Zeiss Crossbeam 550, Instruction Manual

Page: 72 / 136

6 Operation | 6.2 Obtaining a First Image ZEISS
4. Carefully close the chamber door.
à
The specimen holder and the specimen inside the chamber are visible in the Image
Area .
6.2.2.5 Evacuating the Specimen Chamber
1. In the Crossbeam SEM Control panel, select the Vacuum tab.
2. Click Pump .
à
Several vacuum status messages display the current vacuum levels.
à As soon as the appropriate vacuum level is achieved, the vacuum status message Vac
Status = Ready is displayed.
This may take up to 5 minutes.
6.2.3 Locating the Specimen
Overview The procedure contains the following steps:
§
Positioning the Stub under the Electron Beam [
}
72]
§ Moving the Specimen to the Proper Height [
}
73]
6.2.3.1 Positioning the Stub under the Electron Beam
Safety Information
NOTICE
Risk of property damage: Driving the stage
While the stage is driven manually, there is a risk of damaging the objective lens and/or the
specimen.
4
Ensure not to hit the objective lens while driving the stage.
4
Monitor the moving stage in TV mode.
4
To stop the moving stage immediately, press F12 or press the Break push button of the
dual joystick panel.
4
Manually lower the stage before you open the chamber door. Alternatively, activate the Z
move on Vent checkbox in the Stage tab of the Crossbeam SEM Control panel.
1. In the Stage Navigation Bar, select Stage Sideview from the upper drop-down list and Stage
Topview from the lower drop-down list.
INFO: To open the Stage Navigation Bar, navigate to View > Toolbars and activate Stage
Navigation Bar (for Widescreen users). Alternatively, you can access the Stage Navigation
Bar via Stage > Navigation.
2. Click Settings.
à
The Stage Navigation Settings dialog is displayed.
3. In the Stage Navigation Settings dialog, click Show Holder Gallery.
à
The Sample Holder Gallery dialog is displayed.
4. In the Sample Holder Gallery dialog, click the specimen holder you are using.
5. Activate the Is Available checkbox.
6. Close the Sample Holder Gallery dialog.
7. Close the Stage Navigation Settings dialog.
8. In the Stage Topview section of the Stage Navigation Bar, spot the stub with the specimen
you want to observe.
9. To drive the stub directly under the electron beam, double-click the stub.
72 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000