Keysight Technologies B1505A, Configuration Manual

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Keysight B1505A Configuration and Connection Guide 5-23
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect Protection Adapter
To Connect Protection Adapter
Keysight N1261A protection adapter is used to protect GNDU or HP/MPSMU module
from high voltage. The N1261A should be installed near your DUT interface as shown in
Table 5-1 on page 5-5 .
The N1261A-001 is also used for the measurement using the N1265A test fixture. It must
be connected between the HP/MPSMU and the N1265A SMU input. Then use four
16494A triaxial cables for Kelvin connection or two 16494A cables for non-Kelvin
connection. Recommended cable length is 1.5 m. Ignore
Table 5-17 .
N1261A-001: HPSMU protection adapter, Triaxial(f)-Triaxial(f)
N1261A-002: GNDU protection adapter, Triaxial(f)-BNC(f)
N1261A-003: HPSMU protection adapter, Triaxial(f)-HV(jack)
N1261A-004: GNDU protection adapter, Triaxial(f)-SHV(jack)
Table 5-16 To Connect N1261A Input
NOTE For connecting HP/MPSMU, use either 16494A or 16493K. But the 16493K cannot be
used for connecting the N1265A.
B1505A terminals Required cables N1261A terminals
HPSMU
or
MPSMU
Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea., for the non-Kelvin
connection, connect it between the Force connectors.
For the Kelvin connection, prepare additional one more cable and
connect it between the Sense connectors. Or use 16493K Kelvin
triaxial cable instead of 16494A.
From
HPSMU
Force
Sense Sense
GNDU 16493L GNDU cable, 3 m or 1.5 m From GNDU
N 1 2 6 1 A
O p t 0 0 1
H P S M U P ro te c tio n A d a p te r
F o rc e
S e n s e
F ro m
H P S M U
O u tp u t
Guard
S e n s e /
F o rc e
C irc u it
C o m m o n
!
F o rc e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
S e n s e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
A g ile nt
In p u t
P e a k
㼼 3 k V = m a x
N 1 2 6 1 A
O p t 0 0 1
H P S M U P ro te c tio n A d a p te r
F o rc e
S e n s e
F ro m
H P S M U
O u tp u t
Guard
S e n s e /
F o rc e
C irc u it
C o m m o n
!
Guard
S e n s e /
F o rc e
C irc u it
C o m m o n
!!
F o rc e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
F o rc e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
㼼 2 0 0 V m a x
䞉䞉䞉䞉 䞉䞉䞉䞉
S e n s e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
S e n s e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
㼼 2 0 0 V m a x
䞉䞉䞉䞉 䞉䞉䞉䞉
A g ile nt
In p u t
P e a k
㼼 3 k V = m a x
N 1 2 6 1 A
O p t 0 0 2
G N D U P ro te c tio n A d a p te r
F ro m G N D U
O u tp u t
F o rc e
S e n s e
A g ile nt
Force
S e n s e
C irc u it
C o m m o n
S e n s e /
F o rc e
C irc u it
C o m m o n
㼼
4 0 V m a x
䞉䞉䞉
In p u t
P e a k 3 k V = m a x
N 1 2 6 1 A
O p t 0 0 2
G N D U P ro te c tio n A d a p te r
F ro m G N D U
O u tp u t
F o rc e
S e n s e
A g ile nt
Force
S e n s e
C irc u it
C o m m o n
Force
S e n s e
C irc u it
C o m m o n
S e n s e /
F o rc e
C irc u it
C o m m o n
S e n s e /
F o rc e
C irc u it
C o m m o n
㼼
4 0 V m a x
䞉䞉䞉
㼼
4 0 V m a x
䞉䞉䞉 䞉䞉䞉
In p u t
P e a k 3 k V = m a x