G 0158 - Edition 07 - Januar
y 10
3/3
B 60
Connection to the pumping circuit
Closing plate
Facilities
on the top
Facilities
at the rear
Remove the closing plate, connect the cable to the electronic cabinet
and the plate equipped with a feedthrough, delivered with the cable.
Exhaustable enclosure
(required for SEMI
compatibility)
The enclosures have to be exhausted with a volumetric flowrate of
minimum:
– 36 m
3
/h for l’ADP 122
– 82 m
3
/h for l’ADS 602 - 1202 - 1802
The exhaust duct must resist to a static pressure of 0.04”w.g. (as
measured 2.0’ from the duct connection to the cabinet).
The size of the exhaust duct is 50 mm.
At the pump inlet
(cont’)
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two
