PM10U
EBARA
CORPORATION
Model EV-PA in this document is model code of Ebara.
Date
Contents
2019/04/04
Initial Release
2019/04/19
Drawing update
2019/05/21
Front page module name
ISSUED BY PRECISION MACHINERY COMPANY
INSTRUCTION MANUAL
DRY VACUUM PUMP
MODEL EV-PA 250
MODEL EV-PA 500
Doc.No.7312-Z94024 Rev.2
CAUTION
Read and understand this INSTRUCTION MANUAL thoroughly before using
this equipment.
Keep this INSTRUCTION MANUAL on hand for future reference.
!
To Facility and Tool Manufactures:
Distribute this Instruction Manual to all end-user personnel actually operating
this equipment.
Summary of Contents for EV-PA 250
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Page 20: ...P 20 PM10U EBARA CORPORATION 2 3 2 Outline Drawing EV PA250...
Page 21: ...P 21 PM10U EBARA CORPORATION EV PA500...
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Page 34: ...P 34 PM10U EBARA CORPORATION LCD BL LCD BL AUTO...
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