Adixen ADP 122 LM Operating Instructions Manual Download Page 27

Page: 27 / 142

2/2

A 60

Options

G 01042 - Edition 08 - Januar

y 10

Power failure

protection

This option protects the M4 monitoring system against power
failures for a delay less or equal to 1 second (in accordance with
SEMI F47 93 Standard).

Exhaustable enclosure

(Required for SEMI

compatibility)

(P and H versions)

Compatible with SEMI F15 93 standard.
Exhaustable connection of 50 mm diameter (length 28 mm)
optionnaly available.
Minimum volumetric flowrate of the equipment:

ADP 122 : 36 m

/h (21 cfm).

ADS 602 /1202/1802 : 82 m

/h (43 cfm).

SEMI S2 93

compatibility

ADP/ADS Series Two are in compliance with SEMI S2 93, only if
options:

main cable connected directly on the electrotechnic terminal
(hard wire connection, see

B 50

exhaustable enclosure,

are choosed in the ordering guide (certificate of compliance on
pages 3 and 4).

adixen Vacuum Products - Operating instructions - ADP/ADS Series Two

Summary of Contents for ADP 122 LM

Page 1: ...Operating instructions Operating instructions Translated from original version Translated from original version Betrieb Betrieb ADP ADS Series Two Multistage Roots dry pump EN EN ...

Page 2: ... Multi stage Roots technology Water cooled multi voltage motors Exhaust and utilities connections possible on top or at the rear of the pump adixen Network compatible Dear Customer you have just purchased an adixen dry pump We thank you and are proud to include you in our customers This product has benefited from adixen Vacuum Products many years of experience in semi conductor processes and dry p...

Page 3: ...whole or any part without prior written authorization from adixen Vacuum Products Specifications and information are subject to change without notice by adixen Vacuum Products This product complies with the requirements of European Directives listed in the Declaration of Conformity contained in sheet G100 of this manual These Directives are amended by Directive 93 68 E E C E C Marking adixen Vacuu...

Page 4: ...lation of exhaust heater accessory Chapter C OPERATION C 000 Safety recommendations for harsh processes C 010 Operating modes C 020 M4 monitoring system parameters C 040 Operating mode with hand held remote C 041 Start up of the M4 monitoring system C 042 M4 monitoring system function table C 043 Use of the M4 monitoring system for pumping operation C 044 Saving and remote loading of pump configur...

Page 5: ...n G 150 Frequency converter wiring for ADS 1202 G 151 Frequency converter wiring for for ADS 1802 G 200 Service Indicates an imminently hazardous situation that if not avoided will result in death or severe injury extreme situations Indicates a potentially hazardous situation which if not avoided could result in death or severe injury Indicates a potentially hazardous situation which if not avoide...

Page 6: ...DP ADS Series Two Detailed contents A A 010 Dry pump operational principle A 020 ADP ADS Series Two dry pump range A 030 M4 monitoring A 040 Technical characteristics A 050 Accessories A 060 Options adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 7: ...lute the process gas P and H versions by regulating the pump temperature and adjusting it to each process in order to limit gas condensation P and H versions Multi stage Roots principle The ADP pump consists of 5 Roots type stages The two rotors rotate without touching each other The three stages on the low pressure side are called LP stages and the two stages on the high pressure side are called ...

Page 8: ...sure side Tightness at motor side shaft passage The vacuum tightness is ensured by the motor design with built in jacket hermetically sealed This system provides total safety regarding leaks outside the pump and requires no maintenance 1 Built in jacket 2 Motor housing 3 Electrical rotor 1 2 3 Tightness at high pressure side The bearings are lubricated by oil splashing The oil sump is sealed from ...

Page 9: ...tted with an antisuckback valve in the exhaust tube that prevents the exhaust being sucked back The pump in a pumping installation Process chamber INLET PRESSURE ATMOSPHERIC PRESSURE Secondary pumping ADP pump HIGH VACUUM ROUGH VACUUM ATMOSPHERE adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 10: ...dry pump with a RSV 1802W Roots blower fitted to the inlet of the dry pump The A300 dry pump is a five stage Roots type pump similar to ADP 122 pump the RSV 1802W booster is a Roots blower type pump similar to RSV 1002P blower used in ADS 1202 P system They are available in two versions ADS 1802 P for medium processes in the semi conductor ADS 1802 H for harsh processes anti corrosive materials po...

Page 11: ...t view Display panel Emergency stop button Hand held remote control Water circuit Facilities at the rear Facilities on the top Exhaust Mains switch Remote control connector Configuration switch Coding wheel Hand held remote control connector RS 232 485 connector RS 485 connector Mains wire Facilities water gas Electrical interface panel J14 S1 S2 J4 J6 J7 adixen Vacuum Products Operating instructi...

Page 12: ...chematic ADS 602 P and H ADS 1202 P and H Principle schematic ADS 1802 P Entrée d eau Sortie d eau Refoulement M4 A300 Débitmètre d eau Aspiration Vanne d eau Clapet anti retour Silencieux Roots Tp Tc Tp Temperature sensor of pump alert and alarm Tc Temperature sensor of motor alert and alarm Water inlet Water outlet Exhaust Inlet Silencer Anti suckback valve Water valve Water flowmeter Water outl...

Page 13: ... Roots Tp Tc Entrée d eau Ta Principle schematic ADS 1802 H dual cooling Tp Temperature sensor of pump alert and alarm Tc Temperature sensor of motor alert and alarm Ta Auxiliary temperature sensor alert and alarm Water inlet Water outlet Exhaust Inlet Silencer Anti suckback valve Water valve Water flowmeter Auxiliairy water valve adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 14: ...r de pression Manomètre Débitmètre massique Injecteurs calibrés Entrée N2 3 4 5 2 1 Clapets anti retour A300 Aspiration Clapet anti retour Silencieux Roots P1 Principle schematic ADS 1802 P P1 Analog sensor alert alarm N2 inlet Exhaust Inlet Silencer Anti suckback valve Manometer Pressure regulator Mass flowmeter Stop valve Calibrated jets Inlet Anti suckback valves N2 inlet Exhaust Manometer Pres...

Page 15: ...mergency stop button It allows to exchange data with the hand held remote control and ensures the interface with the supervision network M4 monitoring can be interfaced with the main production equipment Hand held remote control It ensures Man Machine interface It can be used either from the front or the rear of the pump and allows the access at all operation parameters Red indicator light fault Y...

Page 16: ... monitoring Pump s temperature monitoring and control Thermostatic control of the pump temperature and water flow P and H versions Exhaust pressure monitoring Maintenance time control Supervision Network Remote control connector OEM interface Mains Emergency stop output Roots motor ADP motor Actuators valves Sensors Alternative connection Hand held remote control Power box Electrical cabinet Elect...

Page 17: ...essure 50 60 Hz kW 1 3 1 5 1 8 2 0 3 0 3 2 3 5 Maximum continuous inlet pressure mbar 50 10 5 3 torr 37 7 5 3 7 2 25 Maximum exhaust overpressure mbar 1200 torr 900 N2 flowrate range 2 slm 0 to 60 P version 0 to 120 H version 20 to 70 P 0 to 120 H Water flow l mn min 1 min 1 min 1 3 min 5 Rotation speed functionnal block rpm 3000 to 3600 6000 Gear boxes Dry pump 3 fluid capacity Roots 0 35 0 35 0 ...

Page 18: ...ADS 1802 H ADS 1802 P Environmental conditions Use of the product Altitude Ambient operating temperature Maximum relative humidity Transient overvoltage Pollution degree indoor use up to 2000m 5 to 40 C 41 to 104 F 80 for temp up to 31 C 87 F decreasing linearly to 50 at 40 C 104 F category II rate 2 adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 19: ...5 33 1 840 3 62 92 5 83 148 ADS 1202 39 3 997 1 14 29 10 3 260 35 1 891 1 62 41 15 4 390 38 8 986 37 7 958 2 95 75 9 45 240 ADS 1802 39 2 995 1 06 27 10 4 263 35 1 891 1 62 41 15 4 390 38 8 986 37 8 959 2 95 75 9 45 240 K L M N O P Q R S T ADP 122 8 8 223 26 5 674 28 6 727 0 1 12 28 10 6 269 2 87 73 3 70 94 3 23 82 16 5 419 ADS 602 8 8 223 21 2 539 23 3 592 0 0 79 20 5 28 134 2 87 73 4 25 108 3 23...

Page 20: ...83 28 7 728 1 54 39 15 4 390 22 8 580 22 0 560 3 62 92 5 83 148 ADS 602 32 8 832 1 03 26 3 27 83 28 7 728 1 54 39 15 4 390 34 4 875 33 1 840 3 62 92 5 83 148 K L M N O P Q R S T ADP 122 8 8 223 26 5 674 0 71 18 6 61 168 1 12 28 10 6 269 4 41 112 8 66 220 6 61 168 6 54 166 ADS 602 8 8 223 21 2 539 6 02 153 6 61 168 1 12 28 5 28 134 4 41 112 3 45 85 6 61 168 1 22 31 Dimensions in inch mm Front view ...

Page 21: ...D 50 DaN Load 72 DaN Load 52 DaN Section S S Metal feet screwed clamp Thickness 5mm Material Stainless steel 4 screws H M12 80 S S 390 75 75 ø70 35 41 728 240 395 450 220 350 65 65 ø 1 4 120 120 Section S S Load 116 DaN Load 77 DaN Load 111 DaN Load 74 DaN Global center of gravity Weight Distribution Metal feet screwed clamp Thickness 5mm Material Stainless steel 4 screws H M12 80 ADS 602 P ADS 60...

Page 22: ...l feet screwed clamp Thickness 5mm Material Stainless steel 4 screws H M12 80 ADS 1202 1802 Isometric views and location of the antiseismic protection devices continued Load by foot DaN ADS 1202 ADS 1802 P1 116 137 P2 157 132 P3 99 118 P4 134 113 Center of gravity inch mm ADS 1202 ADS 1802 X 8 07 205 8 19 208 Y 21 3 540 21 7 552 Z 16 5 420 19 5 495 adixen Vacuum Products Operating instructions ADP...

Page 23: ...hen the pump is switched off It also isolates the running pump from the process Hand held remote control A second hand held remote control can be connected on the pump a longer cable can also be used Auto valve 24 VAC P N Cable for electropneumatic valve 3 5m P N Stainless steel DN 50 ISO KF 30501E 106532 DN 63 ISO F 30502E DN 100 ISO F 30503E P N Control box alone 110942 Control box cable 1 5m 11...

Page 24: ...09 A459803 ADS 1202 200 240 V A459804 380 480 V A459805 ADS 1802 200 240 V 110866 380 480 V 110867 Heater on new exhaust pipe Interface boards OEM Remote control This device ensures direct interface between M4 monitoring and the main production equipment contact the manufacturer s service center Fitting accessories Several fitting accessories are available in the maufacturer s catalog fitting ring...

Page 25: ...creased this offer with two new types of interfaces The two most represented fieldbus in the Semiconductor industry are Lonworks and DeviceNet These interfaces are available for all Series Two pumps except ADP 122 L Lonworks interface is used to interface the dry pump with every Lam 2300 tool It means that this interface should be ordered for every installation on Lam 2300 tools It completly repla...

Page 26: ...ted when the pump is ordered Facilities P and LM versions without ADS 1202 and ADS 1802 The different facilities connections water N2 power supply and the exhaust can be fitted on the top or at the rear of the pump For H version ADS 1202 and ADS 1802 facilities are always at the rear of the pump Inlet Exhaust Top of the pump Rear of the pump Exhaust Facilities water gas Mains power supply Faciliti...

Page 27: ...d Exhaustable connection of 50 mm diameter length 28 mm optionnaly available Minimum volumetric flowrate of the equipment ADP 122 36 m3 h 21 cfm ADS 602 1202 1802 82 m3 h 43 cfm SEMI S2 93 compatibility ADP ADS Series Two are in compliance with SEMI S2 93 only if options main cable connected directly on the electrotechnic terminal hard wire connection see B 50 exhaustable enclosure are choosed in ...

Page 28: ... B 030 Connection to the cooling circuit B 040 Inert gas purge connection N2 plug B 050 Electrical connection B 051 Checking the direction of rotation at initial pump start up B 060 Connection to the pumping circuit B 070 J14 Remote control plug connection B 100 Emergency stop plug connection B 110 RS 232 or RS 485 link wiring B 130 Installation of exhaust heater accessory adixen Vacuum Products O...

Page 29: ...Our products are designed to comply with current EEC regulations Any modification of the product made by the user is liable to lead non compliance with the regulations or even to put into doubt the EMC ElectroMagnetic Compatibility performance and the safety of the product The manufacturer declines any responsability for such operations The EMC perfomance of the product is obtained on the conditio...

Page 30: ...f pyrophoric materials above the LEL are sent to the pump then nitrogen should be supplied at a rate to ensure that concentration is diluted to be below the LEL in addition an interlock should be provided to ensure that gas flow to the pump is stopped when nitrogen is lost If loss of cooling water creates a significant risk then the water flow must be monitored externally by the process equipment ...

Page 31: ...nd user needs to provide a dedicated source of water and Nitrogen equipped with a manual valves that can be locked out within 10 feet of the tool HOT SURFACE Contact may cause burn Do not touch or wear protective gear before servicing WARNING The user and or OEM are ultimately responsible for operating the equipment in a safe manner The manufacturer has no control over the types of gases exposed t...

Page 32: ...put in a safe condition When a fault occurs the cause must be corrected before the fault can be cleared To clear the fault it is required to switch power off main switch to 0 position before opening the electrical box and unlock the circuit breakers Decontamination product dismantling According to the regulations 2002 96 CE about Waste of electrical and electronical equipments and 2002 95 CE about...

Page 33: ...g aids and proper lifting techniques when removing or replacing Located on the upper covers this label indicates that some of the internal parts are energized and could cause electrical shocks in case of contact It advizes to disconnect the pump before any intervention or to properly lock out and tag out the equipment breaker before any intervention on the pump WARNING HAZARDOUS VOLTAGE ENCLOSED V...

Page 34: ...al packages from the crate and set aside Unpacking Packaging dimensions and weight Tolerance 20 mm Pump Dim inch mm Weight lbs kg A B C ADP 122 45 3 1150 31 1 790 24 8 630 606 275 ADS 602 61 0 1550 42 1 1070 24 8 630 903 410 ADS 1202 61 0 1550 46 9 1190 24 8 630 1244 565 ADS 1802 61 0 1550 46 9 1190 24 8 630 1267 530 Risk of tilting Even when compliance with EEC safety rules is guaranted normal ra...

Page 35: ...nnector 1 8 NPT 1 funnel 1 EMO connecting plug P N 106587 1 remote control connecting plug P N 107222 1 electrical connector ADS 1202 1 instruction manual 5 x 0 4 liter oil filling 3 hoisting rings 2 water quick connectors 1 4 NPT 1 N2 quick connector 1 8 NPT 1 funnel 1 EMO connecting plug P N 106587 1 remote control connecting plug P N 107222 1 electrical connector ADS 1802 1 instruction manual 4...

Page 36: ...h should not be removed until the pump is ready to be used Hook Hoisting ring Equipment storage It is highly recommended that a hoist is used for lifting Fit the hoisting rings delivered in the crate in separate packaging in the appropriate holes With a hoist and a sling with three arms lift the pump using hoisting rings Pump Weight lbs kg ADP 122 535 243 ADS 602 833 378 ADS 1202 1170 531 ADS 1802...

Page 37: ...in a corrosive atmosphere their reliability will depend on proper installation and maintenance When assembling the vacuum circuit we recommend the installation of maintenance accessories such as shut off valves on the inlet and purge lines For safety reasons use accessories on the inlet and exhaust lines whose materials and sealing properties are compatible with the gases being used The pump must ...

Page 38: ...eration for the other side cover Remove pump covers Remove the flanging components ADS 602 version 1 2 3 5 4 4 Remove the two assembling screws from the flanging plate and the claw clamps using a17 mm flat wrench Unscrew the screws maintaining the plate on the clamping bar Remove the hoisting rings and disassemble the clamping bar Re install the hoisting rings to lift the pump Note Keep the flangi...

Page 39: ...ct the manufacturer or your service agent before making any changes A113 medical safety data sheet is available upon request Oil quantities Oil filling Housing Dry pump Roots housing gears side Roots housing motor side Oil capacity Nber of can 0 4 l ADP 122 0 35 L 0 35 L x 1 ADS 602 0 35 L 0 45 L 0 25 L 1 05 L x 3 ADS 1202 0 35 L 1 00 L 0 55 L 1 90 L x 5 ADS 1802 0 15 L 1 00 L 0 55 L 1 65 L x 4 A3...

Page 40: ...ble tube delivered with the pump Filling of the Roots gears side housing Remove the grid located on the top cover to access to the fill plug easier Remove the fill plug 1 Position the funnel in the oil fill neck Fill the pump with oil according to the recommended quantities Do not exceed the indicated quantities The oil level should be in the middle of the sight glass 2 For this to be accurate wai...

Page 41: ... to the recommended quantities The oil level should be in the middle of the sight glass 5 Do not exceed the indicated quantities Replace the fill plug securely On ADS 1802 the A300 dry pump is delivered with filled oil charge Do not modify the oil level This is done during pump overhaul by the manufacturer s trained personnel adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 42: ... pressure inlet outlet 2 103 hPa 3 103 hPa ADS 1802 Water flow see A 40 1 The oxidising action of the chlorine depends on the pH aggressiveness of the water The chlorine content must be within the coloured area on the graph opposite 2 Subject to pump temperature setting The use of uncontrolled city water can lead to water circuit clogging due to limestone deposition which may necessitate in the wo...

Page 43: ...e two quick connect connectors packaged separately on the self sealing quick connect connectors Connect the water pipes to the quick connect connectors Water inlet marked IN 1 4 inch NPT quick female connector Water outlet marked OUT 1 4 inch NPT quick male connector ALCATEL supply Adaptator NPT BSPP Facilities on the top Facilities at the rear 1 4 NPT 1 4 BSPP 1 4 NPT 1 4 BSPP Water cooling quick...

Page 44: ...5 ppb Pressure between 3 and 7 absolute bar 43 100 psi Flowrate per pump see A 40 Connection 4 mm 6 mm 1 8 NPT 1 8 NPT Pipe 6 35 mm OD 1 4 inch tubing supplied by the customer Separately packaged Facilities on the top Facilities at the rear A sudden inrush of N2 into the pressurization circuit may result in damage to internal parts Close the pressure regulator by turning the knob counter clockwise...

Page 45: ...e adjusted with the pressure regulator according to the process see A40 A mass flowmeter located behind the front panel allows flow reading on the hand held remote module N2 flowrate adjustment Flowmeter panel Pressure regulator Manometer adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 46: ...pport Service Main circuit breaker rating recommended values Consump tion Breaker rating 200 230V 50 60 Hz 380 480V 50 60 Hz Full power consumption Circuit breaker ratting Full power consumption Circuit breaker ratting ADP 122 9 A 15 A 5 A 10 A ADS 602 19 A 25 A 11 A 15 A ADS 1202 25 A 35 A 17 A 25 A ADS 1802 32 A 40 A 17 A 25 A The pump is equipped with a 10 000 AIC main breaker Electrical shock ...

Page 47: ... specifications AWG 12 or 2 5 mm2 for ADP 122 AWG 10 or 4 mm2 for ADS 602 ADS 1202 ADS 1802 Facilities on the top Female plug 6 contacts Earth Facilities at the rear 6 Earth W V U Not used 3 2 1 5 4 Main cable Motor rotation is defined by main power connection Uncorrect wiring may cause backwards pump rotating Check rotation sense at first start up see B 51 Check that the cable is correctly protec...

Page 48: ...r I1 I1 Feedthrough connection on top Feedthrough connection at the rear Open the electrical cabinet Pass the cable through one of the feedthrough provided for this purpose An IEC 417 5017 symbol is located inside electrical cabinet near the ground wire connection terminal adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 49: ... mm2 for ADS 602 1202 ADS 1802 cable customer supply Connect the ground to the separate terminal bar Motor rotation is defined by main power connection Uncorrect wiring may cause backwards pump rotating Check rotation sense at first start up see B 51 Check that the cable is correctly protected against ground defects and that earth wire is longer than the three conducting wires adixen Vacuum Produc...

Page 50: ...intake and exhaust holes these components prevent foreign bodies from entering the pump during transport and storage It is dangerous to leave them on a pump in operation Before using the monitoring check that the mechanical and electrical connections defined in the chapter B have been made Connect the cover plugs J1 J14 In local mode the pump will run only if the cover plugs delivered with the pum...

Page 51: ...e control connection the monitoring identifies the pump Initialize the system by pressing on ENTER Because it is the first connection it is necessary to take the pump control via the CONTROL key a star appears on the left side of the display Sectionneur général Présence secteur ENTER SET WATER CONTROL AUX START PURGE STOP ROOTS 1H LOC ROOTS PUMPING STOPPED 05 07 06 15 40 ALCATEL AVT F MONITORING X...

Page 52: ...itch terminal or refer to B 50 for hardwired connections Check the direction of rotation at initial pump start up At the initial start up provide protection against the risk of crushing related to the rotating parts in the inlet A non powered Roots can be driven by another pump in rotation risk of crushing Always connect the pump inlet port before starting the pump When the main electrical switch ...

Page 53: ...OTS on DISABLED see C 43 connect the pump to the pumping line see B 60 and if the pump has to be remote controlled proceed to specific wiring instructions B 70 In order to prevent foreign bodies from entering the pump while waiting to be installed replace blank off flanges on inlet and exhaust ports again When the pump is switched off internal parts monitoring frequency converter contain capacitor...

Page 54: ...compatible with pumped gases and leak tested after the reassembly is completed It is recommended to be able to isolate the pump from the vacuum and exhaust line particularly if you pump on corrosive gases inlet and exhaust isolation valves purges Several fitting accessories are available in the manufacturer s catalog Make sure the direction of rotation has been checked see B 51 When the pump is co...

Page 55: ... see B 70 DN 50 ISO KF for ADP 122 DN 100 ISO K for ADS 602 ADS 1202 ADS 1802 Connection Exhaust of corrosive reactive flammable pyrophoric or oxidizing process gases may result in severe injury or death Always connect the pump exhaust of the P and H versions to an exhaust extraction system Ensure that all components in the exhaust pipeline have a maximum pressure rating which is greater than the ...

Page 56: ...ivered with the cable Exhaustable enclosure required for SEMI compatibility The enclosures have to be exhausted with a volumetric flowrate of minimum 36 m3 h for l ADP 122 82 m3 h for l ADS 602 1202 1802 The exhaust duct must resist to a static pressure of 0 04 w g as measured 2 0 from the duct connection to the cabinet The size of the exhaust duct is 50 mm At the pump inlet cont adixen Vacuum Pro...

Page 57: ...an be used to control automatic functions J 14 Male Sub D 50 pin connector Dry contact outputs are rated 50 V 1 A max Overvoltage and overcurrent can cause internal electrical damages Monitor external contacts voltage below 50 V and current below 1 A When units containing control circuits are equipped with dry contact outputs it is the responsability of the customer to use these outputs in complia...

Page 58: ... contacts inputs J 14 J 14 These inputs are considerated to be activated when a DC voltage between 5 and 30V is applied Inputs can be used by pins 47 48 OV and pins 49 50 12V in order to be controlled by external contacts of the customer equipment Wiring customer supplied 5 to 30 VDC Wiring customer supplied 17 1 50 34 47 18 19 20 21 22 23 24 25 27 29 31 33 0V S1 S2 S3 12V 26 28 30 S4 S5 S6 S7 adi...

Page 59: ...urge Stops This function is only valid when remote control mode is validated with contact S1 open and when PURGE CMD selection is validated in DEFINITION menu of hand held remote control S5 26 27 N2 stand purge valve Start Stop Contact closed N2 stand purge starts after a time set time programmed by RS232 see C 90 Contact open N2 stand purge stops This function is only valid when remote control mo...

Page 60: ... to function independently in local mode or remote control mode Control contacts inputs continued Available dry contacts 50V 1A Available outputs These contacts open in the presence of a fault normally closed Contact Function 1 34 Pump fail pump running valve opened no alert 2 3 Alert presence 4 5 Alarm presence Unit stoppage 6 7 Maintenance alert 8 9 Pump running correct purge and inlet valve ope...

Page 61: ...r plug delivered with the pump is fitted on J1 connector When the emergency stop is interfaced if the remote mode is not used it is necessary to connect the cover plug J14 AMP connector Wiring viewed under soldered side Cover plug When units containing control circuits are equipped with dry contact outputs it is the responsability of the customer to use these outputs in compliance with extra low v...

Page 62: ...er allows to control the equipment emergency stop from the pump emergency stop button Contact Function 1 4 This contact opens when emergency stop is activated Contact opened emergency stop command is activated Control contacts input Available output Emergency stop state Contact Function 2 3 Contact opened emergency stop command is activated adixen Vacuum Products Operating instructions ADP ADS Ser...

Page 63: ...fied through the M4 corresponding menu see C 42 The commands and messages reception syntax is available on chapter C 90 1 2 3 4 5 GND Masse V RS485 TD Transmission Data RS 232 Reception Data RS 232 RD V RS485 6 7 8 9 9 pin male DB connector Connector wiring RS 485 J7 1 5 4 3 2 6 7 8 9 V RS 485 V RS 485 5 V GND Ground Resistors are built in in electronic cabinet Pin 7 8 and 9 of J7 are internally a...

Page 64: ...will only be lost on the pump that is disconnected 9 8 9 8 J6 9 8 9 8 J7 J6 9 8 7 6 9 8 J7 RS 485 communication box 5 4 3 2 1 9 pin male DB Conn J6 9 pin female DB Conn J7 9 pin male DB Conn J6 9 8 J6 9 8 J6 9 8 7 6 9 8 J7 RS 485 communication box 5 4 3 2 1 1 5 9 6 1 9 6 5 RS232 link with single monitoring system M4 J6 M4 End of the line wiring 9 8 7 6 5 4 3 2 1 9 8 7 6 5 4 3 2 1 adixen Vacuum Pro...

Page 65: ...dous voltage enclosed Voltage or current hazard sufficient to cause shock Disconnect and lockout power before servicing Any intervention must be done by trained personnel only When the pump is switched off internal parts monitoring frequency converter contain capacitors charged with over 60 VDC and remain energized Electrical shock may result in severe injury Wait 1 minute after switching off befo...

Page 66: ...he ond washer 22 Remove the valve the spring and the o rings 10 17 Unscrew the banjo screw and the two assembling screws from the pressure regulator panel Remove the silencer by unscrewing and removing the 2 screws 7 and washers Facilities on top pipe monoblock 10 Facilities on top exhaust straight up Remove the seal Remove the front cover and the two side covers Access to the exhaust pipe cont 23...

Page 67: ... straight up and bent 10 13 17 Fit the pipe 10 on the pump exhaust and secure the 2 screws or the 2 nuts 7 For facilities on top fit the centering ring the quick connect clamp the flowmeter panel and the banjo screw If the exhaust pipe is equipped with a pressure sensor refit it Reassembly of the equipped exhaust pipe 3 4 Install the heater devices on the exhaust pipes Install the exhaust pipe in ...

Page 68: ... silencer removal without disconnecting the exhaust heater check form and length of the electric cables Connect the heating belt electrical cable in parallel on RT3 one cable per each feed through Reassemble the pump covers on the pump frame Electrical connection for the exhaust heater I1 Main switch RT1 ADP protection RT2 ROOTS protection CB1 RT3 Transformer protection Heating protection Electrot...

Page 69: ...ng system C 042 M4 monitoring system function table C 043 Use of the M4 monitoring system for pumping operation C 044 Saving and remote loading of pump configuration M4 monitoring C 045 M4 monitoring setting for transport C 050 Water flowrate on ADS 602 P and H versions C 060 Use of the option Power failure protection C 070 Use of the Inlet isolation valve accessory C 090 Use of the serial link M4...

Page 70: ...ss chamber flush the pump using a dry inert gas such as Nitrogen through the inlet port during 30 minutes Stop inert gas supply and let the pump running at ultimate pressure for 5 minutes Stop the pump and close inlet port with the appropriate blank off flange If the pump is equipped with a monitoring system configure N2 prolonged option in the menu and set it on 30 minutes then perform a cycle st...

Page 71: ...olent air inrush Explosion consequences An explosion either in vacuum line or pump or exhaust line is a complex chemical reaction An explosion can also generate a leak which will generate a second explosion Another important point is that vacuum pumps are also compressors Depending on pressure in volume to evacuate pressure in different pump s stages can be much greater than Atmosphere Consequentl...

Page 72: ...e differential pressure is too high meaning that only a soft pumping valve can be used to evacuate the chamber from atmosphere To use an efficient flow restriction i e soft pumping for chamber evacuating from Atmosphere down to 60mbar In order to avoid cloud formation within flammable range of common species 3 To stop Roots blowers interlocked when chamber pressure is higher than safety level of 6...

Page 73: ... control modes Local mode According to the monitoring configuration and wiring the pump can be locally controlled by the hand held remote control remote controlled by serial link remote controlled using dry contacts via J 14 connector Two switches have to be configurated the first at the back of hand held remote control and the second S1 located on electrical interface see A 20 Use of single hand ...

Page 74: ...S232 Local mode LOC RS232 Hand Held Display Module Remote controlled operating modes Remote control via J 14 Dry contacts Pump alone The pump is monitored by the equipment in which it is installed such as an automated pumping system or an industrial equipment The pump is remote controlled by dry contacts wired on J 14 connector or direct voltage see70 The hand held remote control keyboard is inhib...

Page 75: ...g an alert followed by an alarm as soon as the power is greater than each of its thresholds the pump is immediately stopped when alarm threshold is exceeded Pressure sensor Signals exhaust overpressure when the pressure reaches 1450 mbar exhaust pipe clogging and stops the pump at 1990 mbar E Analogic sensor Allows the monitoring of voltage 0 10V or an input contact with two adjustable thresholds ...

Page 76: ...led Auxiliary temperature C 0 170 20 140 disabled Auxiliary temperature Roots temperature on ADS 602 P and ADS 602 H C 0 170 20 140 Auxiliary temperature Temperature control on ADS 1802 H C 70 100 85 120 Summary table of monitoring parameters Max and min thresholds Sensor location At the pump start up the monitoring operation will depend on the programing done at the factory However the monitoring...

Page 77: ...oring system M4 monitoring system function table Use of the M4 monitoring system for pumping operation Saving and loading of pump configuration with M4 M4 monitoring setting for transport C 41 C 41 C 42 C 42 C 43 C 43 C 44 C 44 C 45 C 45 adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 78: ...n key Means that the hand held remote is controlling the pump when a star appears on the display Parameter setting mode access key Press to access the parameter setting mode Press to exit the various menus without validating the functions Selection keys Press to move to the next or the previous menu the next or the previous parameter in the displayed menu Press to select or adjust the value of the...

Page 79: ...tion allows the pump to run see C 30 If parameters have to be customized by the user it is necessary to gain access to the program The programing made at the factory is protected by an access code which disables parameter modification Press the SET key Valid the code with ENTER 0 factory configuration Access code and parameters can be customized see C 42 1H LOC ROOTS PUMPING STOPPED 13 10 06 15 39...

Page 80: ...y or Validate with ENTER key Update the needed parameters an validate Return to the main menu by pressing SET successively Reset the clock at the initial start up To ensure correct fault monitoring and customized parameters it is necessary to initialize time and date of the machine DEFINITION SETTING MAINTENANCE MANAGEMENT SERIAL LINK DATE TIME TEMPERATURE UNIT PRESSURE UNIT DAY MONTH YEAR HOUR DE...

Page 81: ...e entry of new parameters Press the key SET Valid the code with ENTER Access code can be customized factory configuration 0 see page 6 Parameters can be transferred from one pump to another This can be done in case of a pump replacement or for new pump installation see C 44 ENTER SET WATER CONTROL AUX START PURGE STOP ROOTS ENTER PASSWORD CODE 0 Pump configuration adixen Vacuum Products Operating ...

Page 82: ...nput using a customer supplied sensor closed when switched off This input stays DISABLED if parameter LL PUMP OPTION is enabled 1 DISABLED LOG 2 INPUT ENABLED DISABLED Allows retrieving logic data on LOG 2 input using a customer supplied sensor closed when switched off This input stays DISABLED if ADS 1202 ADS 1802 system is selected DISABLED LOG 3 INPUT ENABLED DISABLED Allows retrieving logic da...

Page 83: ...ABLED REG AUX T OPT 3 ENABLED DISABLED Auxiliary dual temperature regulation sensor on functionnal block presence validation DISABLED AUX T OPTION 3 ENABLED DISABLED Auxiliary temperature sensor presence validation DISABLED LL PUMP OPT 1 ENABLED DISABLED Allows ADP 122L pump monitoring by displaying operating status DISABLED BACKUP POWER OPTION ENABLED DISABLED Power failure protection option pres...

Page 84: ... POWER SENSOR WARNING threshold 500 to 4000W 2500 ALARM threshold Warning threshold to 5000W 4000 ANALOG INPUT 4 WARNING threshold 0 V to Alarm threshold 4000 ALARM threshold Warning threshold to 9950 mV 8000 LOG1 SENSOR 4 WARNING time 0 to 60 mn DISABLED DISABLED ALARM time 0 to 60 mn DISABLED DISABLED LOG2 SENSOR 4 WARNING time 0 to 60 mn DISABLED DISABLED ALARM time 0 to 60 mn DISABLED DISABLED...

Page 85: ...h 0 ROOTS MAINT 0 to 65500 h 0 LOAD LOCK MAINT 1 0 to 65500 h 0 INSPECT EXHAUST 0 to 65500 h 0 TOTALE MAINT WARNING 1000 to 34000 h 17000 PARTIAL MAINT WARNING 1000 to 34000 h 8500 ROOTS MAINT WARNING 1000 to 34000 h 17000 LL MAINT WARNING 1 1000 to 34000 h 17000 EXHAUST WARNING 1000 to 34000 h 8500 1 For no standard configuration SET ENTER ENTER adixen Vacuum Products Operating instructions ADP A...

Page 86: ... One Time Programmable Display Flash version STORAGE ENABLED DISABLED DISABLED CONFIG SAVE Save a pump configuration in the hand held remote control memory CONFIG LOAD Allows to record the configuration from hand held remote control to monitoring system memory OPERATING TIME Displays the operating times of the various components LAST WARNINGS Displays the 10 last warnings recorded LAST ALARMS Disp...

Page 87: ... pump is running When the purge gas is selected the message N2 is displayed on the hand held remote module Note in some process it can be necessary to stop the gas purge during pumping set the CMD PURGE on ENABLED and the S2 coding wheel to 1 position This setting concerns also the LM versions According to the selected operating mode check the position of the S1 switches on the electrical interfac...

Page 88: ...ring system triggers the warning phase followed by the hazard phase The period of time for these phases can be set indicator lights on the front panel and buzzer sounded if option selected indicator lights on display panel the fault contacts on the remote connector J14 at the rear of the monitoring unit are closed pumping is stopped when an hazard threshold or a time is reached A list of incidents...

Page 89: ...ility of the user to take all the measures required to prevent risks resulting from this type of operation When the STOP IN PROGRESS message appears on the display don t intervene on the pump risk of injury by contact with hot surfaces Wait for the PUMPING STOPPED message before intervening on the pump Auto restart configuration In standart configuration factory configuration when there is a loss ...

Page 90: ...sible from the other hand held remote controls as long as the first one has not given the control back To give the control again press on the CONTROL key of the hand held remote control until the star has disappeared Reading of data and parameters can be done on both hand held remote controls even if they do not control the pump If the message NOT ALLOWED appears after an action of any key check t...

Page 91: ...AGEMENT menu and valid by ENTER Go on using to access the CONFIG SAVE menu and valid by ENTER The pump configuration is then duplicate into the hand held remote control memory Return to main menu and exit the setting mode by SET Disconnect the hand held remote control Configuration saving DEFINITION SETTING MAINTENANCE MANAGEMENT STORAGE CONFIG SAVE CONFIG LOAD OPERATING TIME Loading and saving th...

Page 92: ...selecting the CONFIG LOAD menu from MANAGEMENT menu The former configuration is automatically reset All pump parameters are loaded remotely except the options which have to be locally configurated according to the pump language buzzer serial link date and time temperature unit pressure unit Loading parameters may result in creating software conflicts After loading configure manually the following ...

Page 93: ...NTER The pump start up is now not possible second counter is blocked Note At switching on STORAGE mode is automatically deleted Date and Time reset is only necessary operating mode blocked during storage see C 41 Setting of storage mode for transports and prolonged storage DEFINITION SETTING MAINTENANCE MANAGEMENT STOCK 150H PUMPING STOPPED 01 09 06 13H56 adixen Vacuum Products Operating instructi...

Page 94: ...ext page When the Roots is not cooled Depending on the process it is not necessary to cool the Roots In this case invert the valve opening position from a half turn and adjust the threshold according to the table next page Roots Water inlet Water outlet Inlet 3 way manual valve Temperature sensor Schematic principle Manual valve in position Roots cooled To gearbox water cooling input Water flow di...

Page 95: ...on ADS 602 P ADS 602 H Roots cooling Yes No Warning low 20 C 60 C Warning high 70 C 100 C Typical value measured on Roots body 40 50 C 80 90 C Maximum pressure in continuous operation 10 mbar 3 mbar If the operating pressure is higher the Roots must be cooled adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 96: ...s displayed on the hand held remote control but the state of output contacts don t change on the remote control connector Two cases can arise If the pump is running when the failure occurs it will restart automatically and goes back to initial operation After this time a message D09 power supply is created as the pump is no longer powered this message will be displayed once the mains supply will b...

Page 97: ...mote control mode For the valve operating mode as described below contact S1 must be closed see B 70 and contact S7 open see B 70 If the STOP button on the hand held remote control is pressed or if the pump is stopped due to an alarm the valve is closed and the pump stops as soon as the valve end stop sensor is triggered or after 3 seconds If the START button on the hand held remote control is pre...

Page 98: ...is stopped or running press the ENTER button on the hand held remote control to confirm the operation Note In either local or remote control mode When the pump stops normally or due to an alarm the valve is closed and the pump stops as soon as the valve end stop sensor is triggered or after 3 seconds When the pump is started the valve opens 3 seconds after the pump starts The valve open control me...

Page 99: ...the serial link is as follows Type RS 232 ECHO ENABLED Transmission SPEED 9600 bauds Parity NO 2 Stop bits DISABLED Address 0 Setting Observations Action Observations Display Observations Access to the parameter programming by the Serial link 1 menu Access to the parameter to modify DEFINITION MENU SETTING MAINTENANCE MANAGEMENT SERIAL LINK 1 CAPTEUR PURGE ALERTE PURGE REGUL T ADP TYPE RS 232 ECHO...

Page 100: ...OO ON R 000 ERR2 The control ADDress of unit varies from 000 to 999 Message end character ASCII code 13 The character LF is not taken account by the unit The response Heading character A D D O R D P A R CR ORDer sent see list Associated PARameter see list A D D R E S P O N S E CR adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 101: ...14 Date setting Day 15 Date setting Month 16 Date setting Year 17 Time setting Hour 18 Time setting Minute 19 Free 20 Set 0 ADP T alarm 1 21 Reserved 22 E3 logic input Y 0 Alert concerns parameters 1 Alarm XX 00 01 02 03 04 05 22 ZZZZ Threshold value see page 5 6 SEP val see folio 5 6 OK or ERR3 Used to change the separator character between 2 consecutive data items in a response Input its ASCII v...

Page 102: ... 6 5 4 3 2 1 reserved Bit 0 0 local mode Bit 0 1 remote mode 16 separator character 17 20 pressure mbar 21 separator character 22 25 power W 26 separator character 27 29 ADP temperature C 30 separator characterr 31 33 reserved C 34 separator character 35 37 auxiliary temperature C 38 separator character 39 42 analog input mV 43 separator character 44 45 MFS max 99 slm 46 separator character 47 pre...

Page 103: ...racter comma Command 000STA CR Response 000 00000 2 0080 2530 0127 1230 0000000000 CR Only commands requiring the separator character are affected by the SEP order Example Table for mini maxi parameter thresholds Parameter Unit Thresholds Mini Maxi Limit Mass flowmeter slm 0 60 P version 120 H version ADP pump temperature sensor C 70 130 or 140 ADS 1802 Moter power sensor W 500 5000 E analogic sen...

Page 104: ... header character Order Paramater Response Action HDR val val decimalv alue of the ASCII code of the header character between 001 and127 OK or ERR3 Change the header character in front of a response address Note The factory configuration is the decimal code 035 of the character The code 020 corresponds to no header character Customer selection is memorized by the monitoring The value 047 the decim...

Page 105: ...related to maintenance D 010 First level of maintenance D 030 Diagnosis and troubleshooting D 400 Pump or Roots does not start D 500 The pump is running and then is showing a warning or fault message D 600 The pump is running but the performances are not correct adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 106: ...this label warns the user against possible risk of injury due to any hand contact with hot surfaces It states that protective gloves should be used before performing any intervention HOT SURFACE Contact may cause burn Do not touch or wear protective gear before servicing WARNING Located on the upper covers this label indicates that some of the internal parts are energized and could cause electrica...

Page 107: ...p or due to a fault if a maintained level of purge gas has been programmed Otherwise proceed as follows If the pump is remote controlled remove the connections on J14 and J1 connectors at the rear of the pump and connect the cover plug connectors supplied with the machine instead Adjust the parameter PURGE FLOW PROLONGED for a period of 10 minutes and program the PURGE COMMAND on ENABLED Press STA...

Page 108: ...oil change required on site This is done during the pump overhaul by the manufacturer s trained personnel When a problem occurs the user is informed by the relevant fault indicator light which is located on the front panel yellow lit in case of warning red lit in case of fault followed by a pump stop or not depending on setting parameters see C 42 the audible buzzer warning if preselected the faul...

Page 109: ...cs protection CB2 Electronic links W1 ADP power measurement KM1 ADP command KM2 ROOTS command Electronics protection CB3 Breaker rating Pump Voltage RT1 RT2 1 RT3 CB1 ADP 122 ADS 602 B T 200 à 230 V 50 60 Hz 10 A 10 A 1 A 1 A H T 380 à 480 V 50 60 Hz 6 A 6 A 0 7 A 0 7 A ADS 1202 B T 200 à 230 V 50 60 Hz 10 A 18 A 1 A 1 A H T 380 à 480 V 50 60 Hz 6 A 13 A 0 7 A 0 7 A ADS 1802 B T 200 à 230 V 50 60 ...

Page 110: ...control connector RS 232 485 connector RS 485 connector J14 S1 S2 J4 J6 J7 J9 Therm ADP Stby valve Water valve Water flow Motor temp Massflow sensor PT 100 AUX temp LO2 Dual cooling Inlet valve Purge valve LI4 NC J13 R P Roots pump control LL Pump ADP Temp Check Press NC NC not connected LO1 Ana input J8 Logic inputs J11 J12 J10 LI1 LI3 LI2 Parameters and displays of logic inputs are worded LOG1 L...

Page 111: ...nce light indicator does not switch on hand held remote control display is not lighting up display is showing a message or an alarm The pump is running and a message numbered is showing D 500 The pump is running but the performances are not correct D 600 adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 112: ... stop engaged Rotate to unlock the emergency stop on the front panel display CB1 breaker switched off Check the amperage setting see D 10 Switch it on CB2 breaker switched off Switch it on see D 10 Other problem Call customer service center Incident Cause Troubleshooting Hand held remote control display is not lighting up but the mains presence green light indicator is on CB3 breaker switched off ...

Page 113: ...s on CONTROL to disable the monitoring on other remote controls Press on CONTROL on the requested remote control to monitor the group Wait for the display Other problem Call customer service center Message on display Pump in storage mode Set the main switch to 0 to switch off the pump Switch it on again Message on display In Remote mode No cover plug or bad connection Check the wiring of J14 conne...

Page 114: ...ut ROOTS message on the display Roots LED off Check the presence or connection of RP plug located on electronic inside cabinet J12 see D 10 Other problem Call customer service center Display is showing other messages see D 500 for trouble shooting ROOTS ROOTS W01 D01 EXHAUST PRESSURE W01 D01 EXHAUST PRESSURE W09 D09 POWER SUPPLY W09 D09 POWER SUPPLY D34 BREAKER D34 BREAKER D35 EM STOP ADP CONT D35...

Page 115: ...pt 06 LOGIC INPUT 2 3 opt opt 07 SPEED CONTROL 3 x 08 WATER FLOW 4 x x 09 POWER SUPPLY 4 x x 10 MOTOR TEMP 4 opt 11 INLET VALVE 5 opt opt 12 LOGIC INPUT 3 3 x x 13 N2 FLOW 5 x x 15 ADP TEMP HIGH 6 x 16 ADP TEMP LOW 6 opt 18 LOAD LOCK PUMP 6 x 19 SYS 1 D10 x 20 SYS 2 opt 28 LOAD LOCK MAINT 6 opt 29 ROOTS MAINT 7 x 30 EXHAUST MAINT 7 x 31 ADP LP MAINT 7 x 32 ADP MAINT 7 x 34 EM STOP ADP CONT 7 x 35 ...

Page 116: ...Check that the measured temperature corresponds to the display y Check the thresholds ADS 1802 T Set temperature 15 C or T fault threshold y Check that the measured temperature corresponds to the display y Check the thresholds Incorrect connection displayed temp 170 C y Check that the sensor is wired between pins 17 and 18 of AUX TEMP connector y Remake the connection see D 10 Other problem Call c...

Page 117: ...or option is not used Incorrect monitoring configuration y Check that SYSTEM SELECT menu is properly configurated Warning Roots does not run at nominal speed Mechanical problem y Check the exhaust line Other problem Call customer service center Warning Roots does not run Motor problem Call customer service center Fault ADS 1802 only Incorrect monitoring configuration y Check that SYSTEM SELECT men...

Page 118: ... See Warning Water flow W08 Sensor problem y Check the sensor connection on Mot temp connector seeD 10 Other problem Call customer service center Fault Soft 1 03 No motor temperature cable connected y In case of ADS 602 check that a cover plug or a cable is connected on LI4 logic input see D 10 y Check the sensor connection on Mot temp connector see D 10 Motor temperature is 150 C y See Warning Wa...

Page 119: ...e is of 10 C to the temperature control setting value Temperature control valve supply problem y Check the temperature control valve connection on Therm ADP connector see D 10 Cooling problem y See Warning Water flow W08 Other problem Call customer service center Fault Pump temperature is between Set temperature 15 C and Set temperature 10 C but the display is 0 or 170 C or Pump temperature is low...

Page 120: ...hed y Check maintenance thresholds Call customer service center Warning The maintenance threshold of a parameter is reached y Check maintenance thresholds Call customer service center Warning Warning The maintenance threshold of a parameter is reached y Check maintenance thresholds Call customer service center Warning The maintenance threshold of a parameter is reached y Check maintenance threshol...

Page 121: ... Switch RT2 on Other problem Call customer service center Fault RT1 breaker switched off y Check RT1 setting see D 10 y Switch RT1 on y Check the exhaut line Other problem Call customer service center Fault KM2 contactor not closed y Check CB2 see D 10 y Check that there is a strap between pins 2 and 3 of emergency stop terminal see B 100 y Check the emergency stop switch J1 Other problem Call cus...

Page 122: ...Maintenance ADP Call customer service Mechanical noise Damaged ball bearing y Maintenance ADP Call customer service Rotors seizing y Maintenance ADP Call customer service Unsynchronized gears y Maintenance ADP Call customer service No N2 purge Incorrect configuration y Reset M4 configuration PURGE CMD enabled or set the purge manually PURGE key on hand held remote control adixen Vacuum Products Op...

Page 123: ... 010 ADP ADS Exchange standard repair E 011 Preliminary precautions E 012 Draining of the water cooling circuit E 013 Saving of the pump configuration E 014 Disconnecting the pump from the installation E 015 Conditionning the pump for shipping adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 124: ...d below The key steps must be followed in chronological order Preliminary precautions E 011 Draining of the water cooling circuit E 012 Saving of the pump configuration E 013 Disconnecting the pump from the installation E 014 Shipping procedure for contaminated pumps E 015 Safety questionnaire G 200 Installing a new pump B 000 to B130 Remote loading of pump configuration C 44 adixen Vacuum Product...

Page 125: ...ich could cause severe injury or death Ask your safety department for instructions according to the local statements Users are advised To stop the pump according to shutdown procedure for discontinuous operation safety instructions see COO To use gloves protective goggles and if required for the gases in question a breathing mask To ensure that the premises are well ventilated Not to dispose of re...

Page 126: ...ng so valves are opened Prepare a flexible pipe A with a 1 4 inch quick male connector to be connected to compressed air circuit and another flexible pipe B with a 1 4 inch female connector Disconnect inlet and outlet water fittings on the pump Connect pipe B on the pump at location OUT and place the other end of the pipe in a vessel total water volume will be grater than one litre Connect pipe A ...

Page 127: ... the water has been completely evacuated or check whether there is any water in the flowmeter Press STOP and confirm by pressing ENTER Enter monitoring again to set THERM ADP OPTION to VALID When the water is filled out quickly stop the pump and disconnect pipes A and B This operation must be performed quickly because without any water cooling the pump will overheat after a few minutes and will be...

Page 128: ...NT menu and valid by ENTER Go on using to access the CONFIG SAVE menu and valid by ENTER The pump configuration is then duplicate into the hand held remote control memory Return to main menu and exit the setting mode by SET Disconnect the hand held remote control Configuration saving DEFINITION SETTING MAINTENANCE MANAGEMENT STORAGE CONFIG SAVE CONFIG LOAD OPERATING TIME Loading and saving the par...

Page 129: ...xhaust which could cause severe injury or death Ask your safety department for instructions according to the local statements When the main electrical switch on the top of the pump is set to 0 the part supply between the power plug and the main switch remains energized Risk of electrical shock in case of contact Disconnect main electrical cable before servicing Hazardous voltage enclosed Voltage o...

Page 130: ...with the original pump Disconnect the pump from the pumping piping and fit a protector on the inlet Disconnect the pump exhaust and fit a protector on the exhaust Raise the four legs and the anti vibration pads if fitted Remove the pump from the installation Inlet Exhaust Facilities on the top Facilities at the rear Exhaust Facilities water gas Mains wire Facilities water gas Mains switch Electric...

Page 131: ...0467 Equipped centering ring 087168 068349 Quick connect clamp 303003 Double claw clamps set of 4 303056 1 8 gas connector 082981 082981 Accessory DN 40 IS0 KF Blank off flange 068197 Equipped centering ring 068230 Releasable clamp 303002 Refer to the preliminary precautions before intervene on the product see E 14 Pressurizing the pump Block the inlet port with the flanges supplied Connect the ni...

Page 132: ...he clamping bar Re install the hoisting rings and screw them Install the flanging plate position the assembling screws on the clamping bar without blocking them Position the flanging plate on the pump inlet and secure the claw clamps Then secure all the assembling screws adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 133: ...cate ADP ADS electrical schematic P LM H models G 110 with option power failure protection ADP ADS electrical schematic P LM H models G 120 without option power failure protection G 150 Frequency converter wiring for ADS 1202 G 151 Frequency converter wiring for ADS 1802 G 200 Service adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 134: ...G 01045 Edition 05 January 10 1 1 G 100 adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 135: ...G 04342 Edition 01 January 10 1 2 G 101 Semi certificate adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 136: ...2 2 G 101 Semi certificat G 04342 Edition 01 January 10 adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 137: ...4V 0V X2 X1 ORANGE YELLOW 1 2 CB3 V1 ORANGE KM1 RT1 13 14 14 13 50 50 53 1 2 3 4 63 62 61 60 P2 COMMAND 7 8 12 11 9 10 TB1 1 3 5 1 2 3 MAIN OPTION MAIN PLUG TR1 CB2 J1 EMO 2 1 PURPLE GREY PURPLE 51 52 4 1 2 3 66 66 52 5 6 7 8 64 65 13 14 P5 P SUPPLY RS 232 485 J15 1 3 J P9 REMOTE RS 485 J14 J7 J6 LOGIC SENSORS J10 J12 ELECTRONIC CABINET VALVES ANALOGIC SENSORS J11 FRONT PANEL DISPLAY REMOTE CONTRO...

Page 138: ...4 9 8 10 11 43 41 59 24V 0V X2 X1 ORANGE YELLOW 1 2 CB3 V1 ORANGE KM1 RT1 13 14 14 13 50 50 53 1 2 3 4 63 62 61 60 P2 COMMAND 7 8 12 11 9 10 TB1 1 3 5 1 2 3 MAIN OPTION MAIN PLUG TR1 CB2 J1 EMO 2 1 PURPLE GREY PURPLE 51 52 4 1 2 3 66 66 52 5 6 7 8 64 65 13 14 P5 P SUPPLY RS 232 485 J15 1 3 J P9 REMOTE RS 485 J14 J7 J6 LOGIC SENSORS J10 J12 ELECTRONIC CABINET VALVES ANALOGIC SENSORS J11 FRONT PANEL...

Page 139: ...6 12 ADP MOTOR ADP MOTOR TEMP RT1 PE L 1 L 2 L 3 PE L1 2 4 6 L2 L3 FILTER RT2 7 8 RP 4 5 6 3 ANA INPUT Alarm Alarm ROOTS MOTOR PE U V W PE R S T OUT detection frequency P2 INPUT multispeed ref 1 S5 ON VAR S1 IN fault S3 GND SC PC AC AM Common OUT MC OUT MA CONVERTER 3G3MV adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 140: ...ult S3 GND SC Common OUT MC OUT MA 12 ADP MOTOR ADP MOTOR TEMP CONVERTER 3G3MV FILTER RT1 PE L 1 L 2 L 3 PE L1 2 4 6 L2 L3 FILTER RT2 7 8 RP 4 5 6 3 ANA INPUT 3 Alarm Alert 2 1 ROOTS MOTOR PE U V W PE R S T OUT detection frequency P2 INPUT multispeed P N 1 S5 ON VAR S1 IN fault S3 GND SC PC AC AM Common OUT MC OUT MA CONVERTER 3G3MV adixen Vacuum Products Operating instructions ADP ADS Series Two ...

Page 141: ...y are contaminated with micro biological explosive or radioactive substances Hazardous substances are substan ces and compounds in accordance with the hazardous goods regulations current version Neutralize the pump by flushing it with nitrogen or dry air Close all openings airtight Seal the pump or device in suitable protective film Return the pump device only in a suitable and sturdy transport co...

Page 142: ...olio of training opportunities We support you with your plant layout and provide opportunities We support you with your plant layout and provide first class on site service worldwide first class on site service worldwide Vacuum Solutions Vacuum Solutions from a single Source from a single Source Are you looking for a Are you looking for a perfect vacuum solution perfect vacuum solution Please cont...

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