Zeiss Crossbeam 550, Instruction Manual

Page: 70 / 136

6 Operation | 6.2 Obtaining a First Image ZEISS
6.2.2 Loading the Specimen Chamber
Purpose
Info
If your microscope is equipped with the optional airlock, use the airlock for loading the speci-
men chamber. For more information refer to the respective instruction manual.
Overview The procedure contains the following steps:
§
Displaying the Crossbeam SEM Control Panel [
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§
Driving the Stage to a Low Position [
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§
Venting the Specimen Chamber [
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Mounting the Specimen Holder [
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§ Evacuating the Specimen Chamber [
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6.2.2.1 Displaying the Crossbeam SEM Control Panel
Prerequisite ü
The SmartSEM user interface is started.
1. From the Menu Bar , select Tools > Goto panel .
à The Panel Configuration Bar is displayed. It contains an alphabetical list of functions.
2. Double-right-click Crossbeam SEM Control.
à
The Crossbeam SEM Control panel is added to the docking panel.
6.2.2.2 Driving the Stage to a Low Position
Prerequisite
ü
The stage is initialized.
1. In the Crossbeam SEM Control panel, select the Imaging tab.
2. In the
Detector / Active Channel section, select TV from the Signal A drop-down list.
à The inside of the specimen chamber is visible in the Image Area .
3. In the Crossbeam SEM Control panel, select the Stage tab.
4. Activate the Track Z checkbox.
à
The current working distance (WD) is displayed in the Data Zone .
5. If the Data Zone is deactivated, activate it via Menu Bar > View > Data Zone > Show
Data Zone .
6. Use the dual joystick to drive the specimen stage downwards to a low position.
NOTICE Risk of property damage: Observe the stage movement via camera to
avoid crashing.
6.2.2.3 Venting the Specimen Chamber
1. In the Crossbeam SEM Control panel, select the Vacuum tab.
2. Click Vent .
à
The Vent message box is displayed.
3. To start venting, click Yes .
à
The specimen chamber is purged with gaseous nitrogen.
à
If the Stage is not initialized, a system message is displayed. Refer to Initializing the Stage
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70 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000