G 01158 - Edition 04 - July 12
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E 011
Preliminary precautions
Users are advised to observe the precautions presented below during any
maintenance operation on the pump and, more especially, any operations
requiring the disassembly of sub-assemblies.
Remaining process gases in the pump may cause severe injury or death.
Before removing the pump, continue N
2
flow from the process tool for
30 min.
Nitrogen pressure and flow rate should be identical to the programmed
values during process.
During pump removal, operator could be in contact with process residues
on the exhaust which could cause severe injury or death.
Ask your safety department for instructions according to the local
statements.
Users are advised:
To stop the pump according to «shutdown procedure for discontinuous
operation» safety instructions (see COO).
To use gloves, protective goggles and, if required for the gases in question,
a breathing mask.
To ensure that the premises are well ventilated.
Not to dispose of residues in the usual waste disposal network and, if
necessary, to call an organization which specializes in their recycling or
destruction.
To have ready the “inlet and exhaust” flanges. They are fitted on the pump
at delivery. If the flanges are missing, contact Customer Service.
Protection against
corrosive gases
adixen Vacuum Products - Operating instructions - ADP/ADS Series Two