Zeiss Crossbeam 550, Instruction Manual

Page: 8 / 136

Glossary ZEISS
Scintillator
Substance that absorbs electrons and in
response, fluoresces photons while re-
leasing the previously absorbed energy.
SE
Secondary Electron
Secondary electrons
Low-energy electrons that are emitted
from the specimen surface when the
specimen is hit by the primary electron
beam. Secondary electrons are generated
by inelastic scattering.
SEM
Scanning Electron Microscope
SEMI
Semiconductor Equipment and Materials
International (SEMI) is a industry associa-
tion comprising companies involved in
the electronics design and manufacturing
supply chain.
SESI
Secondary Electron Secondary Ion
SIMS
Secondary Ion Mass Spectrometry
STEM
Scanning Transmission Electron Micro-
scope
Stigmator
Compensates astigmatism (lens aberra-
tion), so that the electron beam becomes
rotationally symmetrical.
Suppressor
Electrode (anode) that suppresses un-
wanted thermionic emission from the
shank of the Schottky field emitter.
T
T-axis (Tilt)
TEM
Transmission Electron Microscope
U
Voltage
User
Person examining a sample under the mi-
croscope.
W
Width
WD
Working Distance
WDS
Wavelength Dispersive X-ray Spec-
troscopy
WDX
Wavelength Dispersive X-ray Spec-
troscopy
WEEE
Waste Electrical and Electronic Equip-
ment
X
X-axis
XeF₂ precursor
Xenon difluoride precursor
X-ray
Type of high energy electromagnetic ra-
diation, that is generated during the op-
eration of electron microscopes.
Y
Y-axis
Z
Z-axis
ZEISS Sales & Servicepartner
The sales and servicepartner is generally
in the field for customer support in a re-
gional area and / or a clearly defined cus-
tomer group.
8 Instruction Manual ZEISS Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000