 512 2 ea and SHV jack banana adapter N1254A 513 2 ea for connection CAUTION Open the Bias Tee terminals for the ultra high voltage measurement using UHVU K Thermocouple Terminals For connecting the thermocouple to monitor temperature around a DUT The N1265A 041 ...

Page 122: ...ge 3 25 for the protection adapter Figure 3 6 UHV Connection Example CAUTION Open the Gate terminals the Selector Output terminals and the Bias Tee terminals for the ultra high voltage measurement using the UHVU CAUTION Never connect the UHVU High terminal to any output including circuit common chassis ground or any other measurement resource such as SMU Connecting other measurement resource may d...

Page 123: ...th the N1265A 010 180 mm length wire yellow for Selector Output High Low Force 180 mm length wire for Selector Output High Low Sense 250 mm length wire for Gate SMU or chassis For making the Kelvin connection Force and Sense must be connected to Force and Sense of the socket module respectively For the high voltage capacitance measurement use SHV plug SHV plug cable N1254A 512 and SHV jack banana ...

Page 124: ...ee the following simple instruction For the component locations and dimensions see Figure 3 8 Also see Inline Package Socket module N1265A 010 on page 3 17 to perform measurement Figure 3 8 Universal Socket Module 1 Prepare the following parts blank board suitable for mounting the socket or packaged device screw M3 4 ea for fixing the blank board on the socket module wire adequate length and quant...

Page 125: ... between the socket module terminals and the fixture output terminals Then use the following wire N1254A 522 wire yellow for Selector Output High Low Force N1254A 508 or 509 wire for Selector Output High Low Sense Gate SMU or chassis For making the Kelvin connection Force and Sense must be connected to Force and Sense of the socket module respectively For the high voltage capacitance measurement u...

Page 126: ...2 Connect wires between the socket module terminals and the fixture output terminals You can use the following wires supplied with the socket module N1254A 522 high current wire yellow 2 ea N1254A 508 long wire red 2 ea N1254A 509 long wire black 2 ea N1265 61751 short wire red 2 ea N1265 61752 short wire black 2 ea For making the Kelvin connection Force and Sense must be connected together at the...

Page 127: ...mple for High Voltage Gate Charge Measurement Collector Drain Emi er Source Base Gate N1259A Opt 013 Force Sense Force Sense Force Sense Curve Tracer Test Adapter Socket 1 2 5 6 4 3 Gate DUT High Max 30 V 1 A Low Max 10 V 1 A Selector Out Force High Max 3000 V 500 A Low Max 10 V 500 A Selector Out Sense High Max 3000 V 20 mA Low Max 10 V 20 mA SMU Current Control High Max 30 V 1A floating 3000 V L...

Page 128: ...re 3 Connect cable wire between the DUT and the fixture output terminals For making the Kelvin connection Force and Sense must be connected to Force and Sense of the socket module respectively Selector Output and Gate should be connected as follows Selector Output High to DUT high ex Collector Drain Selector Output Low to DUT low ex Emitter Source Gate High to DUT drive ex Base Gate Force Gate Low...

Page 129: ...ut Voltage after correction Vout Source output voltage Rs Resistance of the series resistor Imeas Measurement current Figure 3 14 Series Resistor Connection Example To Use Universal R Box To install your desired resistor see the following simple instruction Required parts To UHVU High To UHVU Low DUT Shield Signal line Insulator SHV Cable UHV Cable Insulator 32 mm for 10 kV 100 mm for 10 kV Force ...

Page 130: ...n High Force and High Case 2 installing a parallel resistor between High and Low Connect a wire between Low Force and Low Connect a wire between High Force and High Connect the resistor between High Force and Low Force Case 3 installing a series resistor on High and a parallel resistor between High and Low Connect a wire between Low Force and Low Connect the parallel resistor between High and Low ...

Page 131: ...r connection example This adapter is designed for using the MCSMU Container N1265A 045 This container can accommodate protection adapters and bias tee which are used with the N1265A to make the measurement environment clean and safe Maximum superimposed load is 50 kg The N1265A and the N1266A can be put on the top of the container Prober System Cable N1254A 524 This is the cable for extending the ...

Page 132: ...3 26 Keysight B1505A Configuration and Connection Guide N1265A Connection Guide Output Connection ...

Page 133: ...4 N1272A and N1273A Connection Guide ...

Page 134: ... Weight 9 4 kg N1273A fixture Dimensions 340 mm W 200 mm H 345 mm D Weight 4 9 kg WARNING To avoid electrical shock and instrument damage turn the all instruments off before connecting or disconnecting measurement cable WARNING There are potentially hazardous voltages of up to 3000 V HVSMU or 100 V MPSMU at the Force Guard and Sense terminals To prevent electrical shock do not expose these lines W...

Page 135: ...rs of the B1505A and the N1272A selector and the composite cable between the N1272A and the N1273A The composite cable is furnished with the N1273A N1272A Device Capacitance Selector The N1272A is used to switch the measurement resource connected to the device under test DUT for capacitance testing input output capacitance feedback capacitance and gate resistance The measurement resource will be H...

Page 136: ...put connector d AC DC Guard output connector e HVSMU output connector f Interlock output connector g Frame ground terminal 4 LINE input receptacle and power switch Force Guard Circuit Common HVSMU To avoid electrical shock and instrument damage do not connect disconnect the cables during operation Output Input 3 k V Max Lcur Hcur Lpot Hpot Force Sense 3 k V Max 3 k Max 3 k V Max 100 V Max 100 V Ma...

Page 137: ...5 m 1 ea It is not needed to connect the ground wire extended from the CMU cable MFCMU Hpot Hcur Hcur Lcur Lcur Lpot Lpot Digital I O B1506 61780 Digital I O connection cable 1 ea This cable is supplied with the N1272A Digital I O Input Power cable 1 ea for connecting to power line LINE N1272A output terminals Required cables N1273A terminals Interlock Composite cable assembly 0 4 m 1 ea This cabl...

Page 138: ...he N1273A fixture WARNING If the N1273A is used with the N1259A N1265A fixture you need to change the connection of the interlock and GNDU cables each time you change the fixture Figure 4 4 Connection Example using N1272A N1259A and N1273A HVSMU GNDU HCSMU 1 HCSMU 2 Digital I O SMU 1 Interlock N1259A 300 For Capacitance Measurement For I V Measurement B1507 61720 Included in the N1273A HVSMU MPSMU...

Page 139: ...505A 16493T Included in the HVSMU 16494A Included in the MPSMU 16493L Included in the B1505A 16493G Digital I O cable Included in the N1265A 16493J Included in the B1505A N1272A GNDU HVSMU F S MPSMU Hcur Hpot Lpot Lcur MFCMU HVSMU Base Gate Emi er Source Collector Drain AC DC Guard Chassis GND Interlock Interlock Connect for I V Measurement 16493T Included in the N1272A Digital I O Input Output B1...

Page 140: ...Do not touch the DUT soon after measurement Have enough time for discharge and radiation CAUTION Do not touch the terminals of the cable and wire Oil perspiration and dirt prevent good electrical contact deteriorate insulation and degrade measurement accuracy CAUTION Never connect the HVSMU Force and Guard terminals to any output including circuit common chassis ground or any other module terminal...

Page 141: ...rovides a socket used for connecting three terminal inline packaged device To use this module see the following simple instruction Requirements 3 pin inline package socket module DUT Instruction 1 If the earthing wire is not connected to the socket module connect it 2 Attach the socket module directly to the Base Gate Collector Drain and Emitter Source terminals of the test fixture 3 Connect the e...

Page 142: ...pear at the measurement terminals if the fixture cover is closed WARNING Open the Guard terminal of the test fixture Do not connect anything to it NOTE A short plate is furnished with the socket module It is used for performing the short correction before the capacitance measurement Set it on the socket before the short correction and remove it after the correction is completed Socket module Test ...

Page 143: ...s with the same manner as the 3 pin Inline Package Socket Module See 3 pin Inline Package Socket Module on page 4 9 Requirements Blank board suitable for mounting the socket or packaged device Screws for fixing the blank board supplied with the socket module Wire 2 m 1 ea supplied with the socket module Lug terminals 14 ea supplied with the socket module Socket if you use and packaged device under...

Page 144: ...socket board to the blank module using the screws and tooth washers 4 Remove the bottom cover of the blank module using a T10 Torx screwdriver 5 Assemble cables using the wire and lug terminals Cut the appropriate length of the wire tear off the coating of wire ends and then secure the lug terminals to the wire ends using a caulking tool 6 Connect one end of all cables to the upside terminals on t...

Page 145: ... terminal does not have a screw or nut for securing a lug terminal of the cable prepare it Ensure the terminal position of the blank module and the socket board and connect the cables correctly 8 Fix the bottom cover to the blank module using a T10 Torx screwdriver CAUTION Do not apply voltage current over the maximum limit of the socket module Terminal rated voltage 3000 Vd c Terminal rated curre...

Page 146: ...2 Connect your test adapter to the socket Socket terminal 4mm pin receptacle 3 Set the DUT on your test adapter 4 Close the fixture cover and perform measurement CAUTION Do not apply voltage current over the maximum limit of the socket module Maximum voltage 3000 V Maximum current 100 mA Figure 4 9 Curve Tracer Test Adapter Socket Module 1 2 3 4 5 6 Base Gate Collector Drain Emitter Source AC DC G...

Page 147: ...ut your DUT on the blank silicon plate 2 Connect your DUT to the measurement terminals of the test fixture by using the test leads 3 Close the fixture cover and perform measurement WARNING Hazardous voltage instrument maximum output voltage may appear at the measurement terminals if the fixture cover is closed WARNING Open the AC DC Guard terminal to avoid electrical shock instrument damage or DUT...

Page 148: ...4 16 Keysight B1505A Configuration and Connection Guide N1272A and N1273A Connection Guide Output Connection ...

Page 149: ...5 Connection Guide for Wafer Prober and Your Own Test Fixture ...

Page 150: ...xpander To Connect Ultra High Voltage Expander To Connect Device Capacitance Selector To Connect Gate Charge Adapter To Install an Interlock Circuit About Cable Connections For the dimensions of accessories see Chapter 6 Accessory Dimensions WARNING To avoid electrical shock and instrument damage turn the all instruments off before connecting or disconnecting measurement cable WARNING There are po...

Page 151: ...rent Expander N1258A Module Selector or N1259A test fixture NOTE Using Universal R box The universal R box is a blank box kind of a do it yourself kit for installing a resistor you want You need to prepare the hexlobe torx type screwdriver T 10 to remove the cover After installing a resistor reattach the cover Do not use the universal R box under the condition that the cover is removed NOTE Connec...

Page 152: ...MU DHCSMU can be configured by two HCSMU modules installed in one B1505A and connected to the 16493S 020 Dual HCSMU Kelvin combination adapter or the 16493S 021 Dual HCSMU combination adapter See To Connect Dual HCSMU Adapter for connection NOTE The B1505A needs to automatically detect and register the CMU cable type during boot process NOTE The N1258A module selector has built in GNDU protection ...

Page 153: ...94A Triaxial cable 3 m or 1 5 m 2 ea or 16493K Kelvin triaxial cable 3 m or 1 5 m 1 ea N1262A 010 011 R box and 16494A 16493T cable optional for non Kelvin connection Triaxial m cable 2 ea for N1261A 001 or HV plug cable 2 ea for N1261A 003 or Triaxial m cable 1 ea for N1262A 010 or SHV plug cable 1 ea for N1262A 011 Sense GNDU Also see Table 5 2 for HVMCU N1261A 002 004 GNDU protection adapter 1 ...

Page 154: ...rol Force Sense 16494A 001 Triaxial cable 1 5 m 1 ea Sense MCSMU1 Force 16494A 001 Triaxial cable 1 5 m 1 ea V Control Force Sense 16494A 001 Triaxial cable 1 5 m 1 ea Sense HVSMU Force 16493T 001 HVSMU cable 1 5 m 1 ea HVSMU GNDU 16493L 001 GNDU cable 1 5 m 1 ea GNDU Digital I O 16493G 001 Digital I O connection cable 1 5 m 1 ea Digital I O Input N1266A terminals Required accessories and cables C...

Page 155: ...HVSMU GNDU 16493L GNDU cable 3 m or 1 5 m 1 ea Also see Table 5 2 GNDU Digital I O 16493G Digital I O connection cable 3 m or 1 5 m 1 ea Digital I O N1258A terminals Required cables Description Connect to Low Force Coaxial cable with BNC m connector N1254A 503 can be used DUT low terminal ex source 1 1 Non Kelvin connection is not allowed GNDU Force and Sense are internally connected to Low Sense ...

Page 156: ...SMU cable 3 m or 1 5 m 1 ea HVSMU GNDU 16493L GNDU cable 3 m or 1 5 m 1 ea GNDU N1267A terminals Required cables Description Connect to Low Force Coaxial cable with BNC m connector N1254A 503 can be used DUT low terminal ex source High Force Coaxial cable with HV plug connector N1254A 506 can be used Use coaxial cable to minimize affect of inductance DUT high terminal ex drain Shielding box B1505A...

Page 157: ... Low Force Cable with banana connector N1254A 523 can be used DUT low terminal ex source 2 2 Non Kelvin connection is not allowed GNDU Sense is internally connected to Low Sense Low Sense Coaxial cable with BNC m connector N1254A 503 can be used High Force Cable with banana connector N1254A 523 can be used DUT high terminal ex drain 2 High Sense Triaxial cable with HV plug connector N1254A 505 can...

Page 158: ... Chuck Force Sense 16494A Triaxial cable 1 5 m 1 ea Sense Terminals Required cables Description Connect to Interlock Output 16493J Interlock cable 3 m or 1 5 m 1 ea and 1252 1419 Interlock connector 1 ea Interlock circuit Output Low SHV cable of 16494V 3 m or 1 5 m 1 ea N1269A UHV Low Output High UHV cable of 16494V 3 m or 1 5 m 1 ea UHV adapter of N1254A 521 1 ea and UHV cable of N1254A 520 DUT h...

Page 159: ...r protecting GNDU from high voltage N1261A 004 GNDU protection adapter Triaxial f SHV jack N1262A 001 1 M 3000 V R box HV jack SHV jack For reducing damage of DUT or preventing SMU from oscillation N1262A 002 100 k 3000 V R box HV jack SHV jack N1262A 010 1 k 200 V R box Triaxial f Triaxial f N1262A 011 1 k 3000 V R box HV jack SHV jack N1262A 020 Universal R box Triaxial f Triaxial f N1262A 021 U...

Page 160: ...7 1252 1419 Interlock connector 6 pin female 1450 0641 LED VF 2 1 V IF 10 mA N1254A 500 HV jack connector panel mount for soldering For connecting HVSMU or accessory to your DUT interface N1254A 501 HV jack HV jack adapter panel mount N1254A 502 HV plug connector panel mount for soldering N1254A 503 BNC m to no connector coaxial cable 1 5 m For connecting accessory to your DUT interface N1254A 504...

Page 161: ...4A 527 PTFE Standoff Jack 4 ea N1254A 528 PTFE Standoff With Banana Plug 4 ea N1254A 554 Thermocouple Type K 75 cm 2 ea For measuring temperature with N1265A N1254A 558 SHV cable 3 m 1 ea For connecting accessory to your DUT interface 16493U 001 BNC m BNC m coaxial cable 1 5 m 16493U 002 BNC m BNC m coaxial cable 3 m 1250 2405 BNC m f f adapter For connecting HCSMU adapter output and GNDU protecti...

Page 162: ...e To Use Universal R Box on page 5 15 N1262A 036 termination adapter is a BNC f BNC m adapter which contains 50 resistor between signal line and shield If a SMU is used as the gate drive for the measurement using HVMCU UHVU or UHCU the SMU may cause oscillation Then this adapter should be connected between the gate drive output and a DUT terminal This will be effective for preventing oscillation T...

Page 163: ...e resistor and wire as shown below To prevent discharge and any accident make enough space between the resistor leads and the shield or chassis For example make space of about 1 mm from the leads for maximum 200 V output 6 mm for 3000 V and 32 mm for 10 kV Case 1 N1262A 020 021 see Figure 5 1 Connect a wire between a terminal and the center conductor of its near connector Connect a wire between th...

Page 164: ...N1262A 023 see Figure 5 2 Connect the resistor between the terminals 3 Reattach the cover Make enough space between the resistor leads and the cover 4 Write the resistance value in the label 5 Affix the label to the top cover Figure 5 1 To Install Resistor in the N1262A 020 Universal R Box Figure 5 2 To Install Resistor in the N1262A 023 Universal R Box ...

Page 165: ...1 To Connect 16493S 010 011 Output B1505A terminals Required cables Input terminals HCSMU Force 16493S HCSMU cable 3 m or 1 5 m From HCSMU Force Sense Sense Output terminals Required cables Description Connect to Low Force Coaxial cable with BNC m connector 16493U 001 002 or N1254A 503 can be used Low terminals must be grounded by using the GNDU If you want to simplify the connection connect the H...

Page 166: ... 5 3 Typical Connection to Use One HCSMU Kelvin connection Figure 5 4 To Simplify GNDU Connection Kelvin connection Figure 5 5 To Simplify GNDU Connection non Kelvin connection Shielding box B1505A DUT interface GNDU adapter N1261A 002 16493S 010 Interlock circuit 16493S 16493L Sense Force Low High Sense Force 2 1 2 1 1252 1419 2 N1254A 503 or other cable 5 ea 3 N1254A 516 1 ea and 16493U 001 2 ea...

Page 167: ...ction is effective for not so high current path such as the Gate For the bipolar devices the Kelvin connection should be used for all terminals For the measurements using both Kelvin and non Kelvin connections the HCSMU Low Sense must be connected together So the 16493S 011 Low is connected to the 16493S 010 Low Sense in this example The simplified GNDU connection shown in Figure 5 4 is also effec...

Page 168: ...Low Sense terminals outer conductor of the coaxial connectors Connecting or putting conductor of circuit common chassis ground or any potential on causes the measurement error To Connect 16493S 020 The 16493S 020 adapter is used to connect a DUT interface such as your own test fixture and wafer prober This adapter cannot be used with the N1258A module selector The adapter should be installed near ...

Page 169: ...ith the N1258A module selector output connectors Required cables Description Connect to Low Force Coaxial cable with BNC m connector N1254A 503 can be used DUT low terminal ex source 2 2 Non Kelvin connection is not allowed GNDU Force and Sense are internally connected to Low Sense Sense Coaxial cable with BNC m connector N1254A 503 can be used High Force Coaxial cable with HV plug connector N1254...

Page 170: ...rmance degradation and failure B1505A terminals Required cables Input terminals HCSMU used for master Force 16493S HCSMU cable 3 m or 1 5 m Master Force Sense Sense HCSMU used for slave Force 16493S HCSMU cable 3 m or 1 5 m Slave Force Sense Sense Outputterminals1 1 This is the DHCSMU channel The connectors are compatible with HCSMU Required cables Description Connect to Output Force dedicated cab...

Page 171: ...s N1261A terminals HPSMU or MPSMU Force 16494A Triaxial cable 3 m or 1 5 m 1 ea for the non Kelvin connection connect it between the Force connectors For the Kelvin connection prepare additional one more cable and connect it between the Sense connectors Or use 16493K Kelvin triaxial cable instead of 16494A From HPSMU Force Sense Sense GNDU 16493L GNDU cable 3 m or 1 5 m From GNDU N1261A Opt 001 HP...

Page 172: ...able with BNC m connector N1254A 503 can be used N1261A 004 Force Coaxial cable with SHV plug connector Sense Coaxial cable with SHV plug connector N1261A Opt 001 HPSMU Protection Adapter Force Sense From HPSMU Output Guard Sense Force Circuit Com m on Force 㼼200V max 䞉䞉䞉䞉 Sense 㼼200V max 䞉䞉䞉䞉 Agilent Input Peak 㼼3kV max N1261A Opt 001 HPSMU Protection Adapter Force Sense From HPSMU Output Guard S...

Page 173: ...65A test fixture It must be connected between the MFCMU and the N1265A Then use two N1254A 518 SHV cables to connect the N1260A output to the N1265A Bias Tee input The N1260A input connection is same as Table 5 18 Ignore Table 5 19 Table 5 18 To Connect N1260A Input NOTE Turn the B1505A off before connecting the CMU cable Connect HVSMU to obtain DC bias input Because the bias tee cannot pass the M...

Page 174: ... cable with SHV plug connector DUT high terminal ex drain AC Guard Coaxial cable with SHV plug connector This terminal provides the AC guard circuit common signal of MFCMU For the 3 terminal device measurement the AC Guard must be extended to the device terminal which is not connected to Low or High DUT terminal ex gate AC Guard High Low Signal AC Guard Return Output 㼼3kV M ax 䞉䞉䞉䞉 AC Guard High L...

Page 175: ... required The module selector switching status is indicated by the Status indicator mounted on the front panel See Table 5 22 on page 5 31 Figure 5 10 Module Selector Circuit Diagram and Connections CAUTION The GNDU can sink current of up to 4 2 A Use 16493L GNDU cable to connect the GNDU to the N1258A Do not use normal triaxial cable 16494A because the maximum current rating of the cable is 1 A C...

Page 176: ...nt resource may damage the connected one NOTE Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals outer conductor of the coaxial connectors Connecting or putting conductor of circuit common chassis ground or any potential on causes the measurement error HCSMU Force N1258A Module Selector HVSMU Force 16493L HCSMU Sense HPSMU Force HPSMU Sense 16493T High Force DUT GND...

Page 177: ...r HCSMU 16493S HCSMU cable 3 m or 1 5 m 2 ea and 16493S 021 Dual HCSMU adapter 1 ea for DHCSMU HCSMU Force Sense Sense HPSMU or MPSMU Force 16494A Triaxial cable 3 m or 1 5 m 1 ea for the non Kelvin connection connect it between the Force connectors For the Kelvin connection prepare additional one more cable and connect it between the Sense connectors Or use 16493K Kelvin triaxial cable instead of...

Page 178: ... with HV plug connector N1254A 506 can be used Use coaxial cable to minimize affect of inductance DUT high terminal ex drain 2 Sense Triaxial cable with HV plug connector N1254A 505 can be used External Relay Control Output Cable with D sub 15 pin connector See Figure 5 13 for pin assignment Relay control 1 to 6 are used to control an external relay and controlled by using the Keysight FLEX comman...

Page 179: ...d for the test Status indicator Input to output connection1 of output terminals 1 In the normal state the N1258A makes the path to the output port from the input port specified by the Default field When a measurement is performed the N1258A performs automatic switching in every test The N1258A makes the path to the output port from the measurement resource used for the test Low Sense Low Force Hig...

Page 180: ...r DUT interface see Table 5 4 and Figure 5 15 for the connection image The output cable connection is effective for all measurement performed by the measurement resources connected to the Input terminals Connection change is not required See Figure 5 16 for the internal connection Figure 5 15 To Connect HVSMU HCSMU Fast Switch Figure 5 16 N1267A Simplified Internal Connections HCSMU Force N1267A F...

Page 181: ... not connect or put any conductor on the HCSMU Low Force and Low Sense terminals outer conductor of the coaxial connectors Connecting or putting conductor of circuit common chassis ground or any potential on causes the measurement error B1505A terminals Required cables N1267A terminals HCSMU Force 16493S HCSMU cable 3 m or 1 5 m 1 ea HCSMU Force Sense Sense HVSMU Force 16493T HVSMU cable 3 m or 1 ...

Page 182: ...ce HVMCU or HVSMU is controlled by each test setup And the switching status is indicated by the Status indicator mounted on the front panel See Table 5 25 for the indication and the connection path Figure 5 17 To Configure HVMCU Table 5 25 N1266A Status Indicator and Input to Output Connection Path Measurement resource used for the test Status indicator Input to output connection1 of output termin...

Page 183: ...16493T 001 HVSMU cable 1 5 m HVSMU GNDU 16493L 001 GNDU cable 1 5 m GNDU MCSMU1 1 HCSMU is substitutable Then use 16493S HCSMU cable N1254A 103 adapter for Force and N1254A 517 adapter for Sense Force 16494A 001 Triaxial cable 1 5 m I Control Force Sense 16494A 001 Triaxial cable 1 5 m Sense MCSMU1 Force 16494A 001 Triaxial cable 1 5 m V Control Force Sense 16494A 001 Triaxial cable 1 5 m Sense Di...

Page 184: ...r your DUT interface See Figure 5 18 for the connection image The prober side connector type maximum voltage and maximum current of the N1254A 524 are shown in Table 5 28 See Table 5 29 for the output connection cables CAUTION Do not grab the fixture cover when lifting the N1265A Do not apply voltage current over the maximum limit of the cable See Table 5 28 Figure 5 18 To Extend Selector Output b...

Page 185: ...hout the N1254A 524 system cable 6 Connect two connector boxes of the system cable to the Selector Output and Gate terminals properly See Figure 5 18 7 Pull out the prober side connector box and some long of extension cable approximately 1 5 m from the opening 8 Set and fix two clear plastic plates to the fixture cover by using the hex nuts removed in the step 5 The plates close the excess opening...

Page 186: ... 30 To Connect N1268A N1269A Input B1505A terminals Required cables N1268A input MCSMU Force 16494A 001 Triaxial cable 1 5 m I Control Force Sense 16494A 001 Triaxial cable 1 5 m Sense MCSMU1 1 HCSMU is substitutable Then use 16493S HCSMU cable N1254A 103 adapter for Force and N1254A 517 adapter for Sense Force 16494A 001 Triaxial cable 1 5 m V Control Force Sense 16494A 001 Triaxial cable 1 5 m S...

Page 187: ...A Triaxial cable 1 5 m or 3 m Gate Force Sense 16494A Triaxial cable 1 5 m or 3 m Sense MCSMU Force 16494A Triaxial cable 1 5 m or 3 m Chuck Force Sense 16494A Triaxial cable 1 5 m or 3 m Sense N1268A Output Low SHV jack SHV jack cable 1 5 m or 3 m of 16493V Low N1268A output Required cables Description Connect to Interlock Output 16493J Interlock cable 1 5 m or 3 m Interlock circuit High Ultra hi...

Page 188: ...es Input terminals HVSMU 16493T 001 HVSMU cable 1 5 m 1 ea HVSMU MPSMU Force 16494A Triaxial cable 1 5 m 1 ea SMU Force Sense 16494A Triaxial cable 1 5 m 1 ea Sense MFCMU Hcur N1300A 001 CMU cable 1 5 m 1 ea It is not needed to connect the ground wire extended from the CMU cable MFCMU Hcur Hpot Hpot Lpot Lpot Lcur Lcur GNDU 16493L 001 GNDU cable 1 5 m GNDU Interlock 16493J 001 Interlock cable 1 5 ...

Page 189: ...5 m Interlock circuit Digital I O Output 16493G 001 Digital I O connection cable 1 5 m If the N1272A selector is used with the N1258A or N1265A you can connect this terminal to the input of it Digital I O Input of N1258A or N1265A G S HVSMU GNDU UHC Input V Control I Control HF LF HS LS Gate N1265A Gate Selector High Low N1254A 524 D Gate F Gate S HVSMU MPSMU MFCMU MCSMU GNDU F S F S B1505A 16493T...

Page 190: ... for Capacitance Measurement Connec on for I V Measurement HVSMU MPSMU MFCMU HCSMU GNDU F S F S B1505A 16493T Included in the HVSMU 16494A Included in the MPSMU 16493L Included in the B1505A 16493G 002 Digital I O cable Included in the N1258A 16493J Included in the B1505A MCSMU F S N1272A GNDU HVSMU F S MPSMU 16493S Included in the HCSMU Hcur Hpot Lpot Lcur MFCMU HVSMU Base Gate Emi er Source Coll...

Page 191: ... cable 30 cm furnished in the N1274A Low Force Sense B1512 61741 BNC cable 30 cm furnished in the N1274A Sense External Relay Control Output N1274 61722 D sub 15 pin cable furnished in the N1274A Relay Control Input B1505A terminals Required cables Input terminals MCSMU Force 16494A Triaxial cable 1 5 m 1 ea Current Control Force Sense 16494A Triaxial cable 1 5 m 1 ea Sense MCSMU or HC SMU Force 1...

Page 192: ... Charge Measurement Adapter Output terminals Required cables Description Connect to High Force Ultra high current cable with banana plug N1254A 523 can be used DUT high terminal ex drain Sense Triaxial cable with HV plug connector N1254A 505 can be used Low Force Ultra high current cable with banana plug N1254A 523 can be used DUT low terminal ex source Sense Coaxial cable with BNC m connector N12...

Page 193: ...tion example is shown in Figure 5 23 For the color codes of cables and connectors in this figure see Figure 7 1 on page 7 2 Table 5 36 To Connect N1275A Input Table 5 37 To Connect N1275A Output N1254A terminals Required cables Input terminals High Force N1275 61701 Ultra high current banana cable 30 cm furnished in the N1275A High Force From N1254A Low Sense B1512 61741 BNC cable 30 cm furnished ...

Page 194: ...elding Box Shielding Box HVSMU HC MCSMU HC MCSMU MCSMU GNDU F S F S F S B1505A 16493T Included in the HVSMU 16494A for MCSMU included in the MCSMU 16493L Included in the B1505A 16493G 001 Digital I O cable Included in the N1265A 16493J Included in the B1505A HP MPSMUF S MCSMU F S N1275A HF From N1254A To DUT LS From N1254A To DUT F S MCSMU 16494A Included in the MCSMU N1261A 003 Output F S F S HPS...

Page 195: ...e pin assignments of the interlock connector that should be mounted on your DUT interface And Table 5 38 lists the required parts to make the interlock circuit WARNING Potentially hazardous voltages may be present at the Force Guard and Sense terminals when the interlock terminals are shorted Figure 5 24 Interlock Connector Pin Assignments Table 5 38 Recommended Parts Keysight Part No Description ...

Page 196: ...e dimensions of the LED see Figure 5 25 4 Use wire to connect the two switches in series between pin number 1 and 2 or 3 of the interlock connector See Figure 5 24 5 Use wire to connect the LED between pin number 4 and 5 or 6 of the interlock connector See Figure 5 24 6 Attach the interlock connector to the mounting hole If Keysight B1505A Interlock connector is connected to the interlock circuit ...

Page 197: ...ceiving an electrical shock from high voltage more than 42 V If the interlock circuit is open the B1505A cannot apply high voltage more than 42 V Before performing measurement connect the 16493J interlock cable between the B1505A Interlock connector and the interlock connector which is a part of the interlock circuit installed in your DUT interface as described in Procedure on page 5 48 3 1 35 6 8...

Page 198: ...ble with one BNC m N1258A Low Force Sense N1254A 503 N1261A 002 Output Force Sense N1267A Low Force N1254A 524 Low Sense and Gate Triaxial cable with one HV plug N1261A 003 Output Force Sense N1254A 505 N1258A High Sense N1266A High N1268A High Sense N1254A 524 High Sense Coaxial cable with one HV plug N1258A High Force N1254A 506 N1267A High Force Triaxial cable with one Triaxial m N1261A 001 Out...

Page 199: ...lowing example connection can be used to reduce the leakage current Extend the outer conductor as close as possible to the probing needle This also reduces the induced noise WARNING Do not touch the guard terminal with bare hands because you may be shocked by high voltage The potential of the guard terminal is equal to the output voltage CAUTION Never connect the guard terminal to any other output...

Page 200: ... connect the outer conductor to the probing needle However the outer conductor should be extended as close as possible to the probing needle 3 Connect the outer conductor to the outer conductor of the probing needle if it is a coaxial probing needle 4 Perform 1 to 3 for both Force and Sense lines 5 Contact the probing needles for the Force and Sense lines as close as possible to the DUT Example Th...

Page 201: ...ontacts Force line NOTE Kelvin connection and non Kelvin connection To make the Kelvin connection use both Force and Sense terminals Connecting the Force and Sense lines together at the terminal of the DUT device under test minimizes the measurement error caused by the residual resistance of the connection cables The Kelvin connection is effective for the low resistance measurement and the high cu...

Page 202: ...5 54 Keysight B1505A Configuration and Connection Guide Connection Guide for Wafer Prober and Your Own Test Fixture About Cable Connections ...

Page 203: ...6 Accessory Dimensions ...

Page 204: ...k Adapter mounting hole in mm N1254A 521 UHV jack Adapter and SHV jack Adapter mounting hole in mm N1254A 524 Prober System Cable Prober side in mm N1258A Module Selector in mm N1260A High Voltage Bias T in mm N1261A 001 HPSMU Protection Adapter in mm N1261A 002 GNDU Protection Adapter in mm N1261A 003 HPSMU Protection Adapter HV Output in mm N1261A 004 GNDU Protection Adapter SHV Output in mm N12...

Page 205: ...pter SHV jack 80 W 40 H 125 D 0 3 N1262A 001 High voltage R box 1 M SHV jack 50 W 40 H 125 D 0 3 N1262A 002 High voltage R box 100 k SHV jack 50 W 40 H 125 D 0 3 N1262A 010 R box 1 k Triaxial f 50 W 40 H 125 D 0 3 N1262A 011 High voltage R box 1 k SHV jack 50 W 40 H 125 D 0 3 N1262A 020 Universal R box Triaxial f 50 W 40 H 125 D 0 3 N1262A 021 Universal R box SHV jack 50 W 40 H 125 D 0 3 N1262A 02...

Page 206: ...6 4 Keysight B1505A Configuration and Connection Guide Accessory Dimensions Figure 6 1 16493S 010 HCSMU Kelvin Adapter in mm 22 90 40 80 24 12 22 22 6 90 104 12 24 38 22 M3 4 ea 10 mm ...

Page 207: ...93S 011 HCSMU non Kelvin Adapter in mm Figure 6 3 16493S 020 Dual HCSMU Kelvin Combination Adapter in mm 90 40 80 24 12 66 6 90 104 12 24 38 22 M3 4 ea 10 mm M3 4 ea 10 mm 152 24 7 126 55 8 50 39 7 9 7 97 12 38 60 104 82 127 164 112 5 12 5 125 37 67 152 12 M3 4 ea 10 mm 24 7 39 7 9 7 132 32 ...

Page 208: ...or for Soldering mounting hole in mm Figure 6 6 N1254A 501 HV jack HV jack Adapter mounting hole in mm Figure 6 7 N1254A 521 UHV jack Adapter and SHV jack Adapter mounting hole in mm M3 4 ea 10 mm 97 18 2 10 59 53 2 45 2 6 2 7 41 63 104 50 60 92 12 M3 4 ea 10 mm 97 18 2 40 2 45 2 6 2 7 41 63 13 7 16 0 18 2 18 2 4 3 2 18 2 13 8 16 0 4 3 2 16 0 11 4 12 7 4 3 0 12 7 UHV SHV ...

Page 209: ...Keysight B1505A Configuration and Connection Guide 6 7 Accessory Dimensions Figure 6 8 N1254A 524 Prober System Cable Prober side in mm 120 80 80 20 100 10 5 8 56 2 ...

Page 210: ...6 8 Keysight B1505A Configuration and Connection Guide Accessory Dimensions Figure 6 9 N1258A Module Selector in mm 6 108 2 20 17 8 15 87 2 186 2 17 8 357 4 408 M3 5 ea 10 mm 330 2 372 4 ...

Page 211: ...ction Guide 6 9 Accessory Dimensions Figure 6 10 N1261A 001 HPSMU Protection Adapter in mm Figure 6 11 N1261A 002 GNDU Protection Adapter in mm 120 12 6 52 40 20 22 50 50 24 22 80 M3 4 ea 10 mm 110 12 6 52 40 20 50 50 24 22 80 M3 4 ea 10 mm ...

Page 212: ...ection Guide Accessory Dimensions Figure 6 12 N1261A 003 HPSMU Protection Adapter HV Output in mm Figure 6 13 N1261A 004 GNDU Protection Adapter SHV Output in mm 150 12 6 52 40 20 22 50 100 24 30 80 125 12 6 52 40 20 50 50 24 22 80 M3 4 ea 10 mm ...

Page 213: ...ion and Connection Guide 6 11 Accessory Dimensions Figure 6 14 N1260A High Voltage Bias T in mm Figure 6 15 N1262A 001 002 011 021 R Box HV SHV in mm 125 12 6 140 100 50 164 100 M3 4 ea 10 mm 30 9 95 19 9 110 90 19 9 50 6 34 30 ...

Page 214: ...A Configuration and Connection Guide Accessory Dimensions Figure 6 16 N1262A 010 020 R Box Triaxial Triax in mm Figure 6 17 N1262A 023 R Box UHV UHV in mm 19 9 110 90 19 9 50 6 34 30 160 27 50 82 214 97 29 7 5 8 115 30 60 ...

Page 215: ...nnection Guide 6 13 Accessory Dimensions Figure 6 18 N1267A HVSMU HCSMU Fast Switch in mm Figure 6 19 N1269A Ultra High Voltage Connection Adapter in mm 178 4 M3 30 178 4 M3 30 202 9 7 150 138 175 9 7 5 8 50 100 134 17 150 50 125 12 5 5 8 ...

Page 216: ... B1505A Configuration and Connection Guide Accessory Dimensions Figure 6 20 N1272A Device Capacitance Selector in mm 98 3 79 6 420 15 50 14 8 M5 39 9 34 9 19 4 27 4 25 34 63 93 148 198 223 253 279 301 7 25 25 25 565 ...

Page 217: ...ccessory Dimensions Figure 6 21 N1274A On Wafer Gate Charge Measurement Adapter Selector for 20 A 3 kV in mm 282 7 203 7 156 7 106 3 106 3 81 3 22 22 22 34 34 3 31 8 90 75 15 373 171 2 171 2 15 3 M4 250 300 36 5 330 2 40 1 56 55 4 31 8 283 9 180 1 128 1 22 22 ...

Page 218: ...505A Configuration and Connection Guide Accessory Dimensions Figure 6 22 N1275A On Wafer Gate Charge Measurement Adapter for N1265A in mm 47 2 22 116 4 44 100 33 75 24 15 5 8 52 46 2 20 7 70 2 22 22 24 2 80 10 18 2 80 ...

Page 219: ...7 Connection and Ordering Examples ...

Page 220: ...pse Dynamic On Resistance Measurement System using the N1267A Upgrading from existing B1505A NOTE Please view connection diagrams included in this Chapter in color because cables and connectors are color coded according to their types Figure 7 1 Legend Prober vender provides items surrounded by the doƩed yellow line g Mark DescripƟon UHV connector HVTRX connecter TRX connecter BNC connecter SHV co...

Page 221: ...P H50 or B1505AP H70 equivalent on page 7 8 3 kV 500 A or 1500 A YES 3 kV 500 A or 1500 A with Capacitance Measurement Configuration B1505AP H51 or B1505AP H71 equivalent on page 7 10 10 kV 500 A or 1500 A 10 kV 500 A or 1500 A Configuration B1505AP U50 or B1505AP U70 equivalent on page 7 12 3 kV 20 A YES Add High Resolution Measurement 10 fA resolution with MPSMU or HPSMU Capability to 3 kV 20 A ...

Page 222: ...urce Monitor Unit 3000 V 4 mA Pulsed DC B1514A FG 1 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC N1254A 1 Accessories for instruments and fixtures N1254A 104 1 Triax f to BNC m adapter N1259A 1 Test Fixture for Power Device N1259A 001 1 Test Fixture including Inline Package Socket Module and Cables N1259A 022 1 100 kohm R box for gate N1259A 030 1 1 kohm R box N1259A 300 1 Mod...

Page 223: ...mples Package Device Measurement Configuration Examples NOTE This configuration is equivalent to the B1505AP H20 3 kV 20 A Fixture Pack configuration N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter 1251 2277 1 Banana to BNC Adapter Model Option Quantity Description ...

Page 224: ...V DC B1520A FG 1 Multi Frequency Capacitance Measurement Unit Module N1254A 1 Accessories for instruments and fixtures N1254A 104 1 Triax f to BNC m adapter N1259A 1 Test Fixture for Power Device N1259A 001 1 Test Fixture including Inline Package Socket Module and Cables N1259A 020 1 High Voltage Bias Tee N1259A 022 1 100 kohm R box for gate N1259A 030 1 1 kohm R box N1254A 508 N1254A 509 Included...

Page 225: ...vice Measurement Configuration Examples NOTE This configuration is equivalent to the B1505AP H21 3 kV 20 A C V Fixture Pack configuration N1259A 300 1 Module Selector N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter 1251 2277 1 Banana to BNC Adapter Model Option Quantity Description ...

Page 226: ...der Fixture N1265A 010 1 500 A Ultra High Current 3 pin Inline Package Socket Module N1265A 015 1 1500 A Current Option This option needs to be ordered only when 1500 A capability is required N1254A 1 Accessories for instruments and fixtures N1254A 508 4 Banana to Banana Cable 250 mm red 1ea N1254A 509 4 Banana to Banana Cable 250 mm black 1ea N1254A 510 3 Dolphin Clip 2 ea red and black HVSMU GND...

Page 227: ... Measurement Configuration Examples NOTE This configuration is equivalent to the B1505AP H50 3 kV 500 A Fixture Pack or B1505AP H70 3 kV 1500 A Fixture Pack configuration N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter 1251 2277 1 Banana to BNC Adapter Model Option Quantity Description ...

Page 228: ... Unit 3000 V 4 mA Pulsed DC B1514A FG 3 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC B1520A FG 1 Multi Frequency Capacitance Measurement Unit Module N1260A 1 High Voltage Bias Tee N1260A STD 1 High Voltage Bias Tee N1265A 1 Ultra High Current Expander Fixture N1265A 001 1 Ultra High Current Expander Fixture N1265A 010 1 500 A Ultra High Current 3 pin Inline Package Socket Modu...

Page 229: ... Option This option needs to be ordered only when 1500 A capability is required N1254A 1 Accessories for instruments and fixtures N1254A 508 4 Banana to Banana Cable 250 mm red 1ea N1254A 509 4 Banana to Banana Cable 250 mm black 1ea N1254A 510 3 Dolphin Clip 2ea red and black N1254A 512 2 SHV Cable 250 mm N1254A 513 2 SHV Jack to Banana Adapter N1254A 518 2 SHV Cable 1 5 m N1262A 1 R box for B150...

Page 230: ...mA 30 V DC N1265A 1 Ultra High Current Expander Fixture N1265A 001 1 Ultra High Current Expander Fixture N1265A 010 1 500 A Ultra High Current 3 pin Inline Package Socket Module N1265A 015 1 1500 A Current Option This option needs to be ordered only when 1500 A capability is required N1265A 040 1 10 kV Ultra High Voltage Gate Protection Adapter N1268A 1 Ultra High Voltage Expander N1268 STD 1 Ultr...

Page 231: ...93V 1 10 kV Ultra High Voltage Cable 16493V 001 1 10 kV Ultra High Voltage Cable 1 5 m N1254A 1 Accessories for instruments and fixtures N1254A 508 4 Banana to Banana Cable 250 mm red 1ea N1254A 509 4 Banana to Banana Cable 250 mm black 1ea N1254A 510 3 Dolphin Clip 2ea red and black N1254A 520 1 10 kV Ultra High Voltage Open End Cable 1 m pair N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termina...

Page 232: ...t module 200 V 1A or Medium Power Source Monitor Unit module 100 V 100 mA B1512A FG 1 High Current Source Monitor Unit 20 A 20 V Pulsed 1 A 40 V DC B1513C FG 1 High Voltage Source Monitor Unit 3000 V 4 mA Pulsed DC N1259A 1 Test Fixture for Power Device N1259A 001 1 Test Fixture including Inline Package Socket Module and Cables N1259A 022 1 100 kohm R box for gate N1259A 030 1 1 kohm R box N1259A ...

Page 233: ...rement Configuration Examples N1254A 508 4 Banana to Banana Cable 250 mm red 1ea N1254A 509 4 Banana to Banana Cable 250 mm black 1ea N1254A 510 3 Dolphin Clip 2ea red and black N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter 1251 2277 1 Banana to BNC Adapter Model Option Quantity Description ...

Page 234: ...m Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC 16493L 1 Ground Unit Cable Triaxial 16493L 001 or 002 1 Ground Unit Cable Triaxial 1 5m or 3 0m 16493T 1 High Voltage Source Monitor Unit Cable 16493T 001 or 002 1 High Voltage Source Monitor Unit Cable 1 5m or 3 0m N1254A 1 Accessories for instruments and fixtures N1254A 104TRX J to BNC P adapter HVSMU HCSMU GNDU MCSMU MCSMU MCSMU N1266...

Page 235: ...est Fixture for Power Device N1259A 001 1 Test Fixture including Inline Package Socket Module and Cables N1259A 022 1 100 kohm R box for gate N1259A 030 1 1 kohm R box N1259A 300 1 Module Selector N1266A 1 High Voltage Source Monitor Unit Current Expander N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter 1251 2277 1 Banana to BNC Adapter Model Option Quantity Description ...

Page 236: ...n Figure 7 9 Connection example for 3 kV 30A automated measurement with Module Selector HCSMU Dual HCSMU CombinaƟon adapter 16493S 021 HVSMU HCSMU GNDU MCSMU B1505A 16493G 001 Digital I O cable Included in N1259A 300 HVSMU2 HCSMU2 F HCSMU2 S N1254A 104 TRX J to BNC P adapter 16493J Interlock cable includedinB1505A GNDU2 F S F S N1259A F S For Gate For Drain For Drain For Drain HCSMU3 F HCSMU3 S 16...

Page 237: ...or Unit 1 A 30 V Pulsed 100 mA 30 V DC 16493S 1 High Current Source Monitor Unit Cable 16493S 021 1 Dual HCSMU Combination Adapter N1254A 1 Accessories for instruments and fixtures N1254A 104 1 Triax f to BNC m adapter N1259A 1 Test Fixture for Power Device N1259A 001 1 Test Fixture including Inline Package Socket Module and Cables N1259A 022 1 100 k R box N1259A 030 1 1 k R box for gate N1259A 30...

Page 238: ...and Connection Guide Connection and Ordering Examples Package Device Measurement Configuration Examples N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter 1251 2277 1 Banana to BNC Adapter Model Option Quantity Description ...

Page 239: ...ed DC B1514A FG 4 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC N1265A 1 Ultra High Current Expander Fixture N1265A 001 1 Ultra High Current Expander Fixture N1265A 010 1 500 A Ultra High Current 3 pin Inline Package Socket Module N1254A 1 Accessories for instruments and fixtures N1254A 508 4 Banana to Banana Cable 250 mm red 1ea HVSMU GNDU MCSMU MCSMU MCSMU 16493J 001 Interloc...

Page 240: ...ples Package Device Measurement Configuration Examples N1254A 509 4 Banana to Banana Cable 250 mm black 1ea N1254A 510 4 Dolphin Clip 2 ea red and black N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter 1251 2277 1 Banana to BNC Adapter Model Option Quantity Description ...

Page 241: ...itor Unit 3000 V 4 mA Pulsed DC B1514A FG 6 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC 16493T 1 High Voltage Source Monitor Unit Cable 16493T 001 1 High Voltage Source Monitor Unit Cable 1 5 m 16493L 1 Ground Unit Cable N1266A HVSMU GNDU MCSMU MCSMU MCSMU B1505A MCSMU MCSMU GNDU Input Output Input HVSMU Output High Output Low F S F S F S Vcontrol F Vcontrol S Icontrol F Icon...

Page 242: ...Package Socket Module N1264A 040 1 10 kV Ultra High Voltage Gate Protection Adapter N1266A 1 High Voltage Source Monitor Unit Current Expander N1268A 1 Ultra High Voltage Expander N1268 STD 1 Ultra High Voltage Expander N1254A 1 Accessories for instruments and fixtures N1254A 508 4 Banana to Banana Cable 250 mm red 1ea N1254A 509 4 Banana to Banana Cable 250 mm black 1ea N1254A 510 3 Dolphin clip ...

Page 243: ...r Lateral Device on page 7 26 3 kV 20 A YES 3 kV 20 A Capacitance Measurement for On Wafer Lateral Device on page 7 30 3 kV 20 A YES Add High Resolution Measurement 10 fA resolution with MPSMU or HPSMU Capability to 3 kV 20 A Capacitance Measurement for On Wafer Lateral Device on page 7 33 3 kV 40 A 3 kV 40 A Measurement for On Wafer Lateral Device on page 7 35 3 kV 500 A 3 kV 500 A Measurement fo...

Page 244: ...d 1 A 40 V DC B1513C FG 1 High Voltage Source Monitor Unit 3000 V 4 mA Pulsed DC B1514A FG 1 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC 16493T 1 High Voltage Source Monitor Unit Cable 16493T 001 or 002 2 High Voltage Source Monitor Unit Cable 1 5 m 16493U 1 High Current BNC Coaxial Cable 16493U 001 2 High Current BNC Coaxial Cable 1 5 m 16494A 1 Triaxial Cable HVSMU HCSMU GN...

Page 245: ...e 16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter 16493S 020 1 Dual HCSMU Combination Adapter N1261A 1 Protection Adapter N1261A 003 1 Protection Adapter for High Power Source Monitor Unit HV Triaxial output N1262A 1 R box for B1505A N1262A 002 1 100 kohm R box N1262A 010 1 1 kohm R box for gate Triaxial output N1262A 036 1 50 Ohm Termination Adapter N1254A 1 Accessories for instr...

Page 246: ... 20 V Pulsed 1 A 40 V DC B1513C FG 1 High Voltage Source Monitor Unit 3000 V 4 mA Pulsed DC B1514A FG 1 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC 16493T 1 High Voltage Source Monitor Unit Cable 16493T 001 or 002 2 High Voltage Source Monitor Unit Cable 1 5 m 16493U 1 High Current BNC Coaxial Cable 16493U 001 2 High Current BNC Coaxial Cable 1 5 m HVSMU HCSMU GNDU MCSMU B150...

Page 247: ...Selector for B1505A 16493S 1 High Current Source Monitor Unit Cable 16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter N1261A 1 Protection Adapter N1261A 003 1 Protection Adapter for High Power Source Monitor Unit HV Triaxial output N1262A 1 R box for B1505A N1262A 010 1 1 kohm R box for gate Triaxial output N1262A 036 1 50 Ohm Termination Adapter N1254A 1 Accessories for instruments...

Page 248: ...ion example for IV measurement HVSMU HCSMU GNDU MCSMU B1505A 16493L Included in B1505A N1258A MPSMU ProtecƟon Adapter N1261A 003 Chuck D G S HCSMU Non Kelvin adapter 16493S 011 HF LF R Box 1kohm N1262A 010 For Gate For Drain For Drain 16493G 001 Digital I O cable Included in N1258A N1254A 104 TRX J to BNC P adapter F S F S F S HVSMU HCSMU F GNDU 16493J Interlock cable IncludedinB1505A For Chuck N1...

Page 249: ...odule 16493T 1 High Voltage Source Monitor Unit Cable 16493T 001 or 002 2 High Voltage Source Monitor Unit Cable 1 5 m 16493U 1 High Current BNC Coaxial Cable 16493U 001 2 High Current BNC Coaxial Cable 1 5 m 16494A 1 Triaxial Cable 16494A 003 1 Triaxial Cable 80 cm 1250 2405 1 BNC T Plug m BNC f BNC f adapter 1ea N1258A 1 Module Selector for B1505A N1260A 1 High Voltage Bias Tee HVSMU HCSMU GNDU ...

Page 250: ...16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter N1261A 1 Protection Adapter N1261A 003 1 Protection Adapter for High Power Source Monitor Unit HV Triaxial output N1262A 1 R box for B1505A N1262A 010 1 1 kohm R box for gate Triaxial output N1262A 036 1 50 Ohm Termination Adapter N1254A 1 Accessories for instruments and fixtures N1254A 104 2 Triax f to BNC m adapter N1256A 518 3 SHV...

Page 251: ... Medium Power Source Monitor Unit module 100 V 100 mA B1512A FG 1 High Current Source Monitor Unit 20 A 20 V Pulsed 1 A 40 V DC B1513C FG 1 High Voltage Source Monitor Unit 3000 V 4 mA Pulsed DC B1514A FG 1 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC 16493T 1 High Voltage Source Monitor Unit Cable HVSMU HCSMU GNDU MCSMU B1505A N1258A MPSMU ProtecƟon Adapter N1261A 003 Chuck D...

Page 252: ... Cable 80 cm 1250 2405 1 BNC T Plug m BNC f BNC f adapter 1ea N1258A 1 Module Selector for B1505A 16493S 1 High Current Source Monitor Unit Cable 16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter N1261A 1 Protection Adapter N1261A 003 1 Protection Adapter for High Power Source Monitor Unit HV Triaxial output N1262A 1 R box for B1505A N1262A 010 1 1 kohm R box for gate Triaxial outpu...

Page 253: ...or HCSMU Dual HCSMU CombinaƟon adapter 16493S 021 HVSMU HCSMU GNDU MCSMU B1505A N1258A MPSMU ProtecƟon Adapter N1261A 003 D G S HCSMU Non Kelvin adapter 16493S 011 HF LF R Box 1kohm N1262A 010 For Gate 16493G 001 Digital I O cable Included in N1258A N1254A 104 TRX J to BNC P adapter F S F S F S High F High S Low S Low F Digital I O HVSMU HCSMU F HCSMU S GNDU F S 16493J Interlock cable IncludedinB1...

Page 254: ...ulsed 100 mA 30 V DC 16493S 1 High Current Source Monitor Unit Cable 16493S 020 1 Dual HCSMU Combination Adapter This adapter is used when a N1258A Module Selector is not used 16493S 021 1 Dual HCSMU Combination Adapter This adapter is used with a N1258A Module Selector 16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter 16493T 1 High Voltage Source Monitor Unit Cable 16493T 001 or 00...

Page 255: ...cm 1250 2405 1 BNC T Plug m BNC f BNC f adapter 1ea N1258A 1 Module Selector for B1505A N1261A 1 Protection Adapter N1261A 003 1 Protection Adapter for High Power Source Monitor Unit HV Triaxial output N1262A 1 R box for B1505A N1262A 010 1 1 kohm R box for gate Triaxial output N1262A 002 1 100 kohm R box N1262A 036 1 50 Ohm Termination Adapter N1254A 1 Accessories for instruments and fixtures N12...

Page 256: ...sed 100 mA 30 V DC N1265A 1 Ultra High Current Expander Fixture N1265A 001 1 Ultra High Current Expander Fixture 16493S 1 High Current Source Monitor Unit Cable 16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter 16493U 1 High Current BNC Coaxial Cable 16493U 001 3 High Current BNC Coaxial Cable 1 5 m 1250 2405 1 BNC T plug m BNC f BNC f adapter 1ea D G S HVSMU GNDU MCSMU B1505A MCSMU...

Page 257: ...ion Examples for Lateral Device Measurement with Wafer Prober N1254A 1 Accessories for instruments and fixtures N1254A 524 1 Ultra High Current Prober System Cable N1254A 104 1 Triax f to BNC m adapter N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter Model Option Quantity Description ...

Page 258: ...g example Model Option Quantity Description B1505A 1 Power Device Analyzer Curve Tracer mainframe B1513C FG 1 High Voltage Source Monitor Unit 3000 V 4 mA Pulsed DC B1514A FG 4 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC B1520A FG 1 Multi Frequency Capacitance Measurement Unit Module 63 16494J Interlock Included in B1505A 16493G 001 Digital I O cable Included in N1265A D G S ...

Page 259: ... Current Source Monitor Unit non Kelvin Adapter 16493U 1 High Current BNC Coaxial Cable 16493U 001 3 High Current BNC Coaxial Cable 1 5 m 1250 2405 1 BNC T plug m BNC f BNC f adapter 1ea N1260A 1 High Voltage Bias Tee N1260A STD 1 High Voltage Bias Tee N1254A 1 Accessories for instruments and fixtures N1254A 524 1 Ultra High Current Prober System Cable N1254A 104 1 Triax f to BNC m adapter N1254A ...

Page 260: ...e Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC 16493T 1 High Voltage Source Monitor Unit Cable 16493T 001 or 002 1 High Voltage Source Monitor Unit Cable 1 5 m or 3 0 m 16493L 1 Ground Unit Cable D G S N1266A HVSMU GNDU MCSMU MCSMU MCSMU B1505A MCSMU MCSMU 16493J Interlock cable Included in B1505A GNDU Input Output Input HVSMU Output High Output Low F S F S F S Vcontrol F Vcontrol S Icontrol F Icon...

Page 261: ...ltage Source Monitor Unit Current Expander 16493S 1 High Current Source Monitor Unit Cable 16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter 16493U 1 High Current BNC Coaxial Cable 16493U 001 3 High Current BNC Coaxial Cable 1 5 m 1250 2405 1 BNC T plug m BNC f BNC f adapter 1ea N1254A 1 Accessories for instruments and fixtures N1254A 524 1 Ultra High Current Prober System Cable N12...

Page 262: ...sed 100 mA 30 V DC 16493V 1 10 kV Ultra High Voltage Cable 16493V 002 1 10 kV Ultra High Voltage Cable 3 0 m N1265A 1 Ultra High Current Expander Fixture N1265A 001 1 Ultra High Current Expander Fixture N1268A 1 Ultra High Voltage Expander D G S GNDU MCSMU B1505A MC MC 16493J Interlock cable Included in B1505A F S F S GNDU UHC Input V Control I Control For Gate HF LF HS LS Gate N1265A Gate Selecto...

Page 263: ...Prober N1268A STD 1 Ultra High Voltage Expander N1269A 1 Ultra High Voltage Connection Adapter N1254A 1 Accessories for instruments and fixtures N1254A 521 1 10 kV Ultra High Voltage Jack to Jack Adapter N1254A 524 1 Ultra High Current Prober System Cable N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter Model Option Quantity Description ...

Page 264: ...Vertical Device on page 7 47 3 kV 20 A YES 3 kV 20 A Capacitance Measurement for On Wafer Vertical Device on page 7 51 3 kV 20 A YES Add High Resolution Measurement 10 fA resolution with MPSMU or HPSMU Capability to 3 kV 20 A Capacitance Measurement for On Wafer Vertical Device on page 7 54 3 kV 40 A 3 kV 40 A Measurement for On Wafer Vertical Device on page 7 56 3 kV 500 A 3 kV 500 A Measurement ...

Page 265: ...lsed DC B1514A FG 1 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC 16493U 1 High Current BNC Coaxial Cable 16493U 001 2 High Current BNC Coaxial Cable 1 5 m 16494A 1 Triaxial Cable 16494A 003 1 Triaxial Cable 80 cm 1250 2405 1 BNC T Plug m BNC f BNC f adapter 1ea 16493S 1 High Current Source Monitor Unit Cable 16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter 1649...

Page 266: ...or Vertical Device Measurement with Wafer Prober N1262A 1 R box for B1505A N1262A 002 1 100 kohm R box N1262A 010 1 1 kohm R box for gate Triaxial output N1262A 036 1 50 Ohm Termination Adapter N1254A 1 Accessories for instruments and fixtures N1254A 104 2 Triax f to BNC m adapter Model Option Quantity Description ...

Page 267: ...DC 16493U 1 High Current BNC Coaxial Cable 16493U 001 2 High Current BNC Coaxial Cable 1 5 m 16494A 1 Triaxial Cable 16494A 003 1 Triaxial Cable 80 cm 1250 2405 1 BNC T Plug m BNC f BNC f adapter 1ea N1258A 1 Module Selector for B1505A 16493S 1 High Current Source Monitor Unit Cable 16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter N1262A 1 R box for B1505A N1262A 010 1 1 kohm R box...

Page 268: ...ction and Ordering Examples Configuration Examples for Vertical Device Measurement with Wafer Prober N1262A 036 1 50 Ohm Termination Adapter N1254A 1 Accessories for instruments and fixtures N1254A 104 2 Triax f to BNC m adapter Model Option Quantity Description ...

Page 269: ...gure 7 26 Connection example for IV measurement HVSMU HCSMU GNDU MCSMU B1505A 16493L Included in B1505A N1258A D Chuck G S HCSMU Non Kelvin adapter 16493S 011 HF LF For Gate For Drain For Drain 16493G 001 Digital I O cable Included in N1258A N1254A 104 TRX J to BNC P adapter F S F S HVSMU HCSMU F GNDU 16493JInterlockcable Includedin B1505A N1260A Bias T AC H AC L AC Guard Hc Hp Lc Lp MFCMU HCSMU S...

Page 270: ...nitor Unit 3000 V 4 mA Pulsed DC B1514A FG 1 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC B1520A FG 1 Multi Frequency Capacitance Measurement Unit Module 16493U 1 High Current BNC Coaxial Cable 16493U 001 2 High Current BNC Coaxial Cable 1 5 m 16494A 1 Triaxial Cable 16494A 003 1 Triaxial Cable 80 cm 1250 2405 1 BNC T Plug m BNC f BNC f adapter 1ea N1258A 1 Module Selector for...

Page 271: ... 16493S 1 High Current Source Monitor Unit Cable 16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter N1262A 1 R box for B1505A N1262A 010 1 1 kohm R box for gate Triaxial output N1262A 021 1 Universal R Box HV Triaxial to SHV N1262A 036 1 50 Ohm Termination Adapter N1254A 1 Accessories for instruments and fixtures N1254A 104 2 Triax f to BNC m adapter N1254A 518 3 SHV Cable 1 5 m Mode...

Page 272: ...meter automated measurement function Figure 7 28 Connection example NOTE Prober vendor is responsible for cabling inside the shielding box HVSMU HCSMU GNDU MCSMU B1505A N1258A G S HCSMU Non Kelvin adapter 16493S 011 For Gate 16493G 001 Digital I O cable Included in N1258A N1254A 104 TRX J to BNC P adapter F S F S High F High S Low S Low F Digital I O HVSMU HCSMU F HCSMU S GNDU 16493J 001 Interlock...

Page 273: ...ource Monitor Unit 3000 V 4 mA Pulsed DC B1514A FG 1 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC 16493U 1 High Current BNC Coaxial Cable 16493U 001 2 High Current BNC Coaxial Cable 1 5 m 16494A 1 Triaxial Cable 16494A 003 1 Triaxial Cable 80 cm 1250 2405 1 BNC T Plug m BNC f BNC f adapter 1ea N1258A 1 Module Selector for B1505A 16493S 1 High Current Source Monitor Unit Cable ...

Page 274: ...V 30A measurement with a N1258A Module Selector HCSMU Dual HCSMU CombinaƟon adapter 16493S 021 HVSMU HCSMU GNDU MCSMU B1505A N1258A G S HCSMU Non Kelvin adapter 16493S 011 HF LF R Box 1kohm N1262A 010 For Gate For Drain For Drain 16493G 001 Digital I O cable Included in N1258A N1254A 104 TRX J to BNC P adapter F S F S High F High S Low S Low F Digital I O HVSMU HCSMU F HCSMU S GNDU F S For Drain 1...

Page 275: ...V Pulsed 100 mA 30 V DC 16493S 1 High Current Source Monitor Unit Cable 16493S 020 1 Dual HCSMU Combination Adapter This adapter is used when a N1258A Module Selector is not used 16493S 021 1 Dual HCSMU Combination Adapter This adapter is used with a N1258A Module Selector 16493S 011 1 High Current Source Monitor Unit non Kelvin Adapter 16493U 1 High Current BNC Coaxial Cable 16493U 001 2 High Cur...

Page 276: ...rober 1250 2405 1 BNC T Plug m BNC f BNC f adapter 1ea N1258A 1 Module Selector for B1505A N1262A 1 R box for B1505A N1262A 010 1 1 kohm R box for gate Triaxial output N1262A 002 1 100 kohm R box N1262A 036 1 50 Ohm Termination Adapter N1254A 1 Accessories for instruments and fixtures N1254A 104 2 Triax f to BNC m adapter Model Option Quantity Description ...

Page 277: ...FG 1 High Voltage Source Monitor Unit 3000 V 4 mA Pulsed DC B1514A FG 3 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC N1265A 1 Ultra High Current Expander Fixture N1265A 001 1 Ultra High Current Expander Fixture N1254A 1 Accessories for instruments and fixtures N1254A 524 1 Ultra High Current Prober System Cable N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter ...

Page 278: ...In this configuration example a High Voltage Triaxial jack connector is used to connect the wafer chuck Then you need a adapter to connect the High Voltage Triaxial plug connector to the SHV connector Assemble it by using the N1262A 021 connector or consult your prober vendor 16494J Interlock cable Included in B1505A 16493G 001 Digital I O cable Included in N1266A G S HVSMU GNDU MCSMU B1505A MCSMU...

Page 279: ...B1514A FG 3 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC B1520A FG 1 Multi Frequency Capacitance Measurement Unit Module N1265A 1 Ultra High Current Expander Fixture N1265A 001 1 Ultra High Current Expander Fixture N1260A 1 High Voltage Bias Tee N1260A STD 1 High Voltage Bias Tee N1254A 1 Accessories for instruments and fixtures N1254A 518 3 SHV Cable 1 5 m N1254A 524 1 Ultra ...

Page 280: ...e Tracer mainframe B1513C FG 1 High Voltage Source Monitor Unit 3000 V 4 mA Pulsed DC B1514A FG 5 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC 16493T 1 High Voltage Source Monitor Unit Cable 16493T 001 or 002 1 High Voltage Source Monitor Unit Cable 1 5 m or 3 0 m 16493L 1 Ground Unit Cable S N1266A H VSM U GNDU M CSM U M CSM U M CSM U B1505A M CSM U M CSM U 16493J Interlock c...

Page 281: ... Unit Cable Triaxial 1 5 m or 3 0 m N1265A 1 Ultra High Current Expander Fixture N1265A 001 1 Ultra High Current Expander Fixture N1266A 1 High Voltage Source Monitor Unit Current Expander N1254A 1 Accessories for instruments and fixtures N1254A 524 1 Ultra High Current Prober System Cable N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter Model Option Quantity Description ...

Page 282: ...0 V Pulsed 100 mA 30 V DC 16493V 1 10 kV Ultra High Voltage Cable 16493V 002 1 10 kV Ultra High Voltage Cable 3 0 m N1265A 1 Ultra High Current Expander Fixture N1265A 001 1 Ultra High Current Expander Fixture N1268A 1 Ultra High Voltage Expander G S GNDU MCSMU B1505A MC MC F S F S GNDU UHC Input V Control I Control For Gate HF LF HS LS Gate N1265A Gate Selector High Low N1254A 524 16493G 001 Digi...

Page 283: ... Prober N1268A STD 1 Ultra High Voltage Expander N1269A 1 Ultra High Voltage Connection Adapter N1254A 1 Accessories for instruments and fixtures N1254A 521 1 10 kV Ultra High Voltage Jack to Jack Adapter N1254A 524 1 Ultra High Current Prober System Cable N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter Model Option Quantity Description ...

Page 284: ...e Source Monitor Unit 3000 V 4 mA Pulsed DC B1514A FG 2 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC N1267A 1 High Voltage Source Monitor Unit High Current Source Monitor Unit Fast Switch N1259A 1 Test Fixture for Power Device N1259A 001 1 Test Fixture including Inline Package Socket Module and Cables N1259A 022 1 100 kohm R box N1259A 030 1 1 kohm R box for gate N1259A 035 1 ...

Page 285: ...267A N1254A 1 Accessories for instruments and fixtures N1254A 507 1 HVSMU Coaxial Cable Assy 1 5 m N1254A 104 1 Triax m to BNC f adapter 16493U 1 High Current BNC Coaxial Cable 16493U 001 1 High Current BNC Coaxial Cable 1 5 m N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter 1251 2277 1 Adapter BNA BNC Jack Black Model Option Quantity Description ...

Page 286: ...FG 2 Medium Current Source Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC N1267A 1 High Voltage Source Monitor Unit High Current Source Monitor Unit Fast Switch N1259A 1 Test Fixture for Power Device N1259A 001 1 Test Fixture including Inline Package Socket Module and Cables N1259A 022 1 100 kohm R box N1259A 030 1 1 kohm R box for gate N1259A 035 1 Universal R Box N1259A 300 1 Module Selector N1267A...

Page 287: ...267A N1254A 1 Accessories for instruments and fixtures N1254A 507 1 HVSMU Coaxial Cable Assy 1 5 m N1254A 104 1 Triax m to BNC f adapter 16493U 1 High Current BNC Coaxial Cable 16493U 001 1 High Current BNC Coaxial Cable 1 5 m N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter 1251 2277 1 Adapter BNA BNC Jack Black Model Option Quantity Description ...

Page 288: ...Monitor Unit 1 A 30 V Pulsed 100 mA 30 V DC N1267A 1 High Voltage Source Monitor Unit High Current Source Monitor Unit Fast Switch 16493S 1 High Current Source Monitor Unit Cable 16493S 011 2 High Current Source Monitor Unit non Kelvin Adapter 8120 1838 3 BNC Cable 30 cm 1250 2405 2 BNC T Plug m BNC f BNC f adapter 1ea N1254A 1 Accessories for instruments and fixtures HVSMU HCSMU GNDU MCSMU MCSMU ...

Page 289: ... 71 Connection and Ordering Examples GaN Current Collapse Dynamic On Resistance Measurement System using the N1267A N1254A 104 2 Triax f to BNC m adapter N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter Model Option Quantity Description ...

Page 290: ...High Voltage Source Monitor Unit High Current Source Monitor Unit Fast Switch 16493S 1 High Current Source Monitor Unit Cable 16493S 011 2 High Current Source Monitor Unit non Kelvin Adapter 8120 1838 5 BNC Cable 30 cm 1250 2405 3 BNC T Plug m BNC f BNC f adapter 1ea N1254A 1 Accessories for instruments and fixtures N1254A 104 2 Triax f to BNC m adapter HVSMU HCSMU GNDU MCSMU MCSMU B1505A N1267A F...

Page 291: ...ering Examples GaN Current Collapse Dynamic On Resistance Measurement System using the N1267A N1262A 1 R box for B1505A N1262A 036 1 50 Ohm Termination Adapter N1261A 1 Protection Adapter N1261A 002 1 Protection Adapter Ground Unit BNC output Model Option Quantity Description ...

Page 292: ...ltage Expander V control SMU only In this case one N1254A 103 Triaxial m to BNC f adapter and N1254A 517 Triaxial f to Triaxial m adpter are required B1513A B HVSMU B1513A HVSMU cannot be used with N1267A HVSMU HCSMU Fast Switch unit It must be replaced to the B1513Bor later B1513A HVSMU cannot be used for gate charge measurement N1259A N1265A 014 N1274A orN1275A It must be replaced to the B1513B ...

Page 293: ...VSMU to B1513C HVSMU B1510A HPSMU to B1511B MPSMU B1510A HPSMU to B1514A MCSMU Step 4 Add a N1260A High Voltage Bias Tee for capacitance measurement up to 3 kV if necessary The N1265A Ultra High Current Expander Fixture does not have a Bias Tee option like the N1259A The N1260A High Voltage Bias Tee is necessary when making capacitance measurement up to 3 kV using a N1265A ...

Page 294: ...aximum current is 40 A NOTE The N1259A 020 High Voltage Bias Tee option cannot be re used Table 7 36 Ordering example Model Option Quantity Description B1505AU 1 Power Device Analyzer Curve Tracer mainframe B1505AU 014 2 Medium Current Source Monitor Unit B1514A 16494A 1 Triaxial Cable Exis ng B1505A HVSMU GNDU MFCMU HPSMU F S For Drain For Drain For Drain For Gate HPSMU F S HCSMU F S New B1505A F...

Page 295: ...1 1 Ultra High Current Expander Fixture N1265A 010 1 500 A Ultra High Current 3 pin Inline Package Socket Module N1265A 015 1 1500 A Current Option N1260A 1 High Voltage Bias Tee N1260A STD 1 High Voltage Bias Tee N1254A 1 Accessories for instruments and fixtures N1254A 512 2 SHV Cable 250 mm N1254A 513 2 SHV Jack to Banana Adapter N1254A 518 2 SHV Cable 1 5 m N1262A 1 R box for B1505A N1262A 036 ...

Page 296: ...7 78 Keysight B1505A Configuration and Connection Guide Connection and Ordering Examples Upgrading from existing B1505A ...

Page 297: ......

Page 298: ...This information is subject to change without notice Keysight Technologies 2009 2015 Edition 10 December 2015 B1505 90090 B1505 90090 www keysight com ...

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