Zeiss Crossbeam 550, Instruction Manual

Page: 103 / 136

ZEISS 8 Troubleshooting | 8.4 Column
8.4.1.2 Starting the Bakeout
Info
You cannot work with the microscope while the bakeout procedure runs.
Safety Information
NOTICE
Risk of property damage: Hot surfaces during bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout, par-
ticularly after a long bakeout cycle.
4
Do not place any objects on the grids of the electron column during bakeout.
4
After the bakeout procedure, let surfaces cool down before working around the column.
4
Only advanced operators are allowed to perform the bakeout procedure.
Prerequisite
ü
Requires the Supervisor privilege and the user level Service
ü
Only advanced operators are allowed to perform the bakeout procedure
1. In the Panel Configuration Bar , double-click Bakeout .
à
The Bakeout dialog is displayed.
2. If the Full service bakeout checkbox is available, deactivate the Full service bakeout
checkbox.
INFO: Full service bakeout includes column heating that may lead to column misalignment.
3. From the Bakeout drop-down list, select a bakeout cycle.
For 2 hours heating / 1.5 hours cooling, select Quick .
For 8 hours heating / 1.5 hours cooling, select Overnight .
For 43 hours heating / 7 hours cooling, select Weekend .
For a cycle defined by the operator, select User .
4. To start the bakeout procedure, click Bakeout Start .
8.4.2 Calibrating the Probe Current
Purpose This function enables you to automatically calibrate the probe currents within a few minutes.
Calibrating the probe current can be necessary in the following cases:
§
Before performing analytical applications (e.g. EDX, WDX)
§
After changing the extractor voltage
§
To improve the accuracy of the set probe current values
Parts and Tools
Designation Part no.
Faraday cup 348342-8055-000
Prerequisite
ü
The microscope has a Gemini II column
1. Load the Faraday cup into the specimen chamber.
2. Pump the specimen chamber.
3. Switch on the electron beam.
4. Set a magnification that allows transmission of the complete electron beam into the cavity
of the Faraday cup through the aperture orifice.
5. In the Panel Configuration Bar, double-click Probe Current Calibration.
à
The Probe Current Calibration window is displayed.
6. Activate the Spot checkbox.
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000 103