ZEISS
4 Software Description | 4.2 SmartFIB
4.2.3 SmartFIB Program Suite
The SmartFIB program suite comprises two main programs: SmartFIB and Designer (requires the li-
cense CREATOR). Each of these programs has a different field of use.
The main purpose of the SmartFIB program suite is to transfer geometric elements to a specimen
with the help of a particle beam. This process is referred to as "exposure".
Access: Windows Start Menu > Programs > SmartSEM
Program
Description
SmartFIB
§
Main tool for online/live work on the microscope
§
Milling/etching/deposition of patterning elements
§
Provides the following modes:
– Live Mode: Mainly used for editing patterns and structures and
creating recipes
– Sample Mode: Mainly used for creating recurring/automated
workflows
– EPD Mode: Used for thickness determination of a TEM lamella
Designer
§
Offline creation of layouts: Arrangement of elements in the scan-
ning area
§
Interaction with Sample Mode: Used as a drawing tool for Sample
Mode
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
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Summary of Contents for Crossbeam 550
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