Zeiss Crossbeam 550, Instruction Manual

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ZEISS Glossary
EMC
Electromagnetic Compatibility
EMO
Emergency Off
EsB
Energy-selective Backscattered
Eucentric
Type of stage, the rotation axes of which
intersect in the same point. The specimen
surface is located in the eucentric point,
where the tilt axis meets the beam axis.
This guarantees that the focus is main-
tained when the specimen is tilted at a
certain working distance.
Extractor
Positive electrode that attracts electrons
from the filament.
Faraday cup
Small insulated metal container,
equipped with an aperture where elec-
trons can enter but not escape. Used to
measure the specimen current in the mi-
croscope.
FESEM
Field Emission Scanning Electron Micro-
scope
FIB
Focused Ion Beam
Focus wobble
Function that sweeps the focus of the
objective lens backwards and forward
through the focus on the specimen
plane. When the aperture is misaligned a
lateral shift is observed.
FTP
File Transfer Protocol
GIS
Gas Injection System
GUI
Graphical User Interface
H
Height
IGC
Industrial Gases Council
IGP
Ion Getter Pump
IR
Infrared
LOTO
Lockout/Tagout
M
M-axis
MSDS
Material Safety Data Sheet
PC
Personal Computer
PE
Protective Earth (ground)
PE
Primary Electron
Penning gauge
Device for measuring high vacuum in the
vacuum system.
Pre-vacuum pump
A pump for generating a pre-vacuum.
Primary electron beam
Narrowly bundled beam of accelerated
electrons that hit the specimen surface.
R
R-axis (Rotation)
RF
Radio Frequency
RMS
Root Mean Square
Schottky field emitter
Type of electron source in which emis-
sion occurs at or near the work function
barrier.
Instruction Manual ZEISS Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000 7