Zeiss Crossbeam 550, Instruction Manual

Page: 74 / 136

6 Operation | 6.2 Obtaining a First Image ZEISS
6.2.5 Switching on the EHT
Purpose When you switch on the EHT, the gun starts emitting electrons.
Prerequisite
ü
The chamber and the gun head have been evacuated.
ü
The gun has been switched on.
1. In the Crossbeam SEM Control panel, select the Control tab.
2. Double-click the EHT Target readout.
à
The EHT Target window is displayed.
3. In the input field, enter
10
and click OK.
4. In the right part of the Status Bar , click .
à
The pop-up menu for vacuum, gun, and EHT activation is displayed.
5. Click EHT On.
à
The EHT runs up to 10 kV.
à
In the right part of the Status Bar , the vacuum, gun, and EHT status buttons merge to
.
6.2.6 Acquiring an Image
Purpose
Info
The following procedure describes the best way to quickly obtain an image without the con-
trol panel. You can also use the control panel to adjust aperture alignment, magnification/fo-
cus and brightness/contrast.
Overview The procedure contains the following steps:
§ Selecting the Column Mode and Probe Current [
}
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§
Selecting the SE Detector [
}
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§
Setting a Fast Scan Speed [
}
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§
Setting a Low Magnification [
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§
Setting a Long Working Distance [
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§ Adjusting Brightness and Contrast [
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§
Visualizing Details on the Specimen Surface [
}
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6.2.6.1 Selecting the Column Mode and Probe Current
1. In the Crossbeam SEM Control panel, select the Control tab.
2. In the Column section, click Normal .
à
The column mode is set to Normal .
3. In the Beam section, double-click the I Probe readout.
à
The I Probe window is displayed.
4. In the input field, enter
300
.
à The probe current is set to 300 pA.
6.2.6.2 Selecting the SE Detector
1. In the Crossbeam SEM Control panel, select the Imaging tab.
74 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000