ZEISS
10 Technical Data and Conformity | 10.1 Product Specification
10 Technical Data and Conformity
10.1 Product Specification
Electron Optics
Parameter
Description
Resolution
GEMINI II column in High Resolution configuration (max. probe cur-
rent 40 nA)
Optimum working distance
Without using Tandem Decel:
§
0.9 nm at 15 kV
§
1.6 nm at 1 kV
Including Tandem Decel option:
§
1.4 nm at 1 kV
GEMINI II column in High Current configuration (max. probe current
100 nA)
Optimum working distance
Without using Tandem Decel:
§
0.9 nm at 15 kV
§
1.8 nm at 1 kV
Including Tandem Decel option:
§
1.6 nm at 1 kV
Acceleration volt-
age
Range:
20 V to 30 kV
Adjustment:
Continuously variable in 10 Volt steps
Probe current
High Resolution configuration:
10 pA to 40 nA
High Current configuration:
10 pA to 100 nA
Probe current regulation
via a double condenser system
Magnification
Range:
12x to 2,000,000x referenced to Polaroid image format
Electron source
Filament:
Schottky field emitter
Automatic emitter run-up:
Safe controlled run-up to the target
emitter conditions
Objective lens
Type:
Patented GEMINI II electromagnetic/electrostatic objective lens
system (68º conical final lens) with water cooling for best thermal sta-
bility and reproducibility
Focus
Working distance:
Range from 1 to 50 mm, depending on accelera-
tion voltage
Focus compensation:
Automatic compensation to minimize focus
changes over the entire acceleration voltage and probe current range
Dynamic focus:
For correction of focus on tilted specimens
Focus wobble:
For assistance in aperture alignment, with adjustable
amplitude and speed
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
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Summary of Contents for Crossbeam 550
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