Zeiss Crossbeam 550, Instruction Manual

Page: 44 / 136

3 Product and Functional Description | 3.3 Optional Components and Accessories ZEISS
3.3 Optional Components and Accessories
3.3.1 Optional Detectors
3.3.1.1 SESI Detector
Purpose The Secondary Electrons Secondary Ions (SESI) detector is suitable to detect secondary electrons
as well as secondary ions. In Crossbeam systems, the optional SESI detector replaces the SE detec-
tor.
1
2
4
5
3
Fig. 18: Schematics of the SESI detector
1 FIB column
2 Objective lens
3 SESI detector
4 Collector grid
5 Specimen
Operating
Principle
Depending on the polarity of the collector voltage, either electrons or ions scattered from the
specimen
5
are attracted by a collector grid
4
and accelerated to the converter. In the
converter, both electrons and ions are converted into secondary electrons which are used to gen-
erate an image.
Detector Mode FIB Mode Detected Signals Typical Application
SE mode
typical collector v300 V
SEM, FIB Secondary electrons Topography
Ion mode
typical collector voltage −4 kV
FIB Secondary ions Crystal orientation contrast, ma-
terial contrast e.g. imaging of
corrosion/oxidation caused by FIB
processes in metals
44 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000