Keysight Technologies B1505A, Configuration Manual

Page: 172 / 298

5-24 Keysight B1505A Configuration and Connection Guide
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect Protection Adapter
Table 5-17 To Connect N1261A Output
Options Required cables/Description Connect to
N1261A-001
Force Triaxial cable with Triaxial(m) connector. DUT terminal
(ex: gate)
or
Prober chuck
Sense Triaxial cable with Triaxial(m) connector.
N1261A-003
Force Triaxial cable with HV(plug) connector. N1254A-505 can be used.
Also 16493T-001 and N1254A-500 can be used.
Sense Triaxial cable with HV(plug) connector. N1254A-505 can be used.
Also 16493T-001 and N1254A-500 can be used.
N1261A-002
1
1. For connecting HCSMU adapter, see "To Connect HCSMU Adapter" on page 5-17 .
Force Coaxial cable with BNC(m) connector. N1254A-503 can be used. DUT terminal
(ex: source)
Non-Kelvin
connection is
not allowed.
Sense Coaxial cable with BNC(m) connector. N1254A-503 can be used.
N1261A-004
Force Coaxial cable with SHV(plug) connector.
Sense Coaxial cable with SHV(plug) connector.
N 1 2 6 1 A
O p t 0 0 1
H P S M U P ro te c tio n A d a p te r
F o rc e
S e n s e
F ro m
H P S M U
O u tp u t
Guard
S e n s e /
F o rc e
C irc u it
C o m m o n
!
F o rc e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
S e n s e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
A g ile nt
In p u t
P e a k
㼼 3 k V = m a x
N 1 2 6 1 A
O p t 0 0 1
H P S M U P ro te c tio n A d a p te r
F o rc e
S e n s e
F ro m
H P S M U
O u tp u t
Guard
S e n s e /
F o rc e
C irc u it
C o m m o n
!
Guard
S e n s e /
F o rc e
C irc u it
C o m m o n
!!
F o rc e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
F o rc e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
㼼 2 0 0 V m a x
䞉䞉䞉䞉 䞉䞉䞉䞉
S e n s e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
S e n s e
㼼 2 0 0 V m a x
䞉䞉䞉䞉
㼼 2 0 0 V m a x
䞉䞉䞉䞉 䞉䞉䞉䞉
A g ile nt
In p u t
P e a k
㼼 3 k V = m a x
N 1 2 6 1 A
O p t 0 0 2
G N D U P ro te c tio n A d a p te r
F ro m G N D U O u tp u t
F o rc e
S e n s e
A g ile nt
Force
S e n s e
C irc u it
C o m m o n
S e n s e /
F o rc e
C irc u it
C o m m o n
㼼 4 0 V m a x
䞉䞉䞉
In p u t
P e a k 3 k V = m a x
N 1 2 6 1 A
O p t 0 0 2
G N D U P ro te c tio n A d a p te r
F ro m G N D U O u tp u t
F o rc e
S e n s e
A g ile nt
Force
S e n s e
C irc u it
C o m m o n
Force
S e n s e
C irc u it
C o m m o n
S e n s e /
F o rc e
C irc u it
C o m m o n
S e n s e /
F o rc e
C irc u it
C o m m o n
㼼 4 0 V m a x
䞉䞉䞉
㼼 4 0 V m a x
䞉䞉䞉 䞉䞉䞉
In p u t
P e a k 3 k V = m a x