Zeiss Crossbeam 550, Instruction Manual

Page: 38 / 136

3 Product and Functional Description | 3.2 Main Components ZEISS
3.2.4.2 Detectors Overview
The beam scans the specimen and initiates particles to be emitted. A detector collects the emis-
sion and produces an electric signal with an amplitude proportional to the number of particles at
any given time.
Standard Detectors Detected Signals Typical Application
InLens SE Detector [
}
39]
SE1 Surface structure
SE Detector [
}
40] SE2 Topography
Optional Detectors Detected Signals Typical Application
SESI Detector [
}
44] SE2
Ions
Channeling contrast (crystal
orientation)
Compositional contrast
EsB Detector [
}
45] SE1
BSE
Surface structure
Material contrast
BSD Detector [
}
46] BSE Compositional contrast
aBSD Detector [
}
47]
BSE Angular resolved BSE imag-
ing
Compositional contrast
aSTEM Detector [
}
50]
Transmitted electrons Diffraction contrast
Compositional contrast
CL Detector [
}
52] Light photons Mineralogy
38 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000