Zeiss Crossbeam 550, Instruction Manual

Page: 28 / 136

3 Product and Functional Description | 3.1 System Overview ZEISS
1 Multichannel Gas Injection System (GIS)
for up to 5 precursor materials on a sin-
gle flange
Refer to instruction manual Multi GIS
2 Annular STEM detector (aSTEM) for
transmission imaging and quality con-
trol. Two different models are available
(aSTEM4, aSTEM1). Detection of up to
4 channels in parallel is possible.
Refer to aSTEM Detector [
}
50]
3 Local charge compensator for SEM
imaging and analysis of non-conductive
specimens
Refer to instruction manual Charge
Compensator
4 Electron flood gun for ion beam prepa-
ration of non-conductive specimens
Refer to instruction manual Flood Gun
5 Single needle GIS for high angle speci-
men access
Refer to instruction manual UniGIS
6 Micro-manipulator for specimen modifi-
cation and probing
7 BSD detector for high efficiency BSE de-
tection and angle selective material
characterization. Four different models
are available (aBSD4, aBSD1, BSD4,
BSD1). Detection of up to 4 channels in
parallel is possible.
Refer to BSD Detector [
}
46] and aBSD
Detector [
}
47]
8 EsB detector for finest z resolution with-
out topographic artifacts and unique
material contrast
Refer to EsB Detector [
}
45]
9 Airlock with optional navigation camera
(80 mm or 200 mm wide) for fast and
efficient specimen transfer and fast
pumping times
Refer to the respective instruction man-
ual 80 mm Airlock or 200 mm Airlock
Further options:
§ Control panel
Refer to Control Panel [
}
53]
§
Plasma Cleaner
Refer to instruction manual Plasma Cleaner
§
Energy-dispersive X-ray spectrometer (EDS) for chemical analysis
§ EBSD for crystallographic mapping
§
SESI detector for Secondary Electron and Secondary Ion imaging
Refer to SESI Detector [
}
44]
§
CL detector for the analysis of cathodoluminscent materials
Refer to CL Detector [
}
52]
§
Nanopatterning and Visualization Engine (NPVE) for advanced patterning and lithography
tasks
Information will be provided by the manufacturer
§ Electrostatic Beam Blanker for SEM
Refer to instruction manual Beam Blanker
§
Rapid Laser Ablation Upgrade
Refer to instruction manual Rapid Laser Ablation Upgrade
§
Further options on request
28 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000