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PM10U 

 

EBARA 

CORPORATION

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Model EV-PA in this document is model code of Ebara.

 

 

 

 

Date 

Contents 

2019/04/04 

Initial Release 

2019/04/19 

Drawing update

 

2019/05/21 

Front page module name 

 

 

 

 

 

 

 

ISSUED BY PRECISION MACHINERY COMPANY

 

INSTRUCTION MANUAL 

DRY VACUUM PUMP

MODEL EV-PA 250

 

MODEL EV-PA 500

 

 

Doc.No.7312-Z94024 Rev.2 

       

CAUTION 

Read and understand this INSTRUCTION MANUAL thoroughly before using 
this equipment. 
Keep this INSTRUCTION MANUAL on hand for future reference. 

To Facility and Tool Manufactures:

 

Distribute this Instruction Manual to all end-user personnel actually operating 
this equipment. 

Summary of Contents for EV-PA 250

Page 1: ...SION MACHINERY COMPANY INSTRUCTION MANUAL DRY VACUUM PUMP MODEL EV PA 250 MODEL EV PA 500 Doc No 7312 Z94024 Rev 2 CAUTION Read and understand this INSTRUCTION MANUAL thoroughly before using this equi...

Page 2: ...of this manual without permission Manufacturer reserves the right to discontinue or change any specifications or Designs without notice and without incurring obligations EV PA in this instruction manu...

Page 3: ...romote harmony between technology and nature prevent environmental pollution and improve the overall results of our environmental management activities We are aware that environmental protection and m...

Page 4: ...EBARA or your dealer Your questions will be promptly answered and your suggestion may be considered for incorporation into our future products The design specification and appearance are subject to ch...

Page 5: ...3 If the trouble is caused by repair or remodeling of the pump by other than Ebara or authorization suppliers by Ebara 4 If the trouble is caused by corrosion or by products due to pumping the corrosi...

Page 6: ...hat the meaning of any warning you encounter is immediately clear DANGER indicates an imminently hazardous situation which if not avoided will result in death or serious injury WARNING indicates a pot...

Page 7: ...ubstances This pump is suitable for use on clean and non corrosive gases Check for leaks after you have installed the pump Avoid contact and keep inflammable substances out of reach Do not remove the...

Page 8: ...als and size to match the operating conditions in accordance with the power consumption rating and ambient air temperature of the pump Vents at both ends of the pump Place the pump at least 100mm from...

Page 9: ...output signals are generated from an open collector Wire all signals with the correct polarity SIG COM When output signals energize an inductive load such as a relay insert a diode 100V 1A class to l...

Page 10: ...lectric charge mark 1 High temperature warning Allow the piping and casing to cool before servicing Hot surface may burn or cause injury 2 Hazardous voltage warning Turn power off and lockout before s...

Page 11: ...P 11 PM10U EBARA CORPORATION...

Page 12: ...P 12 PM10U EBARA CORPORATION...

Page 13: ...oding to laws and ordinances applicable to the waste 2 Failure to do the unit maintenance including overhaul may trigger accidents causing injury or death unit troubles or environmental pollution Plan...

Page 14: ...2 2 Control System 17 2 2 1 Warning and Alarm 17 2 3 Detailed Specifications 18 2 3 1 Specifications 18 2 3 2 Outline Drawing 20 2 3 3 Performance Curve 22 2 3 4 System Flow 23 3 Installation 24 3 1 L...

Page 15: ...nd Inspection 38 6 1 Routine Inspection 38 6 2 Maintenance Parts List 39 6 3 Instruction for cleaning 39 6 4 Repair and Serving 39 7 Storage Disposal 40 7 1 Storage 40 7 2 Disposal 40 8 Troubleshootin...

Page 16: ...confirm that the all ordered accessories have been supplied 2 Check that no damage for the pump has occurred in transit 3 Store the pump in a dry and clean place if it is not installed at once after d...

Page 17: ...allast port The gas ballast flowrate is set by built in orifice at atomosphere pressure 2 2 Control System EV PA Series dry vacuum pumps have a built in measuring unit consisting of a Circuit Protecto...

Page 18: ...HEWTECH Corp CM 11 Gas Ballast Connection G1 8 Female Flow rate 8 4 Pam3 s at atmosphere pressure Gas type Dry Air or N2 Control Signal D sub 15Pin CP Rating 10A Acoustic noise test data 58 dB A The...

Page 19: ...CORPORATION EV PA Serise pump overview Inlet Control Panel Control Connector Circuit Protector CP Power Connector Ventilation Inlet Carrying Handle Ballast Port Fixture Option Ventilation Outlet Outle...

Page 20: ...P 20 PM10U EBARA CORPORATION 2 3 2 Outline Drawing EV PA250...

Page 21: ...P 21 PM10U EBARA CORPORATION EV PA500...

Page 22: ...let Pressure Pa Pumping Speed L min 1 10 100 1000 0 1 1 10 100 1000 10000 100000 Inlet Pressure Pa Pumping Speed L min 2 3 3 Performance Curve Fig 2 1 EV PA250 Performance Curve Dashed line Gas ballas...

Page 23: ...EBARA CORPORATION 2 3 4 System Flow Fig 2 3 System Flow Power Inlet Control Circuit Control Connector FAN Motor Driver Circuit Protector Check Valve Gas ballast Outlet Motor Main Pump MP Motor Booste...

Page 24: ...ent exposed rain snow ice or dust 2 Rubber feet of five each are attaches under the pump base To fix the pump install the pump on flat surface CAUTION Install pump in a location at an ambient not exce...

Page 25: ...tion of weight distribution and the seimic brackets Front Center Rear EV PA250 16 26 5 31 4 36 3 EV PA500 21 41 2 41 2 41 2 Loaded wight of each foot N weight kg Model Rubber feet Front side Rubber fo...

Page 26: ...d to insert flexible bellows when connecting the pipes to the suction and exhaust flanges of the pump The length of the flexible bellows on the vacuum suction side will vary according to the vacuum dr...

Page 27: ...e devices CAUTION Do not apply the power supply from the pump s power pack to any other equipment as this will result in malfunctioning of the control units and in pump failure WARNING Connect the gro...

Page 28: ...Plug type 200V class VM0303B Power capacity VA 450 660 Table 3 2 Recommended Power Cable Area Voltage Type Manufacture Specification Suitable wire Japan US 100 125V NR VM602 VM0291 3M NON PB HIRAKAWA...

Page 29: ...Pin No Signal name I O Signal type 1 PUMP START IN Run CLOSE Alternate 2 RESET IN Reset CLOSE Alternate 3 PUMP START STOP STATUS OUT Run CLOSE Alternate 4 RESERVED OUT 5 WARNING STATUS OUT WARNING OPE...

Page 30: ...ovides 5VDC power for input signals Note Wire all signals with the correct polarity SIG COM Note When output signals energize an inductive load such as a relay insert a diode 100V 1A class to limit th...

Page 31: ...p Start STOP Pump Stop LCD Indication Change RESET WARNING and ALARM Reset ENTER Pump setting selection LED RUN Pump running green WARNING WARNING condition orange ALARM ALARM condition red LCD For in...

Page 32: ...hen switched on in the state that short circuited by the PUMP START pin of the control connector The pump starts driving after warm up completion automatically When a pump is not abnormal 4 Two LCD ba...

Page 33: ...P 33 PM10U EBARA CORPORATION...

Page 34: ...P 34 PM10U EBARA CORPORATION LCD BL LCD BL AUTO...

Page 35: ...t the ALARM 7 MP OLD MP overload MP BP STOP Corrective action and reset 8 BP OLD BP overload MP BP STOP Corrective action and reset 9 MP THRML MP temterature high MP BP STOP Corrective action and rese...

Page 36: ...n the valve before starting the pump when the pump exhaust pipe is equipped with a valve WARNING Install CB based on the law and the standard in the installation region CB is not installed in the pump...

Page 37: ...taneously The RUN LED goes out and the hour counter stop 5 3 Operation when momentarily power failure happens The momentarily power failure means that power supply voltage become 85V or less The pump...

Page 38: ...accordance with the instruction of Section 8 Troubleshooting DANGER Keep the power supply to the pump turned off until you have finished the wiring and connecting work Also remove the power connector...

Page 39: ...C 7000 010 0400 CAUTION CHARGE MARK LABEL C 7000 001 9600 6 3 Instruction for cleaning The covers of the pump can be clean with an alcohol soaked cloth Do not damage the labels of the pump 6 4 Repair...

Page 40: ...place all gases inside the pump by purging them with dry Air or N2 gas 2 Seal off the inlet and outlet ports of the pump with blind flanges 3 Store the pump in a dry and clean place Temperatur 5 to 40...

Page 41: ...up conditions Instrument failure Replace instruments A length of START signal is not enough Input the START signal over 300ms Abnormal noise Excessive vibration Pump is not staible Install the pump on...

Page 42: ...LIVINGSTONE WEST LOTHIAN EH54 9DE U K PHONE 44 1506 460232 URL FAX 44 1506 460222 http www ebara com sg index php option com_frontpage Itemid 1 Service Locations CHINA http www ebara pm eu about us lo...

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Page 47: ...y or the unborn child May cause respiratory irritation or May cause drowsiness and dizziness the respiratory tract irritation May cause respiratory irritation or May cause drowsiness and dizziness ane...

Page 48: ...areas METHODS FOR CLEANING UP Do not touch spilled material without suitable protection See section 8 Take up spilled material with ashes or other absorbents After material is completely picked up was...

Page 49: ...EXPOSURE Human ihl 5000ppm 9 4mg L respiratory tract irritation and confusion ACGIH 2001 STOST REPEATED EXPOSURE Not available ASPIRATION TOXICITY Not available CARCINOGENICITY TDLo orl mouse 320mg kg...

Page 50: ...knowledge and skill at their own discretion and risk and Wako shall not be held liable for any damageresulting from handling or from contact with the above material List New Jers RTK Haz Subst List P...

Page 51: ......

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