ZEISS
3 Product and Functional Description | 3.2 Main Components
3.2.2.1 Beam Modes
With the GEMINI II column, different beam modes are available:
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High Resolution
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High Resolution Low Current
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Normal
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Minimum Probe Current
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Maximum Probe Current
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Fisheye
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Widefield
High Resolution
Characteristics
Beam Path
The upper condenser
1
has a low excitation which is var-
ied in order to adjust the probe current in a limited range.
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Electron interaction effects are minimized
§
High spatial resolution is guaranteed
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Probe current range is limited
1
High Resolution Low Current
The characteristics and the beam paths of the High Resolution Low Current mode and High Reso-
lution mode are the same, except the different operation of the gun.
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
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Summary of Contents for Crossbeam 550
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