Zeiss Crossbeam 550, Instruction Manual

Page: 97 / 136

ZEISS 8 Troubleshooting | 8.1 Overview
Keyword Symptom Cause Remedy
Automatic regulation of
the emission current is de-
activated. Activate the Regulate
checkbox in the FIB tab of
the FIB Control panel.
Extractor target is not set
to an appropriate value. Change the extractor tar-
get. Refer to
Manually
Finding a New Extractor
Value [
}
107] .
Open the Gun Monitor
and record the parameters
FIB Suppressor Target
and FIB Emission I and
send it to your ZEISS service
representative.
FIB Suppressor voltage is ap-
proaching 0 V or 2 kV. Ion source needs to be re-
generated. Refer to Regenerating the
Ion Source by Heating
[
}
106] .
FIB Misalignment of struc-
tures when milling with
different FIB probe cur-
rents. Beam shift for the probe
currents is not adjusted. Adjust the beam shift cor-
rection for the relevant FIB
probe currents.
Image quality Image quality gets worse,
but there is no change in
total emission current. Field emission gun has
been damaged due to arc-
ing. Contact your local ZEISS
service representative to
have the field emission gun
replaced.
Image is noisy and noise
reduction methods do not
help. Field emission gun is used
up. Contact your local ZEISS
service representative to
have the field emission gun
replaced.
Image is bad at low EHT
(e.g. 1 kV) Working distance is too
long. Reduce the working dis-
tance to a maximum of
7 mm.
InLens image InLens image is noisy. Working distance is too
long. Reduce the working dis-
tance.
No InLens image can be
obtained. EHT exceeds 20 kV. Reduce EHT to a maximum
of 20 kV.
Microscope Microscope is dead. Circuit breaker is tripped
(lower position). Refer to Checking the Posi-
tion of the Circuit Breakers
[
}
104] .
PC Stored position of the
specimen stage cannot be
approached correctly. PC has crashed. Restart the PC.
Stage needs to be driven
to a well-defined position. Refer to Initializing the
Stage [
}
99] .
SEM Gun Gun is switched off auto-
matically. Gun has been switched off
automatically for safety
reasons since gun vacuum
is worse than
2 × 10⁻⁸ mbar Refer to Baking out the
Gun Head [
}
102] .
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000 97