10 Technical Data and Conformity | 10.2 Installation Requirements
ZEISS
Description
Size (mm) appr.
Distribution of
load (kg)
Footprints
Static damping block
180 × 180 × 160
1 × 12.0
180 mm × 180 mm
Pre-vacuum pump
432 × 265 × 295
1 × 24.5
200 mm × 180 mm
FIB rack
560 × 810 × 1600
4 × 50
on wheels
Chiller (optional, water- or air-cooled)*
530 × 640 × 740
4 × 22.5
on wheels
Compressor*
281 × 139 × 239
1 × 25.0
281 mm × 139 mm
*Actual measurements are country dependent (different manufacturers).
Description
Size (mm) appr.
Distribution of
load (kg)
Footprints
Ion-sculptor FIB
940 × 1070 × 1800
(Crossbeam 550)
940 × 1070 × 1880
(Crossbeam 550 L)
4 × 250
4 × 297.5
4 × Ø 80 mm
Ion-sculptor FIB
+ 200 mm airlock
1080 × 1070 × 1800
(Crossbeam 550)
1080 × 1070 × 1880
(Crossbeam 550 L)
4 × 260
4 × 305
4 × Ø 80 mm
1650 × 1000 × 838
or
1100 × 1000 × 838
4 × 24.3
4 × Ø 50 mm
Static damping block
180 × 180 × 160
1 × 12.0
180 mm × 180 mm
Pre-vacuum pump
432 × 265 × 295
1 × 24.5
200 mm × 180 mm
FIB rack
560 × 810 × 1600
4 × 50
on wheels
Chiller (optional, water- or air-cooled)*
530 × 640 × 740
4 × 22.5
on wheels
Compressor*
281 × 139 × 239
1 × 25.0
281 mm × 139 mm
*Actual measurements are country dependent (different manufacturers).
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Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Summary of Contents for Crossbeam 550
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