10 Technical Data and Conformity | 10.2 Installation Requirements
ZEISS
Parameter
Description
High efficiency annular scintillator detector mounted in GEMINI col-
umn with optically coupled photomultiplier.
InLens EsB detector (optional):
Column-mounted high efficiency scintillator detector with optically
coupled photomultiplier for detection of energy and angle selective
backscattered electrons. Filtering grid adjustable from 0 V to −1.5 kV
for contrast adjustment.
Chamber detectors
SE detector:
Everhart-Thornley SE detector with optically coupled photomultiplier;
collector bias adjustable from −250 to +400 V
SESI detector (optional):
Combined Secondary Electron Secondary Ion (SESI) detector based on
a scintillator photomultiplier system; easy change between secondary
ion and secondary electron mode by converting the electrode voltage;
replaces the SE detector
CL detector (optional):
Cathodoluminiscence (CL) chamber detector
aSTEM detector (optional):
Pneumatically retractable multi-mode annular Scanning Transmission
Electron Microscopy (aSTEM) detector; enables bright field (BF), dark
field (DF), and high angle annular dark field (HAADF) detection
aBSD/BSD detector (optional):
Pneumatically retractable 5 or 6 segment multi-mode solid state BSE
detector; enables materials contrast, crystal orientation, and topo-
graphic imaging
Chamber camera
Color CCD camera
with white-light illumination and IR illumination
Specimen current
monitor
6 range auto ranging for precise current measurement in the range of
1 pA to 10 µA
For more details, refer to the document Product Specification.
10.2 Installation Requirements
For a complete list of the installation requirements, refer to the document Installation Require-
ments.
Location Requirements
Parameter
Requirement
Installation site
Exclusively inside buildings
Recommended
room size
Min. 4.0 m × 5.0 m × 2.3 m
Service area
Min. 1.0 m at each side
Entrance
Min. 1.1 m wide
Hallways
Min. 1.3 m wide
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Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Summary of Contents for Crossbeam 550
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