Keysight Technologies B1505A, Configuration Manual

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Keysight B1505A Configuration and Connection Guide 5-17
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect HCSMU Adapter
To Connect HCSMU Adapter
Keysight 16493S-010/011 HCSMU adapter is used to convert HCSMU connectors to
BNC(f) connectors. The 16493S-010/011 should be installed near your DUT interface as
shown in
Table 5-1 on page 5-5 .
16493S-010: Adapter for making the Kelvin connection of HCSMU path
16493S-011: Adapter for making the non-Kelvin connection of HCSMU path, available for
the low current path such as the MOSFET gate terminal
Connection examples for using one HCSMU module are shown in Figure 5-3 for the
Kelvin connection and in Figure 5-6 for the non-Kelvin connection. Also a connection
example for using two HCSMU modules is shown in Figure 5-7 .
NOTE
Do not connect or put any conductor on the HCSMU Low Force and Low Sense terminals,
outer conductor of the coaxial connectors. Connecting or putting conductor of circuit
common, chassis ground, or any potential on causes the measurement error.
Table 5-10 To Connect 16493S-010/011 Input
Table 5-11 To Connect 16493S-010/011 Output
B1505A terminals Required cables Input terminals
HCSMU
Force 16493S HCSMU cable, 3 m or 1.5 m
From
HCSMU
Force
Sense Sense
Output terminals Required cables/Description Connect to
Low Force Coaxial cable with BNC(m) connector. 16493U-001/002 or
N1254A-503 can be used.
Low terminals must be grounded by using the GNDU. If you want
to simplify the connection, connect the HCSMU adapter and the
GNDU adapter as shown in
Figure 5-4 . It can remove the path
from the GNDU adapter to the DUT interface.
DUT low terminal
(ex: source)
Low Sense
High Force DUT high terminal
(ex: drain)
High Sense
1 6 49 3 S
O p t 0 1 0
H C S M U K e lvin A d a p te r
F o rc e S e n s e
F rom H C S M U
O u tp u t
S ig n a l
C irc u it
C o m m o n
H ig h S e n s e
H ig h F o rc e
L o w S e n s e L o w F o rc e
A g ile nt
㼼 4 0 V m a x
䞉䞉䞉
1 6 49 3 S
O p t 0 1 0
H C S M U K e lvin A d a p te r
F o rc e S e n s e
F rom H C S M U
O u tp u t
S ig n a l
C irc u it
C o m m o n
S ig n a l
C irc u it
C o m m o n
H ig h S e n s e
H ig h F o rc e
L o w S e n s e L o w F o rc e
A g ile nt
㼼 4 0 V m a x
䞉䞉䞉
㼼 4 0 V m a x
䞉䞉䞉 䞉䞉䞉
1 6 49 3 S
O p t 0 1 1
H C S M U N o n -K e lv in A d a p te r
F o rc e S e n s e
F rom H C S M U
O u tp u t
S ig n a l
C irc u it
C o m m o n
H ig h F o rc e L o w F o rc e
A g ile nt
㼼 4 0 V m a x
䞉䞉䞉
1 6 49 3 S
O p t 0 1 1
H C S M U N o n -K e lv in A d a p te r
F o rc e S e n s e
F rom H C S M U
O u tp u t
S ig n a l
C irc u it
C o m m o n
S ig n a l
C irc u it
C o m m o n
H ig h F o rc e L o w F o rc e
A g ile nt
㼼 4 0 V m a x
䞉䞉䞉
㼼 4 0 V m a x
䞉䞉䞉 䞉䞉䞉