Zeiss Crossbeam 550, Instruction Manual

Page: 86 / 136

6 Operation | 6.5 Finding Appropriate Detector Settings ZEISS
6.5.6 Setting up the aBSD/BSD Detector
Purpose The aBSD detector is a pneumatically retractable backscattered electron detector which is inserted
below the objective lens and is used for high efficiency and angle selective (aBSD) material charac-
terization.
Fig. 34: Quad mode showing different contrast on different segments of the aBSD detector: Seg-
ment S1: Pure material contrast (top left), Segment S2: Material contrast and topography (top
right), Segments S3 to S6: Pure topography (bottom left). For comparison: Surface contrast seen
with the InLens
SE detector (bottom right)
The following settings are recommended for the aBSD detector:
EHT Typical WD Detector Settings
0.5–30 kV 5–12 mm Compositional mode for obtaining an image
that is high in atomic number contrast
Use topographic mode for showing surface
details
Use individual settings for channeling con-
trast
Make use of different concentric rings of the
aBSD detector to get angular resolved BSE
images
Use high or very high detector gain for low
accelerating voltage and/or low beam current
The EHT should be bigger than 2 kV to
achieve a significant detection efficiency.
1. From the Panel Configuration Bar, select BSD Control.
The BSD Control panel enables you to change the polarity of the segments, select BSD
modes, and set the BSD gain.
86 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000