G 01044 - Edition 10- Januar
y 10
3/3
A 50
Accessories
DN 40 O-ring
corrosion resistant
(with PTFE protection)
This accessory resists against corrosive and aggressive gases
(chloride and fluoride gases). A PTFE barrier and an internal
centering ring protect the FPM O-ring.
“Anti-noise” device
(LM version)
This accessory reduces the vibrations transmitted to the exhaust line
during cycle pumping at atmospheric pressure.
Lonworks and
DeviceNet Interfaces
Lonworks
P/N 110900
DeviceNet
P/N 108809
RS 232
P/N 109434
Series Two pumps offer a wide range of type of communication
(RS 232, RS 485, Dry contacts, HHR). We increased this offer with
two new types of interfaces.
The two most represented fieldbus in the Semiconductor industry are
Lonworks and DeviceNet. These interfaces are available for all Series
Two pumps except ADP 122 L.
Lonworks interface is used to interface the dry pump with every
Lam 2300 tool. It means that this interface should be ordered for
every installation on Lam 2300 tools. It completly replaces the
electrical interface you were used to connect to our pumps.
DeviceNet is used by Applied Materials or Matrix for its tools.
This interface can be proposed to OEM if necessary.
RS 232 interface is used to add a RS 232 serial link and for RS232
protocol needs.
P/N
DN 40 O-ring
corrosion resistant
108785
P/N
Anti-noise device
109418
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two
