Zeiss Crossbeam 550, Instruction Manual

Page: 132 / 136

Index ZEISS
Index
A
aBSD detector 47, 86
Accessory 131
Adjusting
Probe current 80
Analytic gun mode 79
Aperture 94
aSTEM detector 50, 88, 105
B
Backscattered electron 37
Bakeout 102
Baking out the gun head 102
Beam mode 33
BSD detector 46, 86
BSD4 detector 105
C
CAN communication 99
Cathodoluminescence 37, 52
CCD camera 40
Chamber CCD camera 40
Chamber door seal 101
Chamberscope 40
Checking
CAN communication 99
Lifetime of the ion source 106
Position of the circuit breaker 104
Temperature 102
Chemicals 94
CL detector 52, 91
Column mode 82
Consumable 130
Consumable and chemical 94
Consumables 94
Control panel 53
Cover panel, protective 18
D
Declaration of conformity 129
Detector 38, 82
aBSD 47, 86
aSTEM 50, 88, 105
BSD 46, 86
BSD4 105
CL 52, 91
EsB 45, 84
Everhart-Thornley 40
InLens SE 39, 83
SE 40, 83
SESI 44, 85
STEM 88
Detector mechanics
Lubricating the rod 105
Detector settings 83
Disposal 108
Microscope 110
Solid waste 110
Dual joystick 43
E
Electron optical column 31
Emergency off (EMO) option 19
Emergency shutdown 93
Emitter life 94
EsB detector 45, 84
Everhart-Thornley detector 40
Extractor voltage 81
F
Faraday cup 80
FIB column 35
Focus wobble 76
Fuse 104
G
Gemini II column 31
GUI 55
Gun head, bakeout 102
Gun mode
Analytic 79
Imaging 79
Normal 79
H
Hazard 15
Biological hazard 15
Burn hazard 15
Chemical hazard 15
Electrical hazard 16
High pressure hazard 16
Magnetic field hazard 16
Mechanical hazard 16
Radiation hazard 17
Suffocation hazard 17
I
Image
Acquisition 68, 74
Optimization 76
Saving 78
Imaging
Imaging mode 36
Imaging gun mode 79
Initializing the stage 99
132 Instruction Manual ZEISS Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000