3 Product and Functional Description | 3.2 Main Components
ZEISS
Normal
Characteristics
Beam Path
The upper condenser
1
focuses the beam and creates a
crossover above the beam-limiting aperture
2
. The upper
condenser is adjusted to modify the probe current.
The lower condenser
3
is used for aperture matching of
the objective lens
4
for optimum spatial resolution.
§
Whole probe current range is accessible
§
High spatial resolution is usually guaranteed
Instead of aperture matching it is also possible to adjust the
amount of depth of field desirable. The lower condenser
3
is then operated at increasing excitations.
§
Provides a higher depth of field
§
Useful to investigate specimens with a high aspect ratio
or to navigate on a tilted specimen
1
2
3
4
Minimum Probe Current
The characteristics and the beam paths of Minimum Probe Current mode and Normal mode are
the same, except the different operation of the gun.
Maximum Probe Current
The characteristics and the beam paths of Maximum Probe Current mode and Normal mode are
the same, except the different operation of the gun.
Fisheye
§
Provides a huge field of view, allows you to image the whole specimen holder with the elec-
tron beam.
§
Useful for an overview of large specimens and for specimen navigation.
Widefield
§
Provides a huge field of view, allows you to image the whole specimen holder with the elec-
tron beam.
§
Useful for an overview of large specimens and for specimen navigation.
§
Can be used with EHTs between 100 V and 2000 V.
§
Requires the SmartSEM software license Field Mode.
34
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Summary of Contents for Crossbeam 550
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