ZEISS
6 Operation | 6.6 Shutting down the System
6.5.8 Setting up the CL Detector
Purpose
The CL detector is optionally available.
The CL detector collects visible or ultraviolet light and is especially useful for internal structural ex-
aminations of rocks, ceramics, and semiconductors.
Fig. 36: Zircon grains
The following settings are recommended for the CL detector:
5 kV – 30 kV
6–10 mm
(min. 4 mm)
1. In the Crossbeam SEM Control panel, select the Imaging tab.
2. From the Signal A drop-down list, select CL.
3. Adjust the EHT and the working distance (WD) according to the suggestions in the table in
order to optimize the image.
6.6 Shutting down the System
6.6.1 Finishing the Work Session
NOTICE
Risk of property damage: Schottky field emitter
If the Schottky field emitter is switched on and off too frequently or inappropriately, its lifetime
is reduced.
4
Avoid switching off the gun during the working week.
4
Use Standby mode for the weekend or a break of up to a week.
4
When using the Standby mode, activate the Partial Vent on Standby function.
Prerequisite
ü
The microscope is in ON mode.
1. In the Crossbeam SEM Control panel, select the Gun tab.
2. Activate the EHT Off @ Log Off checkbox.
3. Activate the Leave Gun On at Shutdown checkbox.
4. Only when interrupting work for longer periods between 2 and 7 days: In the Vacuum tab
activate the Partial Vent on Standby checkbox.
à
This maintains the gun vacuum, and switches off and protects the turbo pump.
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
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Summary of Contents for Crossbeam 550
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