ZEISS
10 Technical Data and Conformity | 10.1 Product Specification
Parameter
Description
Crossbeam 550
Crossbeam 550 L
Analytical working
distance
5 to 8.5 mm
Coincidence point
5 mm (SEM), 12 mm (FIB)
Column arrange-
ment
The angle between electron-optical and focused ion beam-column is
54°.
Specimen stage
Type:
6-axes motorized super-eucentric, controlled via the SmartSEM
user interface, operated by a dual joystick control box
Mounting:
Drawer-type door
Movements:
§
§
Z = 50 mm
§
§
Tilt = −4° to 70°
§
Rotation = 360° continuous
§
X/Y = 153 mm
§
Z = 50 mm
§
M = 20 mm
§
Tilt = −15° to 70°
§
Rotation = 360° continuous
INFO: The movements may be reduced by specimen size, operating
conditions, and accessories attached.
Accessory ports:
Two accessory ports on the stage door are pro-
vided
Specimen weight:
Up to 0.5 kg
Specimen current monitor
with integrated touch alarm (audible
touch alarm warning with on-screen message)
Specimen mounts:
One carousel 9x specimen holder for 13 mm di-
ameter stubs included in base tool configuration; various specimen
holders available as option
Plasma cleaner
(optional)
Integrated plasma cleaner:
Chamber mounted plasma cleaner for removal of hydrocarbon con-
tamination from both specimen and chamber; integrated software
control for user defined cleaning cycles without user interaction after
starting the cleaning process
Detection System
Parameter
Description
Detection system
Detection system equipped for parallel detection and signal process-
ing of multiple detector channels:
§
Up to 12 detector channels and up to 3 TV inputs
§
Parallel detection, processing, and display of up to four channels
possible
§
2 signal detector inputs can be mixed for enhanced image infor-
mation
InLens detectors
InLens SE detector:
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
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Summary of Contents for Crossbeam 550
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