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Keysight B1505A Configuration and Connection Guide
5-19
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect HCSMU Adapter
The following connection example uses one HCSMU module and the 16493S-011 adapter
for making the non-Kelvin connection. In this example, the HCSMU Low is connected to
the GNDU Sense to simplify the connection. For more simplified non-Kelvin connection
of the GNDU, see
. This connection can save one manipulator. Also the GNDU
connection can be replaced with the connection shown in
if an extra
manipulator is available.
Figure 5-6
Typical Connection to Use One HCSMU, non-Kelvin connection
The following connection example uses two HCSMU modules. One is connected to the
MOSFET Drain by the Kelvin connection. And another one is connected to the Gate by the
non-Kelvin connection through the 1 k
R-box. The non-Kelvin connection is effective for
not-so-high current path such as the Gate. For the bipolar devices, the Kelvin connection
should be used for all terminals. For the measurements using both Kelvin and non-Kelvin
connections, the HCSMU Low Sense must be connected together. So the 16493S-011 Low
is connected to the 16493S-010 Low Sense in this example.
The simplified GNDU connection shown in
Figure 5-7
Connection Example to Use Two HCSMU Modules
Shielding box
B 1505A
DUT interface
16493S-011
Interlock circuit
16493L
*2: N1254A-503 or other cable, 3 ea.
Force
Low
High
Force
*3: N1254A-516, 1 ea. and 16493U-001, 2 ea.
*1: 1252-1419
*2
*1
*2
Sense
GNDU adapter (N1261A-002)
*3
16493J
16493S
Shielding box
B 1505A
DUT interface
16493S-010
16493S
16493L
Interlock circuit
Sense
Force
Low
High
Sense
Force
*2
*1
*2
*1: 1252-1419
*2: N1254A-503 or other cable, 5 ea.
*3: N1254A-516, 2 ea. and 16493U-001, 4 ea.
*4: N1254A-106, 1 ea. and 16493U-001, 1 ea.
*5: Triaxial cable with Triaxial(m) connector
*3
*2
16493S-011
High
Low
*3
*5
*4
N1262A-010
1 kohm R-box
Gate
Drain
Source
GNDU adapter (N1261A-002)
16493S
16493J
Summary of Contents for B1505A
Page 3: ......
Page 9: ...1 Configuration Guide ...
Page 83: ...2 N1259A Connection Guide ...
Page 107: ...3 N1265A Connection Guide ...
Page 133: ...4 N1272A and N1273A Connection Guide ...
Page 149: ...5 Connection Guide for Wafer Prober and Your Own Test Fixture ...
Page 203: ...6 Accessory Dimensions ...
Page 219: ...7 Connection and Ordering Examples ...
Page 297: ......