Zeiss Crossbeam 550, Instruction Manual

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ZEISS ​ Table of Contents​
Table of Contents
Glossary................................................................................................................. 6
1 General Information ............................................................................................. 9
1.1 Text Conventions and Link Types ............................................................................. 9
1.2 Explanation on Warnings and Additional Information .............................................. 10
1.3 Further Applicable Documents ................................................................................. 11
1.4 Contact.................................................................................................................... 12
2 Safety .................................................................................................................... 13
2.1 Intended Use ........................................................................................................... 13
2.2 Safety Procedures .................................................................................................... 14
2.2.1 Safe Operation Conditions............................................................................ 14
2.2.2 Requirements for Personnel.......................................................................... 14
2.2.3 Preventive Maintenance ............................................................................... 14
2.2.4 Safe Handling of Spare Parts ........................................................................ 15
2.3 Prevention of Hazards.............................................................................................. 15
2.3.1 Biological Hazards ........................................................................................ 15
2.3.2 Burn Hazards................................................................................................ 15
2.3.3 Chemical Hazards......................................................................................... 15
2.3.4 Electrical Hazards ......................................................................................... 16
2.3.5 High Pressure Hazards .................................................................................. 16
2.3.6 Magnetic Field Hazards ................................................................................ 16
2.3.7 Mechanical Hazards ..................................................................................... 16
2.3.8 Radiation Hazards ........................................................................................ 17
2.3.9 Suffocation Hazards ..................................................................................... 17
2.4 Safety Equipment..................................................................................................... 18
2.4.1 Protective Cover Panels ................................................................................ 18
2.4.2 Main Switch ................................................................................................. 19
2.4.3 Emergency Off (EMO) Option ....................................................................... 19
2.4.4 Locking Devices............................................................................................ 20
2.4.5 Lockout/Tagout Equipment .......................................................................... 21
2.4.6 Safety Labels ................................................................................................ 22
3 Product and Functional Description ..................................................................... 27
3.1 System Overview ..................................................................................................... 27
3.2 Main Components ................................................................................................... 29
3.2.1 Vacuum System............................................................................................ 29
3.2.2 Electron Optical Column | Gemini II .............................................................. 31
3.2.3 Ion-sculptor Focused Ion Beam (FIB) Column (Optional)................................ 35
3.2.4 Detectors ..................................................................................................... 37
3.2.5 Specimen Stage............................................................................................ 42
3.2.6 Dual Joystick ................................................................................................ 43
3.3 Optional Components and Accessories .................................................................... 44
3.3.1 Optional Detectors ....................................................................................... 44
3.3.2 Control Panel ............................................................................................... 53
4 Software Description ............................................................................................ 55
4.1 SmartSEM................................................................................................................ 55
4.1.1 SmartSEM User Interface .............................................................................. 55
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000 3