Zeiss Crossbeam 550, Instruction Manual

Page: 107 / 136

ZEISS 8 Troubleshooting | 8.7 Focused Ion Beam
8.7.3 Manually Finding a New Extractor Value
Purpose If emission still fails after performing the multi-heating routine (see Regenerating the Ion Source
by Heating [
}
106] ), you have to find a new extractor value.
In a first step, you can use the automatic FIB extractor adjustment functions:
§ You can use Source Management. Source Management includes automatically triggered pro-
cedures to ensure an optimum performance of the ion source. These procedures are config-
ured in the
SmartSEM Administrator via FIB > FIB Source Management .
§
You can trigger the extractor adjustment via FIB Control Panel > FIB > Extr. Adjust .
If the automatic FIB extractor adjustment functions fail, you have to find a new extractor value
manually.
1. In the FIB Toolbar , from the FIB drop-down list, select FIB .
à
The FIB tab of the FIB Control Panel is displayed.
2. Click Standby .
à
The FIB gun is set to Standby mode.
3. To disable the suppressor regulation, deactivate the Regulate checkbox.
4. Set the FIB Suppressor Target to 1200 V.
5. Select the Options tab.
6. Activate the FIB Extractor Manual Override checkbox.
7. Move the slider FIB Manual Extractor Target slowly until FIB emission starts.
8. Adjust the FIB Manual Extractor Target until emission is approximately 2 μA.
9. Leave the source in this condition for about 5 minutes, adjust the extractor voltage if neces-
sary to keep the emission at 2 μA.
10. Click Save Value .
11. Deactivate the FIB Extractor Manual Override checkbox.
12. Select the FIB tab.
13. To enable the suppressor regulation, activate the Regulate checkbox.
Info
During the process of finding a new extractor target, the FIB gun will be automatically
switched to the
On state.
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000 107